In 1995 the National Center of Laser Technology (NCLT) of China was opened. From that time there has been research on laser microfabrication at NCLT. Under the support of the National Science Foundation and Beijing Science Foundation several projects involving laser micro processing have been carried out. NCLT has make great progress in the field of laser micro processing with excimer laser and powder microsintering using YAG laser. Based on the principle of excimer laser micromachining, a micromachining system, including a beam delivery system, mask illumination system based on fly’s eye homogenizer, double telecentric optical and electrical system, has been developed. The application of micromachining technology to the fabrication of MEMS has been conducted and 50∼500µm diameter micro-gears have been made using polymers and ceramics. Meanwhile the excimer laser has been to manufacture microfluid biochip. Besides this the microfabrication using laser sintering powder material has been investigated at NCLT. This represents the one aspect of the development of laser microprocessing in China.
Skip Nav Destination
ICALEO 2004: 23rd International Congress on Laser Materials Processing and Laser Microfabrication
October 4–7, 2004
San Francisco, California, USA
ISBN:
978-0-912035-77-2
PROCEEDINGS PAPER
The development of laser microprocessing in China Available to Purchase
Zuo Tiechuan;
Zuo Tiechuan
National Center of Laser Technology, Beijing University of Technology
, Beijing, 100022, P.R.China
Search for other works by this author on:
Chen Jimin
Chen Jimin
National Center of Laser Technology, Beijing University of Technology
, Beijing, 100022, P.R.China
Search for other works by this author on:
Published Online:
October 01 2004
Citation
Zuo Tiechuan, Chen Jimin; October 4–7, 2004. "The development of laser microprocessing in China." Proceedings of the ICALEO 2004: 23rd International Congress on Laser Materials Processing and Laser Microfabrication. ICALEO 2004: 23rd International Congress on Laser Materials Processing and Laser Microfabrication. San Francisco, California, USA. (pp. M206). ASME. https://doi.org/10.2351/1.5060320
Download citation file:
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.