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Journal Articles

Experimental investigation of the feasibility of in situ plasma cleaning in normal-conducting copper cavities

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Qianxu Xia, Lianmin Zheng, Yingchao Du
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023602 (2025)
https://doi.org/10.1116/6.0004012
Published: February 2025
View articletitled, Experimental investigation of the feasibility of in situ plasma cleaning in normal-conducting copper cavities
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Journal Articles

Development of the electron cyclotron resonance heating system for Divertor Tokamak Test

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Saul Garavaglia, Luca Balbinot, Alessandro Bruschi, Daniele Busi, Andrea Bussolan, Francesco Fanale, Gustavo Granucci, Alessandro Moro, Paola Platania, Natale Rispoli, Afra Romano, Emanuele Sartori, Stefan Schmuck, Alessandro Simonetto, Espedito Vassallo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044201 (2023)
https://doi.org/10.1116/6.0002396
Published: May 2023
View articletitled, Development of the electron cyclotron resonance heating system for Divertor Tokamak Test
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Journal Articles

Influence of copper nanowires grown in a dielectric layer on the performance of dielectric barrier discharge

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Zhao He, Zhihu Liang, Xiaoning Zhang, Chunliang Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 010603 (2017)
https://doi.org/10.1116/1.4973302
Published: December 2016
View articletitled, Influence of copper nanowires grown in a dielectric layer on the performance of dielectric barrier discharge
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Journal Articles

Classical momentum gap for electron transport in vacuum and consequences for space charge in thermionic converters with a grid electrode

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Amir H. Khoshaman, Alireza Nojeh
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 040610 (2016)
https://doi.org/10.1116/1.4958801
Published: July 2016
View articletitled, Classical momentum gap for electron transport in vacuum and consequences for space charge in thermionic converters with a grid electrode
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Journal Articles

Improvement of electron field emission properties of nanocrystalline diamond films by a plasma post-treatment process for cathode application in microplasma devices

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Sheng-Chang Lin, Chien-Jui Yeh, Keh-Chyang Leou, Divinah Manoharan, I-Nan Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 02G106 (2016)
https://doi.org/10.1116/1.4944006
Published: March 2016
View articletitled, Improvement of electron field emission properties of nanocrystalline diamond films by a plasma post-treatment process for cathode application in microplasma devices
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Journal Articles

Development of diamond cathode materials for enhancing the electron field emission and plasma characteristics using two-step microwave plasma enhanced chemical vapor deposition process

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Shiu-Cheng Lou, Chulung Chen, Srinivasu Kunuku, Keh-Chyang Leou, Chi-Young Lee, Huang-Chin Chen, I-Nan Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 021202 (2014)
https://doi.org/10.1116/1.4864067
Published: February 2014
View articletitled, Development of diamond cathode materials for enhancing the electron field emission and plasma characteristics using two-step microwave plasma enhanced chemical vapor deposition process
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Journal Articles

Metal-insulator-metal capacitors based on lanthanum oxide high-κ dielectric nanolayers fabricated using dense plasma focus device

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Onkar Mangla, Asutosh Srivastava, Yashi Malhotra, Kostya (Ken) Ostrikov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 03D107 (2014)
https://doi.org/10.1116/1.4862093
Published: January 2014
View articletitled, Metal-insulator-metal capacitors based on lanthanum oxide high-κ dielectric nanolayers fabricated using dense plasma focus device
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Journal Articles

Ashing of photoresists using dielectric barrier discharge cryoplasmas

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Sven Stauss, Shusaku Mori, Hitoshi Muneoka, Kazuo Terashima, Francesca Iacopi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 061202 (2013)
https://doi.org/10.1116/1.4825202
Published: October 2013
View articletitled, Ashing of photoresists using dielectric barrier discharge cryoplasmas
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Journal Articles

Synthesis of diamond nanotips for enhancing the plasma illumination characteristics of capacitive-type plasma devices

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Shiu-Cheng Lou, Chulung Chen, Kuang-Yau Teng, Chien-Yao Tang, I-Nan Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 02B109 (2013)
https://doi.org/10.1116/1.4769973
Published: December 2012
View articletitled, Synthesis of diamond nanotips for enhancing the plasma illumination characteristics of capacitive-type plasma devices
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Journal Articles

Low temperature plasma-initiated copolymerization of styrene and maleic anhydride

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Da Yan, Xu-Bo Yuan, Gui-Qiu Ma, Jing Sheng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 1450–1453 (2009)
https://doi.org/10.1116/1.3058728
Published: May 2009
View articletitled, Low temperature plasma-initiated copolymerization of styrene and maleic anhydride
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Journal Articles

Electrical properties of nanotip-assisted microplasma devices

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Sung-O. Kim, Yang-Suk Ko, Hal-Bon Gu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 193–197 (2009)
https://doi.org/10.1116/1.3043534
Published: February 2009
View articletitled, Electrical properties of nanotip-assisted microplasma devices
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Journal Articles

High power 121.6 nm radiation source

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Jianxun Yan, Mool C. Gupta
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 21, 2839–2842 (2003)
https://doi.org/10.1116/1.1627801
Published: December 2003
View articletitled, High power 121.6 nm radiation source
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Journal Articles

121.6 nm radiation source for advanced lithography

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Jianxun Yan, Ashraf El-Dakrouri, Mounir Laroussi, Mool C. Gupta
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 20, 2574–2577 (2002)
https://doi.org/10.1116/1.1515302
Published: December 2002
View articletitled, 121.6 nm radiation source for advanced lithography
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Journal Articles

Field emission carbon thin film and its lifetime and stability

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L. H. Thuesen, Z. Li Tolt, R. L. Fink, Z. Yaniv, Colleen M. Marrese, Steve Bandy, Clifford Nishimoto
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 18, 968–971 (2000)
https://doi.org/10.1116/1.591308
Published: March 2000
View articletitled, Field emission carbon thin film and its lifetime and stability
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Journal Articles

Plasma sources for electrons and ion beams

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Ka-Ngo Leung
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 17, 2776–2778 (1999)
https://doi.org/10.1116/1.591063
Published: November 1999
View articletitled, Plasma sources for electrons and ion beams
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Journal Articles

Aspheric collimator for a point source x-ray lithography system

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S. Singh-Gasson, Y. Vladimirsky, F. Cerrina
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 16, 3456–3461 (1998)
https://doi.org/10.1116/1.590477
Published: November 1998
View articletitled, Aspheric collimator for a point source x-ray lithography system
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