Ultrafast lasers and deep-ultraviolet F2 lasers present stark contrasts in driving multi-photon and single-photon interactions within transparent glasses. Low-loss single mode waveguides and simple photonic components were formed with a 50-fs Ti:Sapphire laser and a 157-nm 15-ns F2 laser inside the bulk of fused silica. Laser interactions were confined by large NA optics within a small ∼8-μm diameter focal volume and scanned with precision motion stages to shape 3-dimensional photonic structures. Refractive index changes of up to 0.01 were induced with the ultrafast laser at a high scanning speed of several hundred microns per second and 100-kHz repetition rate. Weaker refractive index changes of 0.0005 were generated by the F2 laser, owing to a lower 100-Hz repetition rate and weaker absorption in the focal volume. The laser-generated waveguides offer high transmission of ∼1 dB/cm, are transparent to light in the visible and infrared spectrum, and can support multi-mode guiding with low insertion loss into optical fibers. The paper will present examples of fabricating simple three-dimensional photonic components.

1.
R.
Kashyap
,
Fiber Bsragg Gratings
, (
Academic Press
,
NY
,
1999
).
2.
P. R.
Herman
,
K. P.
Chen
,
P.
Corkum
,
A.
Naumov
,
S.
Ng
, and
J.
Zhang
,
Advanced laser microfabrication of photonic components
, in
Laser Precision MicroFabrication
, (SPIE 4088,
2000
) p.
345
350
.
3.
K. M.
Davis
,
K.
Miura
,
N.
Sugimoto
, and
K.
Hirao
,
Writing waveguides in glass with a femtosecond laser
,
Opt. Letts.
,
21
(
1996
) p.
1729
1731
.
4.
A. M.
Streltsov
and
N. F.
Borrelli
,
Fabrication and analysis of a directional coupler written in glass by nanojoule femtosecond laser pulses
,
Opt. Letts.
,
26
(
2001
) p.
42
44
.
5.
E. N.
Glezer
,
M.
Milosavljevic
,
L.
Huang
,
R. J.
Finlay
,
T. H.
Her
,
J. P.
Callan
, and
E.
Mazur
,
Three-dimensional optical storage inside transparent materials
,
Opt. Letts.
,
21
(
1996
) p.
2023
2025
.
6.
D.
Schaffer
,
A.
Brodeur
,
J. F.
Garcia
, and
E.
Mazur
,
Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy
,
Opt. Letts.
,
26
(
2001
) p.
93
95
.
7.
D.
Coric
,
P. R.
Herman
,
R.
Bhardwaj
,
P. B.
Corkum
, and
D. M.
Rayner
, Prospects for ultrafast-laser writing of three-dimensional photonic devices for Telecom applications, in
Opt. Fiber Comm. Conf.
, (
OSA
,
2002
) in press.
8.
K.
Minoshima
,
A. M.
Kowalevicz
,
I.
Hartl
,
E. P.
Ippen
, and
J. G.
Fujimoto
,
Photonic device fabrication in glass by use of nonlinear materials processing with a femtosecond laser oscillator
,
Opt. Letts.
,
26
(
2001
) p.
1516
1517
.
9.
M.
Wei
,
K. P.
Chen
,
D.
Coric
,
P. R.
Herman
, and
J.
Li
,
F2-laser microfabrication of buried waveguide structures in transparent glasses
, in
Laser Applications in Microelectronics and Optoelectronic Manufacturing VII
, (SPIE 4637A, 2002) in press.
10.
M.
Svalgaard
,
Direct writing of planar waveguide power splitters and directional couplers using a focused ultraviolet laser beam
,
Electonics Lett.
,
33
(
1997
) p.
1694
1695
.
11.
M.
Svalgaard
,
C. V.
Poulsen
,
A.
Bjarklev
, and
O.
Poulsen
,
Direct UV-writing of buried single mode channel waveguides in Ge-doped silica films, Electron. Lett.
,
30
(
1994
) p.
1401
1403
.
12.
J.
Zhang
,
P. R.
Herman
,
C.
Lauer
,
K. P.
Chen
, and
M.
Wei
,
157-nm laser-induced modification of fused-silica glasses
, in
Laser Appl. in Microelectronic and Optoelectronic Manuf. V
, (SPIE 4274,
2001
) p.
125
132
.
13.
J.
Li
,
P. R.
Herman
,
M.
Wei
, and
K. P.
Chen
,
High-resolution F2-laser machining of micro-optic components
, in
Laser Applications in Microelectronics and Optoelectronic Manufacturing VII
, (SPIE 4637A,
2002
) in press.
14.
P. R.
Herman
,
K. P.
Chen
,
M.
Wei
,
J.
Zhang
,
J.
Ihlemann
,
D.
Schafer
,
G.
Marowsky
,
P.
Oesterlin
, and
B.
Burghardt
,
F2-lasers: high-resolution optical processing system for shaping photonic components
, in
Laser Appl. in Microelectronic and Optoelectronic Manuf. V
, (SPIE 4274,
2001
) p.
149
157
.
15.
K. P.
Chen
,
P. R.
Herman
, and
R.
Tam
,
Strong fiber Bragg grating fabrication by hybrid 157-nm and 248-nm laser exposure
,
Photonics Tech. Letts.
14
(
2002
) p.
170
172
.
16.
K. P.
Chen
,
P. R.
Herman
,
D.
Coric
,
J.
Li
,
M.
Wei
,
R.
Taylor
, and
C.
Hnatovsky
,
F2-laser photosensitivity applications in germanosilicate fiber and planar waveguides
, in
Integrated Optics: Devices, Materials, and Technologies
, (SPIE 4640,
2002
) in press.
This content is only available via PDF.
You do not currently have access to this content.