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Journal Articles

Experimental investigation of flow characteristics and thermal accommodation in neutralizer gas cells

Johann L. Hemmerich, Eduard B. Deksnis
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 21, 86–90 (1982)
https://doi.org/10.1116/1.571743
Published: May 1982
View article titled, Experimental investigation of flow characteristics and thermal accommodation in neutralizer gas cells
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Journal Articles

Voltage controlled, reactive planar magnetron sputtering of AlN thin films

R. McMahon, J. Affinito, R. R. Parsons
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 20, 376–378 (1982)
https://doi.org/10.1116/1.571470
Published: March 1982
View article titled, Voltage controlled, reactive planar magnetron sputtering of AlN thin films
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Journal Articles

Pressure measurements in magnetic fusion devices

H. F. Dylla
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 20, 119–128 (1982)
https://doi.org/10.1116/1.571344
Published: February 1982
View article titled, Pressure measurements in magnetic fusion devices
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Journal Articles

The use of molecular beams to support microspheres during plasma coating

J. K. Crane, R. D. Smith, W. L. Johnson, C. W. Jordan, S. A. Letts, G. R. Korbel, R. M. Krenik
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 20, 129–133 (1982)
https://doi.org/10.1116/1.571345
Published: February 1982
View article titled, The use of molecular beams to support microspheres during plasma coating
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Journal Articles

Reactive sputter etching of Si, SiO2, Cr, Al, and other materials with gas mixtures based on CF4 and Cl2 

C. M. Horwitz, J. Melngailis
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 19, 1408–1411 (1981)
https://doi.org/10.1116/1.571220
Published: November 1981
View article titled, Reactive sputter etching of Si, SiO<sub>2</sub>, Cr, Al, and other materials with gas mixtures based on CF<sub>4</sub> and Cl<sub>2</sub><sup> </sup>
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Journal Articles

Oxygen plasma etching of thick polymer layers

I. S. Goldstein, F. Kalk
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 19, 743–747 (1981)
https://doi.org/10.1116/1.571143
Published: September 1981
View article titled, Oxygen plasma etching of thick polymer layers
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Journal Articles

Antisite defect in GaAs and at the GaAs–AlAs interface

P. J. Lin‐Chung, T. L. Reinecke
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 19, 443–446 (1981)
https://doi.org/10.1116/1.571035
Published: September 1981
View article titled, Antisite defect in GaAs and at the GaAs–AlAs interface
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Journal Articles

Cyclic pressure fluctuations above rotary pumps and their effects on pumping speed measurements

B. R. F. Kendall
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 19, 109–111 (1981)
https://doi.org/10.1116/1.570998
Published: May 1981
View article titled, Cyclic pressure fluctuations above rotary pumps and their effects on pumping speed measurements
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Journal Articles

Oxidation studies with the vacuum microbalance in complex environments

Earl A. Gulbransen
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 17, 109–113 (1980)
https://doi.org/10.1116/1.570447
Published: January 1980
View article titled, Oxidation studies with the vacuum microbalance in complex environments
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Journal Articles

Validity of mass spectrometric measurements at pressures exceeding 10−4 mbar

W. K. Huber, G. Rettinghaus
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 16, 681–684 (1979)
https://doi.org/10.1116/1.570056
Published: March 1979
View article titled, Validity of mass spectrometric measurements at pressures exceeding 10<sup>−4</sup> mbar
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Journal Articles

Pioneer Venus large probe neutral mass spectrometer

J. H. Hoffman, R. R. Hodges, K. D. Duerksen
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 16, 692–694 (1979)
https://doi.org/10.1116/1.570059
Published: March 1979
View article titled, Pioneer Venus large probe neutral mass spectrometer
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Journal Articles

Turbomolecular pumps for high gas flow applications

J. F. O’Hanlon
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 16, 724–727 (1979)
https://doi.org/10.1116/1.570068
Published: March 1979
View article titled, Turbomolecular pumps for high gas flow applications
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Journal Articles

Energetic binary collisions in rare gas plasmas

R. S. Robinson
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 16, 185–188 (1979)
https://doi.org/10.1116/1.569903
Published: March 1979
View article titled, Energetic binary collisions in rare gas plasmas
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Journal Articles

Errors due to zero uncertainties and buoyancy in the gravimetric measurements of sorption isotherms

Erich Robens, Th. Gast
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 15, 805–809 (1978)
https://doi.org/10.1116/1.569717
Published: March 1978
View article titled, Errors due to zero uncertainties and buoyancy in the gravimetric measurements of sorption isotherms
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Journal Articles

Large‐capacity cryogenic pumping of D2 and H2 for fusion

H. J. Halama, C. K. Lam, J. A. Bamberger
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 14, 1201–1204 (1977)
https://doi.org/10.1116/1.569385
Published: September 1977
View article titled, Large‐capacity cryogenic pumping of D<sub>2</sub> and H<sub>2</sub> for fusion
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Journal Articles

Incorporation of rare gases in sputtered amorphous metal films

J. J. Cuomo, R. J. Gambino
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 14, 152–157 (1977)
https://doi.org/10.1116/1.569109
Published: January 1977
View article titled, Incorporation of rare gases in sputtered amorphous metal films
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Journal Articles

On the transmission probability for molecular gas flow through a tube

D. van Essen, W. Chr. Heerens
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 13, 1183–1187 (1976)
https://doi.org/10.1116/1.569064
Published: November 1976
View article titled, On the transmission probability for molecular gas flow through a tube
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Journal Articles

Abstract: Microthermogravimetry: A new symmetrical microthermoanalyzer from −196 °C up to 1700 °C with combined micro DTA and EGA

Bruno Jalon
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 13, 560 (1976)
https://doi.org/10.1116/1.568954
Published: January 1976
View article titled, Abstract: Microthermogravimetry: A new symmetrical microthermoanalyzer from −196 °C up to 1700 °C with combined micro DTA and EGA
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Journal Articles

Abstract: Growth morphology and surface‐acoustic‐wave measurements of AlN films on sapphire

K. M. Lakin, J. K. Liu, K. L. Wang
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 13, 37–38 (1976)
https://doi.org/10.1116/1.568896
Published: January 1976
View article titled, Abstract: Growth morphology and surface‐acoustic‐wave measurements of AlN films on sapphire
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Journal Articles

Double scattering of rare gas ions from polycrystalline gold and copper

S. P. Sharma, T. M. Buck
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 12, 468–474 (1975)
https://doi.org/10.1116/1.568564
Published: January 1975
View article titled, Double scattering of rare gas ions from polycrystalline gold and copper
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