Experimental investigations on the laser cutting of thick silicon infiltrated silicon carbide (Si-SiC) elements are presented. Si-SiC is a fully dense ceramic composite with high hardness and chemical and thermal stability, which made it a valuable material in severe conditions, however, its machining is still a challenging task. A pulsed Nd:YAG laser with an average power of 1000 W coupled to an optical fiber was employed to explore the limits and the quality of different techniques for the laser cutting of Si-SiC samples with a thickness of 6 mm.

In this work, the feasibility of the single-pass technique in comparison with multi-pass laser cutting was explored for different processing parameters and using both inert assist and reactive assist gas. The experimental results were compared as a function of processing time and cut quality. The cut quality was examined by means of cross sectional inspection and compositional microanalysis to detect microcrack formation and microstructure changes.

1.
Swain
,
M.
(ed.).
Structure and properties of ceramics
,
Materials Science and Technology
, Vol.
11
, VCH, Weinheim, (
1991
).
2.
Kitagawa
,
A.
and
Matsunawa
,
A.
Three Dimensional Shaping of Ceramics by Using CO2 Laser and its Optimum Processing Conditions
”,
ICALEO 90, Laser Materials Processing, SPIE
, Vol.
1601
, (
1990
).
3.
Ramanathan
,
S.
and
Modest
,
M. F.
, “
CW Laser Drilling of Composite Ceramics
”,
Proceedings of ICALEO’91, Laser materials processing, SPIE
, Vol.
1722
,
1991
,
305
326
.
4.
Ramanathan
,
S.
and
Modest
,
M. F.
, “
CW Laser Cutting of Composite Ceramics
”,
Proc. Laser in Advanced Processing, LAMP 92
,
Nagoaka, Japan
,
1992
,
625
632
.
5.
Trubelja
,
M.F.
;
Ramanathan
,
S.
;
Modest
,
M.F.
;
Stubican
,
V.S.
, “
Carbon Dioxide Laser Cutting of a Carbon-Fiber-Silicon Carbide-Matrix Composite
”.
J. of the American Ceramic Society
, Vol.
77
,
1994
,
89
96
.
6.
Meiners
,
E.
;
Wiedmaier
,
M.
;
Dausinger
,
F.
;
Krastel
,
K.
;
Masek
,
I.
;
Kessler
,
A.
Micro Machining of Ceramics by Pulsed Nd:YAG Laser
”,
ICALEO 90, Laser Materials Processing, SPIE
, Vol.
1722
,
1991
,
327
336
.
7.
Tönshoff
,
H.K.
and
Gonschior
,
M.
, “
Ceramics Processing with Laser Radiation
”,
Proceeding of ICALEO 93, Laser Materials Processing, SPIE
Vol.
2306
,
1993
,
507
517
.
8.
Weichenhain
,
R.
,
Jandeleit
,
J.
,
Horn
,
A.
,
Kreutz
,
E. W.
,
Poprawe
,
R.
, “
Drilling of Ceramics and Polymers by Diode Pumped Solid State Lasers
”,
ICALEO 97, LIA
, Vol.
83
,
1997
, B
73
B80
.
9.
Weichenhain
,
R.
,
Horn
,
A.
,
Jandeleit
,
J.
,
Kreutz
,
E. W.
, “
Three Dimensional Microstructures in Ceramics by Diode Pumped Solid State Lasers
”,
ICALEO 98, LIA
, Vol.
85
,
1998
,
E64
E71
.
10.
Tuersley
,
I.P.
,
Hoult
,
T.P.
,
Pashby
,
I.R.
, “
The Processing of SiC/SiC Ceramic Matrix Composites Using a Pulsed Nd-YAG Laser. Part I: Optimisation of Pulse Parameters
”,
J. Materials Science
, Vol.
33
,
1998
,
955
961
.
11.
Tuersley
,
I.P.
,
Hoult
,
T.P.
,
Pashby
,
I.R.
, “
The Processing of SiC/SiC Ceramic Matrix Composites Using a Pulsed Nd-YAG Laser. Part II: The Effect of Process Variables
”,
J. Materials Science
, Vol.
33
,
1998
,
963
967
.
12.
Quintero
,
F.
,
Pou
,
J.
,
Lusquiños
,
F.
,
Boutinguiza
,
M.
,
Soto
,
R.
,
Pérez-Amor
,
M.
Cutting of Si-SiC Elements by Laser
”,
CIMTEC 2002, 10th International Ceramic Congress – Part C, Advances in Science and Technology
. Vol.
32
, Techna,
2003
, pp.
937
944
.
13.
Lei
H.
,
Lijun
Li
,
Chunlei
Ju
, “
Investigation of Cutting of Engineering Ceramics with Q-switched Pulse CO2 laser
”,
Optics and lasers in engineering
, Vol.
38
,
2002
,
279
289
.
14.
Livingstone
,
S.A.J.
,
Chua
,
K.L.
, and
Black
,
I.
, “
Experimental Development of a Machining Database for the CO2 Laser Cutting of Ceramic Tile
”,
Journal of Laser Applications
, Vol.
9
,
1997
, pp.
233
241
.
15.
Chase
,
M.W.
(ed),
NIST-JANAF Thermochemical Tables
, Fourth Edition, Part I,
Gaithersburg, Maryland
,
National Institute of Standards and Technology
,
1998
.
16.
Shigematsu
,
I.
,
Kanayama
,
K.
,
Tsuge
,
A.
, and
Nakamura
,
M.
, “
Analysis of Constituents Generated with Laser Machining of Si3N4 and SiC
”,
Journal of Materials Science Letters
, Vol.
17
,
1998
, pp.
737
739
.
This content is only available via PDF.
You do not currently have access to this content.