The ablation of crystalline silicon and copper by ultra-short laser pulses is studied experimentally. A pump-and-probe experiment is implemented in a collinear arrangement as well as side view configuration, utilizing a time delayed frequency doubled probe beam for in situ reflectance measurements and ultra-fast microscopy observation. For the pump beam fluence ranging from 1.5 to 3.0 J/cm2, the reflected images show an evidence of lateral plasma expansion up to 500 ps time scale. A fiber optic technique was also used for long time scale shockwave propagation. Important plasma parameters such as energy deposited in the plasma (E), plasma pressure (P), and plasma temperature (T) are estimated by assuming spherical explosion of the shockwave front.
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ICALEO 2001: Proceedings of the Laser Materials Processing Conference and Laser Microfabrication Conference
October 15–18, 2001
Jacksonville, Florida, USA
ISBN:
978-0-912035-71-0
PROCEEDINGS PAPER
Plasma dynamics in ultra-short laser ablation in electronic materials
Taeyoul Choi;
Taeyoul Choi
Department of Mechanical Engineering Laser Thermal Laboratory University of California
Berkeley, CA USA
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David Jen Hwang;
David Jen Hwang
Department of Mechanical Engineering Laser Thermal Laboratory University of California
Berkeley, CA USA
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Costas P. Grigoropoulos
Costas P. Grigoropoulos
a
Department of Mechanical Engineering Laser Thermal Laboratory University of California
Berkeley, CA USA
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Published Online:
October 01 2001
Citation
Taeyoul Choi, David Jen Hwang, Costas P. Grigoropoulos; October 15–18, 2001. "Plasma dynamics in ultra-short laser ablation in electronic materials." Proceedings of the ICALEO 2001: Proceedings of the Laser Materials Processing Conference and Laser Microfabrication Conference. ICALEO 2001: Proceedings of the Laser Materials Processing Conference and Laser Microfabrication Conference. Jacksonville, Florida, USA. (pp. pp. 1581-1590). ASME. https://doi.org/10.2351/1.5059829
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