Lead zirconate titanate (PZT) films were produced on stainless steel substrate by the aerosol deposition method (ADM) using a PZT submicron-size particle beam. In the ADM, when the PZT submicron-size particles impact with the substrate, the particles form a film. To modify their primary ferroelectrics properties, the films were irradiated with a diode laser. When the scanning velocity of the laser spot on the films were decreased from 6 mm/s to 1 mm/s, laser intensity was increased from 110 W/cm2 to 670 W/cm2. Dielectric constant and the value of remanent polarization were improved by the laser irradiation. When the improvements of the properties were performed, the substrates were not damaged.

1.
Wu
,
A.
,
Vilarinho
,
P. M.
,
Salvado
,
I. M. M.
, &
Baptista
,
J. L.
(
2000
)
Sol-gel preparation of lead zirconate titanate powders and ceramics: Effect of alkoxide stabilizers and lead precursors
,
Journal of the American Ceramic Society
,
83
,
1379
1385
.
2.
Chen
,
H. D.
,
Udayakumar
,
K. R.
,
Caskey
,
C. J.
, &
Cross
,
L. E.
(
1996
)
Fabrication and electrical properties of lead zirconate titanate thick films
,
Journal of the American Ceramic Society
,
79
,
2189
2192
.
3.
Watanabe
,
S.
,
Fujiu
,
T.
, &
Fujii
,
T.
(
1995
)
Effect of poling on piezoelectric properties of lead zirconate titanate thin films formed by sputtering
,
Applied Physics Letters
,
66
,
1481
1483
.
4.
Ohba
,
Y.
,
Miyauchi
,
M.
,
Tsurumi
,
T.
, &
Daimon
,
M.
, (
1993
)
Analysis of bending displacement of lead zirconate titanate thin film synthesized by hydrothermal method
,
Japanese Journal of Applied Physics
Part 1,
32
,
4095
4098
.
5.
Akedo
,
J.
,
Ichiki
,
M.
,
Kikuchi
,
K.
, &
Maeda
,
R.
, (
1998
)
Jet molding system for realization of three-dimensional micro-structures
,
Sensors and Actuators A
,
69
106
112
.
6.
Kashu
,
S.
,
Fuchita
,
E.
,
Manabe
,
T.
, &
Hayashi
,
C.
, (
1984
)
Deposition of ultra fine particles using a gas jet
,
Japanese Journal of Applied Physics
,
23
,
L940
L912
.
7.
Kong
,
L. B.
, &
Ma
,
J.
, (
2001
)
PZT ceramics formed directly form oxides via reactive sintering
,
Materials Letters
,
51
,
95
100
.
8.
Randall
,
C. A.
,
Kim
,
N.
,
Kucera
,
J.-P.
,
Gao
,
W.
, &
Shrout
,
T. R.
, (
1998
)
Intrinsic and extrinsic size effects in fine-grained morphotropic-phase-boundary lead zirconate titanate ceramics
,
Journal of the American Ceramic Society
,
81
,
677
688
.
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