Microspike arrays are formed on a tungsten surface by irradiating a femtosecond laser through a mask aperture in the air. Formation mechanism of such microspike arrays were discussed with analysis of laser light diffraction. Intensity distribution diffracted through a mask aperture was calculated by using the Fresnel Kirchhoff integral formula, not the Fresnel diffraction formula, because the distance between a mask aperture and a tungsten surface is almost as short as the size of a mask aperture. Estimated ablation results by repetitive irradiation were consistent with the experimental results. Microspike arrays have potential in application for such as emission cathodes in a field emission display (FED).

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