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Journal Articles

Stable and low loss oxide layer on α-Ta (110) film for superconducting qubits

Editor’s Pick
Zengqian Ding, Boyi Zhou, Tao Wang, Lina Yang, Yanfu Wu, Xiao Cai, Kanglin Xiong, Jiagui Feng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022209 (2024)
https://doi.org/10.1116/6.0003368
Published: February 2024
View article titled, Stable and low loss oxide layer on α-Ta (110) film for superconducting qubits
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Includes: Supplementary data
Journal Articles

New method of fabrication of suspended metallic single electron transistor (SET)

Mohammad Istiaque Rahaman, G. P. Szakmany, A. O. Orlov, G. L. Snider
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 013201 (2024)
https://doi.org/10.1116/6.0003025
Published: January 2024
View article titled, New method of fabrication of suspended metallic single electron transistor (SET)
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Journal Articles

Investigation of the deposition of α-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit

Haolin Jia, Boyi zhou, Tao Wang, Yanfu Wu, Lina Yang, Zengqian Ding, Shuming Li, Xiao Cai, Kanglin Xiong, Jiagui Feng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052210 (2023)
https://doi.org/10.1116/6.0002886
Published: September 2023
View article titled, Investigation of the deposition of α-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit
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Includes: Supplementary data
Journal Articles

Synergy of cold development and electron-beam exposure for Si nanotip patterning in quantum-electronic devices

I-Hsiang Wang, Pei-Wen Li
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052601 (2023)
https://doi.org/10.1116/6.0002845
Published: August 2023
View article titled, Synergy of cold development and electron-beam exposure for Si nanotip patterning in quantum-electronic devices
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Journal Articles

Chemical mechanical planarization for Ta-based superconducting quantum devices

Editor’s Pick
Ekta Bhatia, Soumen Kar, Jakub Nalaskowski, Tuan Vo, Stephen Olson, Hunter Frost, John Mucci, Brian Martinick, Pui Yee Hung, Ilyssa Wells, Sandra Schujman, Satyavolu S. Papa Rao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 033202 (2023)
https://doi.org/10.1116/6.0002586
Published: April 2023
View article titled, Chemical mechanical planarization for Ta-based superconducting quantum devices
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Journal Articles

Developing single-layer metal-oxide-semiconductor quantum dots for diagnostic qubits

Yanxue Hong, A. N. Ramanayaka, Ryan Stein, M. D. Stewart, J. M. Pomeroy
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 012204 (2021)
https://doi.org/10.1116/6.0000549
Published: December 2020
View article titled, Developing single-layer metal-oxide-semiconductor quantum dots for diagnostic qubits
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Journal Articles

Next generation of extreme-resolution electron beam lithography

John N. Randall, James H. G. Owen, Joseph Lake, Ehud Fuchs
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061605 (2019)
https://doi.org/10.1116/1.5119392
Published: October 2019
View article titled, Next generation of extreme-resolution electron beam lithography
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Journal Articles

Injection of 2D electron gas into a quantum-dot organic light-emitting diode structure on silicon substrate

Daud Hasan Emon, Myungji Kim, Mohammad Taghi Sharbati, Hong Koo Kim
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06KJ01 (2016)
https://doi.org/10.1116/1.4964352
Published: October 2016
View article titled, Injection of 2D electron gas into a quantum-dot organic light-emitting diode structure on silicon substrate
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Journal Articles

Multimode hydrogen depassivation lithography: A method for optimizing atomically precise write times

Joshua B. Ballard, Thomas W. Sisson, James H. G. Owen, William R. Owen, Ehud Fuchs, Justin Alexander, John N. Randall, James R. Von Ehr
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 06FC01 (2013)
https://doi.org/10.1116/1.4823756
Published: October 2013
View article titled, Multimode hydrogen depassivation lithography: A method for optimizing atomically precise write times
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Journal Articles

Analyzing pattern retention for multilayer focused ion beam induced quantum dot structures

Marta Luengo-Kovac, Timothy W. Saucer, Andrew J. Martin, Joanna Millunchick, Vanessa Sih
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 031208 (2013)
https://doi.org/10.1116/1.4804278
Published: May 2013
View article titled, Analyzing pattern retention for multilayer focused ion beam induced quantum dot structures
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Journal Articles

Fabrication of large dimension aluminum air-bridges for superconducting quantum circuits

Mohammad Abuwasib, Philip Krantz, Per Delsing
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 031601 (2013)
https://doi.org/10.1116/1.4798399
Published: April 2013
View article titled, Fabrication of large dimension aluminum air-bridges for superconducting quantum circuits
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Journal Articles

Improved single ion implantation with scanning probe alignment

Michael Ilg, Christoph D. Weis, Julian Schwartz, Arun Persaud, Qing Ji, Cheuk Chi Lo, Jeffrey Bokor, Alex Hegyi, Elshad Guliyev, Ivo W. Rangelow, Thomas Schenkel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06FD04 (2012)
https://doi.org/10.1116/1.4767233
Published: November 2012
View article titled, Improved single ion implantation with scanning probe alignment
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Journal Articles

Lateral metallic devices made by a multiangle shadow evaporation technique

Marius V. Costache, Germàn Bridoux, Ingmar Neumann, Sergio O. Valenzuela
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 04E105 (2012)
https://doi.org/10.1116/1.4722982
Published: May 2012
View article titled, Lateral metallic devices made by a multiangle shadow evaporation technique
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Journal Articles

Structural and optical properties of self-assembled InAs quantum dot molecules on GaAs substrates

Peng Tian, Lirong Huang, Yi Yu, Dexiu Huang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, 1271–1273 (2010)
https://doi.org/10.1116/1.3516010
Published: November 2010
View article titled, Structural and optical properties of self-assembled InAs quantum dot molecules on GaAs substrates
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Journal Articles

Film-thickness dependence of 10 GHz Nb coplanar-waveguide resonators

Kunihiro Inomata, Tsuyoshi Yamamoto, Michio Watanabe, Kazuaki Matsuba, Jaw-Shen Tsai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 2286–2291 (2009)
https://doi.org/10.1116/1.3232301
Published: September 2009
View article titled, Film-thickness dependence of 10 GHz Nb coplanar-waveguide resonators
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Journal Articles

Single atom doping for quantum device development in diamond and silicon

C. D. Weis, A. Schuh, A. Batra, A. Persaud, I. W. Rangelow, J. Bokor, C. C. Lo, S. Cabrini, E. Sideras-Haddad, G. D. Fuchs, R. Hanson, D. D. Awschalom, T. Schenkel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 2596–2600 (2008)
https://doi.org/10.1116/1.2968614
Published: December 2008
View article titled, Single atom doping for quantum device development in diamond and silicon
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Journal Articles

Characterization of a sol-gel based high- k dielectric field effect transistor for cryogenic operation

M. Ziaur Rahman Khan, D. G. Hasko, M. S. M. Saifullah, M. E. Welland
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 1887–1891 (2008)
https://doi.org/10.1116/1.3006019
Published: November 2008
View article titled, Characterization of a sol-gel based high- k dielectric field effect transistor for cryogenic operation
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Journal Articles

Micromachined piezoresistive proximal probe with integrated bimorph actuator for aligned single ion implantation

A. Persaud, K. Ivanova, Y. Sarov, Tzv. Ivanov, B. E. Volland, I. W. Rangelow, N. Nikolov, T. Schenkel, V. Djakov, D. W. K. Jenkins, J. Meijer, T. Vogel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 3148–3151 (2006)
https://doi.org/10.1116/1.2375079
Published: December 2006
View article titled, Micromachined piezoresistive proximal probe with integrated bimorph actuator for aligned single ion implantation
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Journal Articles

Robust shadow-mask evaporation via lithographically controlled undercut

B. Cord, C. Dames, K. K. Berggren, J. Aumentado
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 3139–3143 (2006)
https://doi.org/10.1116/1.2375090
Published: December 2006
View article titled, Robust shadow-mask evaporation via lithographically controlled undercut
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Journal Articles

PCSI 2006: Old problems and new visions

Larry Cooper
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 1960–1966 (2006)
https://doi.org/10.1116/1.2218858
Published: July 2006
View article titled, PCSI 2006: Old problems and new visions
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