Determination of optimal 3D micromaching parameters of hole area modulation (HAM) method Available to Purchase

New 3D micro machining method, called Hole Area Modulation (HAM), has been introduced to enhance the current micro machining technology. In this method, information on the depth of machining is converted to the sizes of holes on the mask. The machining is carried out with a simple 2D movement of the workpiece or the mask. This method can be applied for machining various kinds of microcavities in various materials. In this paper, a mathematical model for excimer laser micro machining based on HAM and also determination of the optimal laser ablation conditions (hole diameter, step size, mask movement velocity, etc.) is completed. The simulation and experiment of the HAM based laser ablation were carried out and created micro lens successfully.