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Journal Articles

Ion beam sputter‐deposited diamondlike films

Bruce A. Banks, Sharon K. Rutledge
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 21, 807–814 (1982)
https://doi.org/10.1116/1.571828
Published: September 1982
View articletitled, Ion beam sputter‐deposited diamondlike films
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Journal Articles

Laboratory study of the PDX/PLT laser blow‐off trace element injectors

D. Manos, D. Ruzic, R. Moore, S. Cohen
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 20, 1230–1233 (1982)
https://doi.org/10.1116/1.571549
Published: April 1982
View articletitled, Laboratory study of the PDX/PLT laser blow‐off trace element injectors
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Journal Articles

Ion beam applications for precision infrared optics

J. R. McNeil, W. C. Herrmann, Jr.
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 20, 324–326 (1982)
https://doi.org/10.1116/1.571293
Published: March 1982
View articletitled, Ion beam applications for precision infrared optics
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Journal Articles

Quantification of hydrogen in a‐Si:H films by ir spectrometry, 15N nuclear reaction, and SIMS

R. C. Ross, I. S. T. Tsong, R. Messier, W. A. Lanford, C. Burman
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 20, 406–409 (1982)
https://doi.org/10.1116/1.571478
Published: March 1982
View articletitled, Quantification of hydrogen in a‐Si:H films by ir spectrometry, 15N nuclear reaction, and SIMS
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Journal Articles

Evaluation of microhardness and scratch testing for optical coatings

I. S. Goldstein, R. DeLong
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 20, 327–330 (1982)
https://doi.org/10.1116/1.571294
Published: March 1982
View articletitled, Evaluation of microhardness and scratch testing for optical coatings
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Journal Articles

Photoelectric properties of CdS–MgPc heterojunction solar cells

H. J. Wagner, R. O. Loutfy
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 20, 300–304 (1982)
https://doi.org/10.1116/1.571286
Published: March 1982
View articletitled, Photoelectric properties of CdS–MgPc heterojunction solar cells
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Journal Articles

Pressure and angle of incidence effects in reactive planar magnetron sputtered ZnO layers

S. Maniv, W. D. Westwood, E. Colombini
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 20, 162–170 (1982)
https://doi.org/10.1116/1.571350
Published: February 1982
View articletitled, Pressure and angle of incidence effects in reactive planar magnetron sputtered ZnO layers
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Journal Articles

Effect of substrate temperature during growth on defect density in bismuth thin films

V. Damodara Das, N. Jayaprakash
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 20, 58–63 (1982)
https://doi.org/10.1116/1.571309
Published: January 1982
View articletitled, Effect of substrate temperature during growth on defect density in bismuth thin films
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Journal Articles

Magnetron sputtering with additional ionization effect by electron beam

R. Adachi, K. Takeshita
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 20, 98–99 (1982)
https://doi.org/10.1116/1.571320
Published: January 1982
View articletitled, Magnetron sputtering with additional ionization effect by electron beam
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Journal Articles

Spray deposition and characterization of cadmium stannate films for solar cells

Armando Ortiz R
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 20, 7–12 (1982)
https://doi.org/10.1116/1.571312
Published: January 1982
View articletitled, Spray deposition and characterization of cadmium stannate films for solar cells
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Journal Articles

Magnetron sputtering of solar coatings inside tubes

S. J. Walker, D. R. McKenzie
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 19, 700–703 (1981)
https://doi.org/10.1116/1.571089
Published: September 1981
View articletitled, Magnetron sputtering of solar coatings inside tubes
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Journal Articles

In‐line production system for sputter deposition of graded index solar absorbing films

D. R. McKenzie, B. Window, G. L. Harding, A. R. Collins, D. W. J. Mackey
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 19, 93–95 (1981)
https://doi.org/10.1116/1.571023
Published: May 1981
View articletitled, In‐line production system for sputter deposition of graded index solar absorbing films
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Journal Articles

Laser annealing of phosphosilicate glass

A. Naumaan, J. T. Boyd
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 18, 821–824 (1981)
https://doi.org/10.1116/1.570955
Published: April 1981
View articletitled, Laser annealing of phosphosilicate glass
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Journal Articles

Oxygen induced preferred orientation of dc sputtered platinum

M. Hecq, A. Hecq
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 18, 219–222 (1981)
https://doi.org/10.1116/1.570727
Published: March 1981
View articletitled, Oxygen induced preferred orientation of dc sputtered platinum
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Journal Articles

Temperature measurements of glass substrates during plasma etching

R. A. Bond, S. Dzioba, H. M. Naguib
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 18, 335–338 (1981)
https://doi.org/10.1116/1.570753
Published: March 1981
View articletitled, Temperature measurements of glass substrates during plasma etching
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Journal Articles

Growth of single‐crystal metastable InSb1−xBix and (GaSb)1−xGex semiconducting films

K. C. Cadien, J. L. Zilko, A. H. Eltoukhy, J. E. Greene
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 17, 441–444 (1980)
https://doi.org/10.1116/1.570477
Published: January 1980
View articletitled, Growth of single‐crystal metastable InSb1−xBix and (GaSb)1−xGex semiconducting films
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Journal Articles

Radio frequency magnetron sputtering of thick film amorphous beryllium

R. J. Burt, S. F. Meyer, E. J. Hsieh
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 17, 407–410 (1980)
https://doi.org/10.1116/1.570467
Published: January 1980
View articletitled, Radio frequency magnetron sputtering of thick film amorphous beryllium
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Journal Articles

Phosphosilicate glass flow for integrated optics

A. Naumaan, J. T. Boyd
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 17, 529–532 (1980)
https://doi.org/10.1116/1.570501
Published: January 1980
View articletitled, Phosphosilicate glass flow for integrated optics
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Journal Articles

X‐ray zone plates fabricated using electron‐beam and x‐ray lithography

D. C. Shaver, D. C. Flanders, N. M. Ceglio, Henry I. Smith
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 16, 1626–1630 (1979)
https://doi.org/10.1116/1.570258
Published: November 1979
View articletitled, X‐ray zone plates fabricated using electron‐beam and x‐ray lithography
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Journal Articles

Graphoepitaxy of silicon on fused silica using surface micropatterns and laser crystallization

M. W. Geis, D. C. Flanders, Henry I. Smith, D. A. Antoniadis
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 16, 1640–1643 (1979)
https://doi.org/10.1116/1.570261
Published: November 1979
View articletitled, Graphoepitaxy of silicon on fused silica using surface micropatterns and laser crystallization
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