Lead zirconate titanate (PZT) films were produced on stainless steel substrate by the aerosol deposition method (ADM) using a PZT submicron-size particle beam. In the ADM, when the PZT submicron-size particles impact with the substrate, the particles form a film. To modify their primary ferroelectrics properties, the films were irradiated with a diode laser. When the scanning velocity of the laser spot on the films were decreased from 6 mm/s to 1 mm/s, laser intensity was increased from 110 W/cm2 to 670 W/cm2. Dielectric constant and the value of remanent polarization were improved by the laser irradiation. When the improvements of the properties were performed, the substrates were not damaged.
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2004
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