Direct write micro-and nanostructuring laser technologies are very important for the fabrication of new materials and multifunctional devices. Using tightly focused femtosecond laser pulses one can produce sub-micrometer holes and periodic structures in metals, semiconductors, and dielectrics on arbitrary shaped surfaces. However, it is still unclear how practicable and reliable this technique can be.
We report on our progress in investigations of nanostructuring with femtosecond laser pulses. Sub-wavelength structuring of metals, fabrication of micro-bumbs, nanojets and hole arrays will be demonstrated. Discussions of mechanisms responsible for the formation of these structures will be given.
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