Even a high precision scanning beam profiler might reach its limits near below the visible range. More and more frequency doubled or tripled Q-switched solid-state laser sources where used in marking, drilling, paint removal and other interesting applications. 355 and 532 nm wavelength’s focused, might easily reach spot radii between 1 and 20 microns. This is just one parameter, but combined with outstanding power densities up to > 100 MW/cm² it requires a completely new measurement system. A new logarithmic CMOS camera system together with a magnifying telescope will be introduced. An integrated beam splitter combined with a 10 to 20 times magnification optic allows leading edge geometrical resolution. The excellent signal to noise ratio is enabled by 12 bit signal processing. This new tool is powerful driven by the industrial 3–dimensional beam profiling software made by PRIMES and usable even for pulsed beam sources.

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