Laser ablation process has been applied in precision micromachining of various materials. The machining is usually carried out in air or in gas environment by irradiating multiple number of pulses. In this paper, effects of irradiating number of pulses of Nd:YAG laser in laser ablation of aluminum and copper in air have been studied by both photoacoustic and fast-imaging techniques. Nanosecond imaging technique, where the second harmonic radiation from the same laser was used as illuminating light, showed surface phenomena during and immediately after the ablating laser pulse. Photoacoustic detection technique using piezoelectric polymer film revealed the change of coupling between laser radiation and the target. Photoacoustic signal intensity as a function of laser fluence, measured at constant pulse energy, was constant at low fluence, started to increase with fluence at a certain threshold, reached a peak and then decreased gradually with increasing fluence. Shapes of the functions were similar but the threshold fluence and the fluence at the peak changed with irradiating pulse number in different fashion for aluminum and copper. Imaging observation revealed that a surface layer was ablated in initial few pulses for aluminum but laser induced oxidation seemed dominant for polished copper surface.

1.
Ito
,
Y.
,
Nakamura
,
S.
and
Hirakawa
,
F.
Photoacoustic measurement of the energy absorption of pulsed Nd:YAG laser at Cu and A1 surfaces.
Photoacoustic and Photothermal Phenomena, III, Springer Series in Optical Sciences
. Ed.
D.
Bicanic
,
Springer-Verlag
,
Berlin, Heidelberg
,
1992
; pp.
702
704
.
2.
Ito
,
Y.
,
Kametani
,
M.
,
Imai
J.
and
Nakamura
,
S.
Interaction between intense Nd:YAG laser pulse and a metal.
Beam-Solid Interactions—Fundamentals and Applications
. Editors,
M. A.
Nastasi
,
N.
Herbots
,
L.R.
Harriott
,
R.S.
Averback
, MRS Proc.
279
,
MRS, Pittsburgh Pennsylvania
,
1993
; pp.
743
748
.
3.
Nakamura
,
S.
,
Imai
,
J.
and
Ito
,
Y.
Photoacoustic measurement of energy absorption in pulsed Nd:YAG laser processing
.
Proceedings of ICALEO’93, LIA
Vol.
77
,
1994
; pp.
145
151
.
4.
Ito
,
Y.
,
Murayama
,
M.
,
Fukuzawa
,
Y.
and
Nakamura
,
S.
Interaction of high power laser pulses on aluminum measured by photoacoustic methods: Effects of wavelength.
Proceedings of ICALEO’97, LIA
Vol.
83
, Part 1, Sec. A,
1997
; pp.
131
138
.
5.
Ito
,
Y.
,
Shimizu
,
T.
,
Oguro
,
I.
and
Kijima
,
S.
Jet-Like Plasma Formation in Laser Ablation of Metals Observed by Nanosecond Imaging Technique in Gases
.
Proceedings of ICALEO’99, LIA
Vol.
87
, Part 2, Sec. E,
2000
; pp.
61
70
.
6.
Ito
,
Y
,
Oguro
,
I.
,
Fukuzawa
,
Y.
and
Nakamura
,
S.
Nanosecond laser ablation of metals in gases observed by photoacoustic and imaging techniques
,
Proceedings of High Power Laser Ablation 2000, Proc. of SPIE
,
4065
, (in press)
7.
Ito
,
Y.
,
Oguro
,
I.
, and
Nakamura
,
S.
Effects of Repetitive Irradiation in Laser Ablation of Aluminum in Gases Observed by Photoacoustic and Imaging Techniques
,
Proceedings of LPM 2000, Proc. of SPIE
,
4088
,
2000
(in press)
8.
Kiyoku
,
S.
,
Kurosaki
,
Y.
,
Oguro
,
I.
,
Nakamura
,
S.
, and
Ito
,
Y.
Effects of Laser Pulse Shape on Jet-like Plasma Formation in Laser Ablation of Metals under Atmosphere at High Fluence: Observation by Nanosecond Imaging Technique
.
Proceedings of LPM 2000, Proc. of SPIE
,
4088
,
2000
(in press)
9.
Matthias
,
E.
,
Dreyfus
,
R. W.
From laser-induced desorption to surface damage, in
Photoacoustic, Photothermal and Photochemical Processes at Surfaces and in Thin Films
, edited by
P.
Hess
,
Springer-Verlag
,
Berlin
,
1989
; pp.
89
128
, and references therein.
10.
Lu
,
Y-F.
,
Aoyagi
,
Y.
,
Takami
,
M.
and
Namba
,
S.
Laser Surface Cleaning in Air: Mechanisms and Applications
,
Jpn. J. Appl. Phys.
,
33
:
1994
; pp.
7138
7143
.
11.
Lu
,
Y-F.
and
Aoyagi
,
Y.
Acoustic Emission in Laser Surface Cleaning for Real-Time Monitoring
.,
Jpn. J. Appl. Phys.
,
34, Part 2
(
11
):
1995
; pp.
L1557
L1560
.
12.
Lee
,
J. M.
,
Watkins
K.G.
,
keams
,
A.
,
Steen
,
W. M.
,
Ryan
,
J. D.
and
Russell
,
P. C.
Investigation of Acoustic Monitoring in the Laser Cleaning of Copper
,
Proceedings of ICALEO’97, LIA
Vol.
83
, Part 1, Sec. C,
1997
; pp.
226
234
.
13.
See for example,
Baufay
,
L.
,
Hule
,
F. A.
and
Wilson
,
R. J.
Optical self-regulation during laser-induced oxidation of copper
,
J. Appl. Phys.
,
61
(
9
):
1987
; pp.
4640
4651
. And references therein.
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