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Journal Articles

E-mode AlGaN/GaN HEMTs using p-NiO gates

Chao-Ching Chiang, Hsiao-Hsuan Wan, Jian-Sian Li, Fan Ren, Timothy Jinsoo Yoo, Honggyu Kim, S. J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062205 (2023)
https://doi.org/10.1116/6.0003119
Published: November 2023
View article titled, E-mode AlGaN/GaN HEMTs using p-NiO gates
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Journal Articles

Erratum: “Electronic structure of InSb (001), (110), and (111)B surfaces” [J. Vac. Sci. Technol. B 41, 032808 (2023)]

Jason T. Dong, Hadass S. Inbar, Mihir Pendharkar, Teun A. J. van Schijndel, Elliot C. Young, Connor P. Dempsey, Christopher J. Palmstrøm
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 053401 (2023)
https://doi.org/10.1116/6.0002960
Published: August 2023
View article titled, Erratum: “Electronic structure of InSb (001), (110), and (111)B surfaces” [J. Vac. Sci. Technol. B 41, 032808 (2023)]
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Journal Articles

High-quality GeSn thin-film resonant cavities for short-wave infrared applications

Jheng-Ying Wu, Yu-Fu Wang, Chia-You Liu, Shin-Chun Kuo, Tzu-Hsuan Chen, Jiun-Yun Li, Chin-Ya Huang, Chien-Hao Liu, Jung-Yen Yang, Chun-Chieh Chang, Tzu-Hsuan Chang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042202 (2023)
https://doi.org/10.1116/6.0002525
Published: June 2023
View article titled, High-quality GeSn thin-film resonant cavities for short-wave infrared applications
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Includes: Supplementary data
Journal Articles

Phosphorus deactivation by hydrogen on hot carrier stressed high-voltage N-channel field effect transistor CMOS device demonstrated by scanning capacitance microscopy imaging

Jochonia Nxumalo, Wang Yun-Yu (王允愈), Mike Smith, You Lin (尤林), David Fillmore, Matthew Gerber, Jin Qiang (金强)
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042203 (2023)
https://doi.org/10.1116/5.0147443
Published: June 2023
View article titled, Phosphorus deactivation by hydrogen on hot carrier stressed high-voltage N-channel field effect transistor CMOS device demonstrated by scanning capacitance microscopy imaging
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Journal Articles

Multipurpose active scanning probe cantilevers for near-field spectroscopy, scanning tunnel imaging, and atomic-resolution lithography

Isaac Stricklin, Teodor Gotszalk, Mahmoud Behzadirad, Eberhard Manske, Thomas Kissinger, Ivo W. Rangelow, Tito L. Busani
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042601 (2023)
https://doi.org/10.1116/6.0002486
Published: June 2023
View article titled, Multipurpose active scanning probe cantilevers for near-field spectroscopy, scanning tunnel imaging, and atomic-resolution lithography
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Journal Articles

Ohmic contact structures on β-Ga2O3 with n+ β-Ga2O3 pulsed laser deposition layers

Elizabeth V. Favela, Hyung Min Jeon, Kevin D. Leedy, Kun Zhang, Szu-Wei Tung, Francelia Sanchez Escobar, C. V. Ramana, Lisa M. Porter
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 032205 (2023)
https://doi.org/10.1116/6.0002620
Published: May 2023
View article titled, Ohmic contact structures on <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> with n+ <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> pulsed laser deposition layers
Open the PDF for Ohmic contact structures on <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> with n+ <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> pulsed laser deposition layers in another window
Includes: Supplementary data
Journal Articles

Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?

Charles W. Magee, Temel H. Buyuklimanli
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 030803 (2023)
https://doi.org/10.1116/6.0002466
Published: April 2023
View article titled, Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?
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Journal Articles

Radiation damage in GaN/AlGaN and SiC electronic and photonic devices

S. J. Pearton, Xinyi Xia, Fan Ren, Md Abu Jafar Rasel, Sergei Stepanoff, Nahid Al-Mamun, Aman Haque, Douglas E. Wolfe
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 030802 (2023)
https://doi.org/10.1116/6.0002628
Published: April 2023