1-20 of 32
Machining
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

An o‐ring‐sealed rotary feedthrough for UHV applications

A. Pararas, S. T. Ceyer, J. T. Yates, Jr.
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 21, 1031 (1982)
https://doi.org/10.1116/1.571857
Published: November 1982
View article titled, An o‐ring‐sealed rotary feedthrough for UHV applications
Open the PDF for An o‐ring‐sealed rotary feedthrough for UHV applications in another window
Journal Articles

Target fabrication using laser and spark erosion machining

X. Clement, A. Coudeville, P. Eyharts, J. P. Perrine, R. Rouillard
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 20, 1082–1084 (1982)
https://doi.org/10.1116/1.571571
Published: April 1982
View article titled, Target fabrication using laser and spark erosion machining
Open the PDF for Target fabrication using laser and spark erosion machining in another window
Journal Articles

Fabrication process for surface acoustic wave filters having 0.5 μm finger period electrodes

M. Itoh, H. Gokan, S. Esho, K. Asakawa
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 20, 21–25 (1982)
https://doi.org/10.1116/1.571303
Published: January 1982
View article titled, Fabrication process for surface acoustic wave filters having 0.5 μm finger period electrodes
Open the PDF for Fabrication process for surface acoustic wave filters having 0.5 μm finger period electrodes in another window
Journal Articles

An electron‐beam/optical‐hybrid lithography approach to submicrometer electronic devices

J. C. Potosky, A. J. Higgins, S. T. Hoelke, R. G. Imerson, F. F. Kinoshita, R. L. Maddox, J. P. Reekstin
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 19, 924–926 (1981)
https://doi.org/10.1116/1.571191
Published: November 1981
View article titled, An electron‐beam/optical‐hybrid lithography approach to submicrometer electronic devices
Open the PDF for An electron‐beam/optical‐hybrid lithography approach to submicrometer electronic devices in another window
Journal Articles

A multilayer, high resolution, ion‐bombardment‐tolerant electron resist system

B. D. Hunt, R. A. Buhrman
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 19, 1308–1312 (1981)
https://doi.org/10.1116/1.571266
Published: November 1981
View article titled, A multilayer, high resolution, ion‐bombardment‐tolerant electron resist system
Open the PDF for A multilayer, high resolution, ion‐bombardment‐tolerant electron resist system in another window
Journal Articles

Poly(vinylnaphthalene) and its derivatives as e‐beam negative resists

Y. Ohnishi
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 19, 1136–1140 (1981)
https://doi.org/10.1116/1.571184
Published: November 1981
View article titled, Poly(vinylnaphthalene) and its derivatives as e‐beam negative resists
Open the PDF for Poly(vinylnaphthalene) and its derivatives as e‐beam negative resists in another window
Journal Articles

Preferential sputtering from disordered GaAs

I. L. Singer, J. S. Murday, J. Comas
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 18, 161–163 (1981)
https://doi.org/10.1116/1.570715
Published: March 1981
View article titled, Preferential sputtering from disordered GaAs
Open the PDF for Preferential sputtering from disordered GaAs in another window
Journal Articles

Surface morphologies produced by ion milling on ion‐implanted 18Cr8Ni steels

I. L. Singer
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 18, 175–178 (1981)
https://doi.org/10.1116/1.570718
Published: March 1981
View article titled, Surface morphologies produced by ion milling on ion‐implanted 18Cr8Ni steels
Open the PDF for Surface morphologies produced by ion milling on ion‐implanted 18Cr8Ni steels in another window
Journal Articles

X‐ray photoelectron and Auger analysis of thin films

C. C. Chang
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 18, 276–281 (1981)
https://doi.org/10.1116/1.570742
Published: March 1981
View article titled, X‐ray photoelectron and Auger analysis of thin films
Open the PDF for X‐ray photoelectron and Auger analysis of thin films in another window
Journal Articles

Chemical state of ion‐implanted nitrogen in Fe18Cr8Ni steel

I. L. Singer, J. S. Murday
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 17, 327–329 (1980)
https://doi.org/10.1116/1.570379
Published: January 1980
View article titled, Chemical state of ion‐implanted nitrogen in Fe18Cr8Ni steel
Open the PDF for Chemical state of ion‐implanted nitrogen in Fe18Cr8Ni steel in another window
Journal Articles

Modeling ion milling

A. R. Neureuther, C. Y. Liu, C. H. Ting
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 16, 1767–1771 (1979)
https://doi.org/10.1116/1.570290
Published: November 1979
View article titled, Modeling ion milling
Open the PDF for Modeling ion milling in another window
Journal Articles

Reactive sputter etching and reactive ion milling—selectivity, dimensional control, and reduction of MOS–interface degradation

B. Meusemann
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 16, 1886–1888 (1979)
https://doi.org/10.1116/1.570320
Published: November 1979
View article titled, Reactive sputter etching and reactive ion milling—selectivity, dimensional control, and reduction of MOS–interface degradation
Open the PDF for Reactive sputter etching and reactive ion milling—selectivity, dimensional control, and reduction of MOS–interface degradation in another window
Journal Articles

Properties and applications of saddle‐field ion sources

J. Franks
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 16, 181–183 (1979)
https://doi.org/10.1116/1.569901
Published: March 1979
View article titled, Properties and applications of saddle‐field ion sources
Open the PDF for Properties and applications of saddle‐field ion sources in another window
Journal Articles

Ion beam texturing of surfaces

Harold R. Kaufman, Raymond S. Robinson
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 16, 175–178 (1979)
https://doi.org/10.1116/1.569899
Published: March 1979
View article titled, Ion beam texturing of surfaces
Open the PDF for Ion beam texturing of surfaces in another window
Journal Articles

Mechanism of cavity formation in unfired ceramic by electron‐beam machining

Brian H. Desilets
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 15, 1056–1059 (1978)
https://doi.org/10.1116/1.569735
Published: May 1978
View article titled, Mechanism of cavity formation in unfired ceramic by electron‐beam machining
Open the PDF for Mechanism of cavity formation in unfired ceramic by electron‐beam machining in another window
Journal Articles

Kinetic focusing requirements for precision e‐beam machining of unfired ceramic material

M. A. Sturans, W. W. Koste
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 15, 1060–1063 (1978)
https://doi.org/10.1116/1.569736
Published: May 1978
View article titled, Kinetic focusing requirements for precision <em>e</em>‐beam machining of unfired ceramic material
Open the PDF for Kinetic focusing requirements for precision <em>e</em>‐beam machining of unfired ceramic material in another window
Journal Articles

Thirty‐centimeter‐diameter ion milling source

Raymond S. Robinson
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 15, 277–280 (1978)
https://doi.org/10.1116/1.569570
Published: March 1978
View article titled, Thirty‐centimeter‐diameter ion milling source
Open the PDF for Thirty‐centimeter‐diameter ion milling source in another window
Journal Articles

Auger depth profiling of thick insulating films by angle lapping

M. L. Tarng, D. G. Fisher
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 15, 50–53 (1978)
https://doi.org/10.1116/1.569436
Published: January 1978
View article titled, Auger depth profiling of thick insulating films by angle lapping
Open the PDF for Auger depth profiling of thick insulating films by angle lapping in another window
Journal Articles

Solving the ’’stencil’’ problem in vacuum deposition masks using rib‐supported structures

Robert Hammer
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 14, 1208–1210 (1977)
https://doi.org/10.1116/1.569387
Published: September 1977
View article titled, Solving the ’’stencil’’ problem in vacuum deposition masks using rib‐supported structures
Open the PDF for Solving the ’’stencil’’ problem in vacuum deposition masks using rib‐supported structures in another window
Journal Articles

Auger depth profiling of Au–AlxGa1−xAs interfaces and LPE AlxGa1−xAs–GaAs heterojunctions

C. M. Garner, Y. D. Shen, J. S. Kim, G. L. Pearson, W. E. Spicer, J. S. Harris, D. D. Edwall, R. Sahai
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 14, 985–988 (1977)
https://doi.org/10.1116/1.569408
Published: July 1977
View article titled, Auger depth profiling of Au–Al<sub><em>x</em></sub>Ga<sub>1−<em>x</em></sub>As interfaces and LPE Al<sub><em>x</em></sub>Ga<sub>1−<em>x</em></sub>As–GaAs heterojunctions
Open the PDF for Auger depth profiling of Au–Al<sub><em>x</em></sub>Ga<sub>1−<em>x</em></sub>As interfaces and LPE Al<sub><em>x</em></sub>Ga<sub>1−<em>x</em></sub>As–GaAs heterojunctions in another window