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Journal Articles
J. Vac. Sci. Technol. B 42, 044204 (2024)
Published: July 2024
Journal Articles
J. Vac. Sci. Technol. B 42, 043001 (2024)
Published: June 2024
Journal Articles
J. Vac. Sci. Technol. B 42, 034005 (2024)
Published: April 2024
Journal Articles
J. Vac. Sci. Technol. B 41, 053203 (2023)
Published: September 2023
Journal Articles
Understanding plasma enhanced chemical vapor deposition mechanisms in tetraethoxysilane-based plasma
J. Vac. Sci. Technol. B 41, 022208 (2023)
Published: March 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. B 41, 012603 (2023)
Published: January 2023
Journal Articles
Ekaterina N. Voronina, Anastasia A. Sycheva, Alexander A. Solovykh, Olga V. Proshina, Tatyana V. Rakhimova, Alexander A. P. Palov, Alexander T. Rakhimov
J. Vac. Sci. Technol. B 40, 062203 (2022)
Published: October 2022
Journal Articles
Prem Panneerchelvam, Ankur Agarwal, Chad M. Huard, Alessandro Vaglio Pret, Antonio Mani, Roel Gronheid, Marc Demand, Kaushik Kumar, Sara Paolillo, Frederic Lazzarino
J. Vac. Sci. Technol. B 40, 062601 (2022)
Published: September 2022
Journal Articles
J. Vac. Sci. Technol. B 40, 044002 (2022)
Published: July 2022
Journal Articles
J. Vac. Sci. Technol. B 40, 043001 (2022)
Published: May 2022
Journal Articles
J. Vac. Sci. Technol. B 40, 032202 (2022)
Published: April 2022
Journal Articles
Fabrication of black GaAs by maskless inductively coupled plasma etching in Cl2/BCl3/O2/Ar chemistry
J. Vac. Sci. Technol. B 40, 022205 (2022)
Published: February 2022
Journal Articles
J. Vac. Sci. Technol. B 40, 012203 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. B 39, 024003 (2021)
Published: March 2021
Journal Articles
J. Vac. Sci. Technol. B 38, 052601 (2020)
Published: August 2020
Journal Articles
J. Vac. Sci. Technol. B 38, 034005 (2020)
Published: April 2020
Journal Articles
J. Vac. Sci. Technol. B 38, 022203 (2020)
Published: January 2020
Journal Articles
Yasuhiro Isobe, Takayuki Sakai, Kyoichi Suguro, Naoto Miyashita, Hiroki Kondo, Kenji Ishikawa, Amalraj Frank Wilson, Naohiro Shimizu, Osamu Oda, Makoto Sekine, Masaru Hori
J. Vac. Sci. Technol. B 37, 061215 (2019)
Published: December 2019
Journal Articles
J. Vac. Sci. Technol. B 37, 062922 (2019)
Published: November 2019
Journal Articles
J. Vac. Sci. Technol. B 37, 062917 (2019)
Published: October 2019
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