When using ultra-short laser pulses it is possible to machine areas smaller than the focal spot by restricting the threshold light intensity to the centre of the spot. However, even smaller and cleaner features can be achieved by utilising a sacrificial material on top of the layer being machined. In particular, we have found that features can be reduced by up to a factor of two and the heat-affected-zone by a factor of three in polymers. These results have implications for improved fabrication of fluid and gas delivery systems and optical devices such as photonic crystals and related devices.
REFERENCES
1.
Miller
, J. C.
(1994
) Laser Ablation: Principles and Applications
, Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
.2.
Nolte
, S.
, Momma
, C.
, Jacobs
, H.
, Tunnermann
, A.
, Chichkerov
, B. N.
, Wellegehausen
, B.
and Welling
, H.
, J. (1997
) Ablation of metals by ultrashort laser pulses
, Opt. Soc. Am. B.
, 14
, 2716
–2722
.3.
Hayashi
, K.
, Kuwabara
, T.
, Tokunaga
, Y.
, (1997
) Transactions of the Institute of Electrical Engineers of Japan
, Part., 117-C, 1187
–1193
.4.
Zhang
, Y.
, Lowe
, R. M.
, Harvey
, E.
, Hannaford
, P.
and Endo
, A.
, (2002
) Appl. Surf. Sci.
, 186
, 345
–351
.5.
Simon
, P.
, and Ihlemann
, J.
, (1997
) Appl. Surf. Sci.
, 109/110
, 25
–29
.6.
Ramanathan
, D.
and Molian
, P. A.
, (2002
) Journal of Manufacturing Science and Engineering.
, 124
, 389
–396
.7.
Kondo
, T.
, Matsuo
, S.
, Juodkazis
, S.
, Mizeikis
, V.
, and Misawa
, H.
, (2003
) Appl. Phys. Lett.
, 82
, 2758
–2760
.8.
Coutts
, D. W.
, (1995
) J. Quant. Elect.
, 31
, 2208
–2214
.
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© 2004 Laser Institute of America.
2004
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