Skip to Main Content
Skip Nav Destination

Simulation of plasma‐etched lithographic structures

J. Vac. Sci. Technol. 16, 388–390 (1979)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
  • F. Robin
  • A. Orzati
  • E. Moreno
  • O.J. Homan
  • W. Buchtold
IEEE Transactions on Evolutionary Computation 7, 69 (2003)
  • P D Scovell
  • C N Duckworth
  • P J Rosser
Reports on Progress in Physics 52, 349 (1989)
  • J E Curran
Journal of Physics E: Scientific Instruments 14, 393 (1981)
  • W.G. Oldham
  • A.R. Neureuther
  • J.L. Reynolds
  • S.N. Nandgaonkar
IEEE Journal of Solid-State Circuits 15, 520 (1980)
  • W.G. Oldham
  • A.R. Neureuther
  • J.L. Reynolds
  • S.N. Nandgaonkar
IEEE Transactions on Electron Devices 27, 1455 (1980)
Close Modal

or Create an Account

Close Modal
Close Modal