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Proceedings Papers

Proceedings Volume Cover
ICALEO '82: Proceedings of the Materials Processing Symposium
September 20–23, 1982
Boston, Massachusetts, USA
ICALEO '82: Proceedings of the Inspection, Measurement and Control Symposium
ISBN:
978-0-912035-02-4
ICALEO '82: Proceedings of the Inspection, Measurement and Control Symposium

ELECTRO-OPTIC INSPECTION AND MEASUREMENT TECHNIQUES I

Industrial gauging technique with emphasis on scanning laser beams
Henry C. Turko
ICALEO 1982; 1-12https://doi.org/10.2351/1.5057311
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An automated electro-optical comparator system
Burton D. Figler; John P. Fallon
ICALEO 1982; 13-20https://doi.org/10.2351/1.5057310
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Machine vision and quality control
Nello Zuech
ICALEO 1982; 21-23https://doi.org/10.2351/1.5057312
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ELECTRO-OPTIC INSPECTION AND MEASUREMENT TECHNIQUES II

Laser micrometrology for integrated circuits
D. Nyyssonen
ICALEO 1982; 24-30https://doi.org/10.2351/1.5057313
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Optical measurement of liquid film thickness
Randal L. Schmitt; Warren H. Stevenson; Harold C. Simmons
ICALEO 1982; 31-35https://doi.org/10.2351/1.5057314
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Phase- and intensity-modulated fiberoptic sensors
Charles M. Davis
ICALEO 1982; 36-43https://doi.org/10.2351/1.5057315
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Integrated optical devices for temperature sensing
L. M. Johnson; F. J. Leonberger; G. W. Pratt, Jr.
ICALEO 1982; 44-50https://doi.org/10.2351/1.5057316
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APPLICATIONS OF ELECTRO-OPTICS IN THE SEMICONDUCTOR INDUSTRY

Automatic high speed inspection of semiconductor wafers
W. Jerry Alford
ICALEO 1982; 51-58https://doi.org/10.2351/1.5057317
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A scanning laser microscope for in-process inspection of semiconductor wafers
R. L. Schmitt; R. W. Heebner
ICALEO 1982; 59-61https://doi.org/10.2351/1.5057318
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Precision laser micro-machining for semiconductors
E. G. Arthurs
ICALEO 1982; 62-68https://doi.org/10.2351/1.5057319
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Automatic sub-micron mask and reticle inspection
John Mathews
ICALEO 1982; 69-76https://doi.org/10.2351/1.5057320
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Resonant ATR spectroscopy in semiconductor technology
Bruno Bosacchi; Robert C. Oehrle
ICALEO 1982; 77-78https://doi.org/10.2351/1.5057321
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