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Journal Articles

Biases and uncertainties in the use of autocovariance and height–height covariance functions to characterize roughness

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Chris A. Mack
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06K701 (2016)
https://doi.org/10.1116/1.4961445
Published: August 2016
View articletitled, Biases and uncertainties in the use of autocovariance and height–height covariance functions to characterize roughness
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Journal Articles

Statistical dispersion of nanocomposite emission parameters

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Anatoly G. Kolosko, Eugeni O. Popov, Sergey V. Filippov, Pavel A. Romanov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 03C104 (2015)
https://doi.org/10.1116/1.4904738
Published: December 2014
View articletitled, Statistical dispersion of nanocomposite emission parameters
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Journal Articles

Analytical and experimental evaluation of a counting method for particles added during the mask handling process

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Mitsuaki Amemiya
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 031604 (2012)
https://doi.org/10.1116/1.3696855
Published: March 2012
View articletitled, Analytical and experimental evaluation of a counting method for particles added during the mask handling process
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Journal Articles

Impact of supercritical C O 2 drying on roughness of hydrogen silsesquioxane e-beam resist

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Daniel Küpper, David Küpper, Thorsten Wahlbrink, Wolfgang Henschel, Jens Bolten, Max C. Lemme, Yordan M. Georgiev, Heinrich Kurz
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 570–574 (2006)
https://doi.org/10.1116/1.2167990
Published: February 2006
View articletitled, Impact of supercritical C O 2 drying on roughness of hydrogen silsesquioxane e-beam resist
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Journal Articles

Electron-electron interaction induced beam displacement in a multiple electron beam system

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Ming L. Yu, Steven T. Coyle, William DeVore, Bassam Shamoun
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 2589–2595 (2005)
https://doi.org/10.1116/1.2101788
Published: November 2005
View articletitled, Electron-electron interaction induced beam displacement in a multiple electron beam system
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Journal Articles

Lithographic characterization of the field dependent astigmatism and alignment stability of a 0.3 numerical aperture extreme ultraviolet microfield optic

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Patrick P. Naulleau, Jason P. Cain, Kenneth A. Goldberg
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 2003–2006 (2005)
https://doi.org/10.1116/1.2037647
Published: September 2005
View articletitled, Lithographic characterization of the field dependent astigmatism and alignment stability of a 0.3 numerical aperture extreme ultraviolet microfield optic
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Journal Articles

Effects of flare in extreme ultraviolet lithography: Learning from the engineering test stand

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Manish Chandhok, Sang H. Lee, Terence Bacuita
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 22, 2966–2969 (2004)
https://doi.org/10.1116/1.1824068
Published: December 2004
View articletitled, Effects of flare in extreme ultraviolet lithography: Learning from the engineering test stand
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Journal Articles

Modeling SiC surface roughness using neural network and atomic force microscopy

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Byungwhan Kim, Sungmo Kim, Byung-Teak Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 22, 2467–2472 (2004)
https://doi.org/10.1116/1.1798851
Published: October 2004
View articletitled, Modeling SiC surface roughness using neural network and atomic force microscopy
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Journal Articles

Characterization and simulation of surface and line-edge roughness in photoresists

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V. Constantoudis, E. Gogolides, G. P. Patsis, A. Tserepi, E. S. Valamontes
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 19, 2694–2698 (2001)
https://doi.org/10.1116/1.1420582
Published: November 2001
View articletitled, Characterization and simulation of surface and line-edge roughness in photoresists
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Journal Articles

Electron‐beam inspection technology for x‐ray masks

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S. Takeuchi, K. Moriizumi, K. Saitoh, N. Yoshioka, T. Kato
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 6, 146–149 (1988)
https://doi.org/10.1116/1.584033
Published: January 1988
View articletitled, Electron‐beam inspection technology for x‐ray masks
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