Direct writing of buried waveguides in hybrid organic-inorganic sol-gel by femtosecond laser pulses Available to Purchase

Using 775 nm femtosecond laser pulses, buried waveguides were directly fabricated inside hybrid organic-inorganic sol-gel film (70 µm thick), comprising methacryloxypropyltrimethoxysilane and zirconia. Waveguides with typical cross-sectional dimensions of ∼7×10 µm² were produced. A refractive index increment of ∼2 × 10⁻³ was measured. Using Fourier Transform InfraRed spectroscopy and scanning electron microscopy, the increase in refractive index was attributed to localized densification of the hybrid sol-gel initiated by the femtosecond laser pulses. The fabrication of a multi-layer 3×3 stacked waveguides was also demonstrated.