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Journal Articles

Thermal-field emission from cones and wires

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Kevin L. Jensen, Michael S. McDonald, Mia K. Dhillon, Daniel Finkenstadt, Andrew Shabaev, Michael Osofsky
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022801 (2022)
https://doi.org/10.1116/6.0001656
Published: January 2022
View articletitled, Thermal-field emission from cones and wires
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Journal Articles

Stabilization of cold-field-emission current from a CeB6 single-crystal emitter by using a faceted (100) plane

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Toshiaki Kusunoki, Tomihiro Hashizume, Keigo Kasuya, Noriaki Arai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 013202 (2021)
https://doi.org/10.1116/6.0000739
Published: December 2020
View articletitled, Stabilization of cold-field-emission current from a CeB6 single-crystal emitter by using a faceted (100) plane
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Journal Articles

Submonolayer epitaxy growth of fractional monolayer CdSe/ZnSe quantum dots

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Frantisek Sutara, José Carlos Basilio-Ortiz, Isaac Hernández-Calderón
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 032209 (2020)
https://doi.org/10.1116/6.0000085
Published: April 2020
View articletitled, Submonolayer epitaxy growth of fractional monolayer CdSe/ZnSe quantum dots
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Journal Articles

Semiclassical theory of cold field electron emission from nanoscale emitter tips

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A. A. Patterson, A. I. Akinwande
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 023206 (2020)
https://doi.org/10.1116/1.5135009
Published: March 2020
View articletitled, Semiclassical theory of cold field electron emission from nanoscale emitter tips
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Journal Articles

Chemical nature and thermal decomposition behavior of tartaric acid multilayers on rutile TiO2(110)

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Elisa Meriggio, Rémi Lazzari, Christophe Méthivier, Pascal David, Stéphane Chenot, Xavier Carrier, Gregory Cabailh, Vincent Humblot
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 051803 (2019)
https://doi.org/10.1116/1.5100957
Published: August 2019
View articletitled, Chemical nature and thermal decomposition behavior of tartaric acid multilayers on rutile TiO2(110)
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Journal Articles

Atomic deuteration of epitaxial many-layer graphene on 4 H - S i C ( 000 1 ¯ )

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Alessandro R. Mazza, Anna Miettinen, Matt Conrad, Timothy R. Charlton, Xiaoqing He, Suchi Guha, Guang Bian, Jian Lin, Edward H. Conrad, Paul F. Miceli
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 041804 (2019)
https://doi.org/10.1116/1.5095961
Published: July 2019
View articletitled, Atomic deuteration of epitaxial many-layer graphene on 4 H - S i C ( 000 1 ¯ )
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Journal Articles

Predicting radiation-induced carbon contamination of EUV optics

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Jeromy T. Hollenshead, Leonard E. Klebanoff, Gil Delgado
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 021602 (2019)
https://doi.org/10.1116/1.5072797
Published: February 2019
View articletitled, Predicting radiation-induced carbon contamination of EUV optics
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Includes: Supplementary data
Journal Articles

Study of device instability of bottom-gate ZnO transistors with sol–gel derived channel layers

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Kosala Yapabandara, Vahid Mirkhani, Muhammad Shehzad Sultan, Burcu Ozden, Min P. Khanal, Minseo Park, Shiqiang Wang, Michael C. Hamilton, Yoonsung Chung, Dong-Joo Kim, Mobbassar Hassan Sk
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 03D104 (2017)
https://doi.org/10.1116/1.4979321
Published: March 2017
View articletitled, Study of device instability of bottom-gate ZnO transistors with sol–gel derived channel layers
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Journal Articles

Graphene processing using electron beam assisted metal deposition and masked chemical vapor deposition growth

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Andrew Merrell, Feng Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 041230 (2016)
https://doi.org/10.1116/1.4958795
Published: July 2016
View articletitled, Graphene processing using electron beam assisted metal deposition and masked chemical vapor deposition growth
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Includes: Supplementary data
Journal Articles

Kinetic Monte Carlo simulation of GaAs(001) MBE growth considering the V/III flux ratio effect

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Oleg A. Ageev, Maxim S. Solodovnik, Sergey V. Balakirev, Mikhail M. Eremenko
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 041804 (2016)
https://doi.org/10.1116/1.4948514
Published: May 2016
View articletitled, Kinetic Monte Carlo simulation of GaAs(001) MBE growth considering the V/III flux ratio effect
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Journal Articles

Domain fracture and recovery process of metal phthalocyanine monolayers via NO2 and H2O

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Jun Hong Park, Sangyeob Lee, Andrew C. Kummel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 030604 (2015)
https://doi.org/10.1116/1.4919227
Published: May 2015
View articletitled, Domain fracture and recovery process of metal phthalocyanine monolayers via NO2 and H2O
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Journal Articles

Spurious dangling bond formation during atomically precise hydrogen depassivation lithography on Si(100): The role of liberated hydrogen

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Joshua B. Ballard, James H. G. Owen, Justin D. Alexander, William R. Owen, Ehud Fuchs, John N. Randall, Roberto C. Longo, Kyeongjae Cho
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 021805 (2014)
https://doi.org/10.1116/1.4864302
Published: February 2014
View articletitled, Spurious dangling bond formation during atomically precise hydrogen depassivation lithography on Si(100): The role of liberated hydrogen
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Journal Articles

Low fluctuation and drift of field emission currents emitted from Pd/W nanotips

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Yuta Akamine, Kazuto Fujiwara, Chuhei Oshima, Boklae Cho
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 041808 (2011)
https://doi.org/10.1116/1.3610166
Published: August 2011
View articletitled, Low fluctuation and drift of field emission currents emitted from Pd/W nanotips
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Journal Articles

Conformal electroless filling of Cu into patterned amorphous carbon layer modified by oxygen plasma and aminosilane treatments

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H. W. Kim, N.-E. Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, 715–719 (2010)
https://doi.org/10.1116/1.3442474
Published: June 2010
View articletitled, Conformal electroless filling of Cu into patterned amorphous carbon layer modified by oxygen plasma and aminosilane treatments
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Journal Articles

Investigation of interface between fullerene molecule and Si ( 111 ) - 7 × 7 surface by noncontact scanning nonlinear dielectric microscopy

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Shin-ichiro Kobayashi, Yasuo Cho
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C4D18–C4D23 (2010)
https://doi.org/10.1116/1.3373959
Published: May 2010
View articletitled, Investigation of interface between fullerene molecule and Si ( 111 ) - 7 × 7 surface by noncontact scanning nonlinear dielectric microscopy
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Journal Articles

Spectroscopic scanning tunnel microscopy of Cl – Si ( 111 ) 7 × 7 : Determination of Cl–Si σ * resonance line shape

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Weiming Liu, Steven Horn, Pouya Maraghechi, S. N. Patitsas
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 895–902 (2009)
https://doi.org/10.1116/1.3066737
Published: March 2009
View articletitled, Spectroscopic scanning tunnel microscopy of Cl – Si ( 111 ) 7 × 7 : Determination of Cl–Si σ * resonance line shape
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Journal Articles

The effects of oxygen plasma on the chemical composition and morphology of the Ru capping layer of the extreme ultraviolet mask blanks

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Leonid Belau, Jeong Y. Park, Ted Liang, Gabor A. Somorjai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 2225–2229 (2008)
https://doi.org/10.1116/1.3021368
Published: December 2008
View articletitled, The effects of oxygen plasma on the chemical composition and morphology of the Ru capping layer of the extreme ultraviolet mask blanks
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Journal Articles

Metal-containing release layers for use with UV-cure nanoimprint lithographic template materials

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F. A. Houle, S. Raoux, D. C. Miller, C. Jahnes, S. Rossnagel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 1301–1304 (2008)
https://doi.org/10.1116/1.2939258
Published: August 2008
View articletitled, Metal-containing release layers for use with UV-cure nanoimprint lithographic template materials
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Journal Articles

Selective growth of CdTe on patterned Cd Te ∕ Si ( 211 )

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T. Seldrum, R. Bommena, L. Samain, J. Dumont, S. Sivananthan, R. Sporken
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 1105–1109 (2008)
https://doi.org/10.1116/1.2912090
Published: May 2008
View articletitled, Selective growth of CdTe on patterned Cd Te ∕ Si ( 211 )
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Journal Articles

Controlling pressure in microsystem packages by on-chip microdischarges between thin-film titanium electrodes

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Scott A. Wright, Yogesh B. Gianchandani
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 1711–1720 (2007)
https://doi.org/10.1116/1.2782510
Published: September 2007
View articletitled, Controlling pressure in microsystem packages by on-chip microdischarges between thin-film titanium electrodes
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