Laser microprocessing has been extensively studies with applications in microelectronics and magnetic data storage. In addition to the fundamental aspects of laser materials interactions, we have investigated various possible applications of laser microprocessing in different areas. Laser cleaning has been studies systematically both theoretically and experimentally for dry surface cleaning and steam surface cleaning. This technology has been applied for cleaning magnetic head, magnetic sliders, suspension, laser mold cleaning and laser deflash for IC packages. Laser texturing and related processes such as laser bumping, laser tagging have been studied for magnetic recording applications. The future prospects of using laser microprocessing for applications in formation of ultrashallow (less than 50 nm) pn junction for next- generation MOS devices, laser generation of Si nanoparticles for quantum-dot flash memory, light emission devices and low cost and smart photonics devices will be addressed.
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ICALEO 2002: 21st International Congress on Laser Materials Processing and Laser Microfabrication
October 14–17, 2002
Scottsdale, Arizona, USA
ISBN:
978-0-912035-72-7
PROCEEDINGS PAPER
Advanced laser applications in microelectronics and data storage devices Available to Purchase
Y. F. Lu;
Y. F. Lu
1
Department of Electrical Engineering, University
of Nebraska
, Lincoln, NE 68588-0511, USA
Email: [email protected]
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W. D. Song;
W. D. Song
2
Department of Electrical Engineering and Data
Storage Institute, National University of Singapore
, 10 Kent Ridge
Crescent, Singapore
119260
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Z. M. Ren;
Z. M. Ren
2
Department of Electrical Engineering and Data
Storage Institute, National University of Singapore
, 10 Kent Ridge
Crescent, Singapore
119260
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C. W. An;
C. W. An
2
Department of Electrical Engineering and Data
Storage Institute, National University of Singapore
, 10 Kent Ridge
Crescent, Singapore
119260
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D. M. Liu;
D. M. Liu
2
Department of Electrical Engineering and Data
Storage Institute, National University of Singapore
, 10 Kent Ridge
Crescent, Singapore
119260
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W. J. Wang;
W. J. Wang
2
Department of Electrical Engineering and Data
Storage Institute, National University of Singapore
, 10 Kent Ridge
Crescent, Singapore
119260
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B. J. Cho;
B. J. Cho
2
Department of Electrical Engineering and Data
Storage Institute, National University of Singapore
, 10 Kent Ridge
Crescent, Singapore
119260
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J. N. Zeng;
J. N. Zeng
2
Department of Electrical Engineering and Data
Storage Institute, National University of Singapore
, 10 Kent Ridge
Crescent, Singapore
119260
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C. F. Tan
C. F. Tan
2
Department of Electrical Engineering and Data
Storage Institute, National University of Singapore
, 10 Kent Ridge
Crescent, Singapore
119260
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Published Online:
October 01 2002
Citation
Y. F. Lu, W. D. Song, Z. M. Ren, C. W. An, D. M. Liu, W. J. Wang, B. J. Cho, J. N. Zeng, C. F. Tan; October 14–17, 2002. "Advanced laser applications in microelectronics and data storage devices." Proceedings of the ICALEO 2002: 21st International Congress on Laser Materials Processing and Laser Microfabrication. ICALEO 2002: 21st International Congress on Laser Materials Processing and Laser Microfabrication. Scottsdale, Arizona, USA. (pp. 168523). ASME. https://doi.org/10.2351/1.5066194
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