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Journal Articles

Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet

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Catherine Joy Enrile Antipuesto, Catherine Joy M. Dela Cruz, Christian Lorenz S. Mahinay
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022802 (2025)
https://doi.org/10.1116/6.0004081
Published: January 2025
View articletitled, Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet
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Journal Articles

Photoresist ashing at room temperature using a large-area, atmospheric-pressure plasma

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Branden J. Bodner, Paul J. Froeter, Kuldeep Kalonia, R. Mohan Sankaran
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 012204 (2025)
https://doi.org/10.1116/6.0004147
Published: January 2025
View articletitled, Photoresist ashing at room temperature using a large-area, atmospheric-pressure plasma
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Journal Articles

Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications

FeaturedScilightOpen Access
A. S. Stodolna, T. W. Mechielsen, P. van der Walle, C. Meekes, H. Lensen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052601 (2024)
https://doi.org/10.1116/6.0003701
Published: August 2024
View articletitled, Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications
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Journal Articles

Phase-shifted counterpropagating atmospheric pressure plasma jets: Characterization and interaction with materials

Editor’s PickFree
Michael J. Johnson, Gabriel H. Brown, David R. Boris, Tzvetelina B. Petrova, Scott G. Walton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034004 (2024)
https://doi.org/10.1116/6.0003485
Published: April 2024
View articletitled, Phase-shifted counterpropagating atmospheric pressure plasma jets: Characterization and interaction with materials
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Journal Articles

Plasma-assisted synthesis of gold-silver core-shell nanoparticles and their enhanced catalytic dye degradation and surface enhanced Raman spectroscopy performance

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Siddiqa Ismail, W. Ahmed, Muhammad Farooq, N. U. Rehman
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 024005 (2024)
https://doi.org/10.1116/6.0003245
Published: March 2024
View articletitled, Plasma-assisted synthesis of gold-silver core-shell nanoparticles and their enhanced catalytic dye degradation and surface enhanced Raman spectroscopy performance
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Journal Articles

Silicon etching by chlorine plasma: Validation of surface reactions mechanism

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Dmitry Levko, Laxminarayan L. Raja
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042205 (2023)
https://doi.org/10.1116/6.0002608
Published: June 2023
View articletitled, Silicon etching by chlorine plasma: Validation of surface reactions mechanism
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Journal Articles

Vacuum system of the Space Plasma Environment Research Facility

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Chenggang Jin, Yongqi Zhang, Wenbin Ling, Chunxi Chen, Huan Wang, Huiping Hao, Yunning Dong, Yaowen Lu, Liyi Li, Peng E
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 034204 (2023)
https://doi.org/10.1116/6.0002566
Published: May 2023
View articletitled, Vacuum system of the Space Plasma Environment Research Facility
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Journal Articles

Atmospheric pressure plasma treatment of chitosan-acrylic acid blends

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Kathrina Lois M. Taaca, Eloise I. Prieto, Magdaleno R. Vasquez, Jr.
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 034001 (2023)
https://doi.org/10.1116/6.0002335
Published: April 2023
View articletitled, Atmospheric pressure plasma treatment of chitosan-acrylic acid blends
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Journal Articles

Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas

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Dmitry Levko, Rochan R. Upadhyay, Kenta Suzuki, Laxminarayan L. Raja
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012205 (2023)
https://doi.org/10.1116/6.0002236
Published: December 2022
View articletitled, Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas
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Journal Articles

Si nanocone structure fabricated by a relatively high-pressure hydrogen plasma in the range of 3.3–27 kPa

Editor’s PickAvailable to Purchase
Toshimitsu Nomura, Kenta Kimoto, Hiroaki Kakiuchi, Kiyoshi Yasutake, Hiromasa Ohmi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 032801 (2022)
https://doi.org/10.1116/6.0001676
Published: April 2022
View articletitled, Si nanocone structure fabricated by a relatively high-pressure hydrogen plasma in the range of 3.3–27 kPa
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Journal Articles

Time-resolved ion energy distribution in pulsed inductively coupled argon plasma with/without DC bias

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Zhiying Chen, Joel Blakeney, Megan Carruth, Peter L. G. Ventzek, Alok Ranjan
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 033601 (2022)
https://doi.org/10.1116/6.0001737
Published: April 2022
View articletitled, Time-resolved ion energy distribution in pulsed inductively coupled argon plasma with/without DC bias
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Journal Articles

Vacuum control system for the Space Plasma Environment Research Facility

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Chenggang Jin, Yongqi Zhang, Wenbin Ling, Manxing Liu, Peng E, Chunxi Chen, Yunxuan Li, Zhiyong Peng, Yaowen Lu, Liyi Li
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 034201 (2022)
https://doi.org/10.1116/6.0001785
Published: April 2022
View articletitled, Vacuum control system for the Space Plasma Environment Research Facility
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Journal Articles

Comparison of single and concentric split-ring resonator generated microplasmas

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Andrew T. Walsten, Roberto A. Dextre, Kurt A. Polzin, Kunning G. Xu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 014001 (2022)
https://doi.org/10.1116/6.0001483
Published: January 2022
View articletitled, Comparison of single and concentric split-ring resonator generated microplasmas
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Journal Articles

Effect of plasma-species to functionalize isocyanate-groups on multiwalled carbon nanotubes

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Daisuke Ogawa, Essam Mohammed Abdel-Fattah, Keiji Nakamura
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 012804 (2022)
https://doi.org/10.1116/6.0001373
Published: December 2021
View articletitled, Effect of plasma-species to functionalize isocyanate-groups on multiwalled carbon nanotubes
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Journal Articles

Improved abrasion resistance of silica-based CVD thin films on polycarbonate substrates for automotive applications

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Sae Tanaka, Hayate Endo, Akira Shirakura, Shinya Kudo, Tetsuya Suzuki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 040602 (2021)
https://doi.org/10.1116/6.0001040
Published: June 2021
View articletitled, Improved abrasion resistance of silica-based CVD thin films on polycarbonate substrates for automotive applications
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Journal Articles

Mechanism of premature etch stop in high-density magnetic-tunnel-junction patterning using CO/NH3 plasma with Ta mask

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Makoto Satake, Masaki Yamada, Kenetsu Yokogawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 042805 (2020)
https://doi.org/10.1116/6.0000305
Published: July 2020
View articletitled, Mechanism of premature etch stop in high-density magnetic-tunnel-junction patterning using CO/NH3 plasma with Ta mask
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Journal Articles

Plasma-induced reaction at plasma-liquid and plasma-polymeric film interface by AC-driven atmospheric pressure plasma

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Tae Hwan Kim, Hye-Jin Yang, Da-Eun Lee, Ho-Jun Lee, Jungkyun Im, Seung Whan Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 032805 (2020)
https://doi.org/10.1116/1.5129570
Published: May 2020
View articletitled, Plasma-induced reaction at plasma-liquid and plasma-polymeric film interface by AC-driven atmospheric pressure plasma
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Includes: Supplementary data
Journal Articles

Electrical and optical properties of copper oxide thin films prepared by DC magnetron sputtering

Open Access
Anmar H. Shukor, Haider A. Alhattab, Ichiro Takano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 012803 (2020)
https://doi.org/10.1116/1.5131518
Published: December 2019
View articletitled, Electrical and optical properties of copper oxide thin films prepared by DC magnetron sputtering
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Journal Articles

Sub-rf period electrical characterization of a pulsed capacitively coupled argon plasma

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Alex F. Press, Matthew J. Goeckner, Lawrence J. Overzet
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062926 (2019)
https://doi.org/10.1116/1.5132753
Published: November 2019
View articletitled, Sub-rf period electrical characterization of a pulsed capacitively coupled argon plasma
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Journal Articles

Optical properties of the crystalline silicon wafers described using the universal dispersion model

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Daniel Franta, Jiří Vohánka, Martin Bránecký, Pavel Franta, Martin Čermák, Ivan Ohlídal, Vladimír Čech
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062907 (2019)
https://doi.org/10.1116/1.5122284
Published: October 2019
View articletitled, Optical properties of the crystalline silicon wafers described using the universal dispersion model
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