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Journal Articles

Measuring and understanding the nanomechanical properties of halide perovskites and their correlation to structure—A perspective

Irit Rosenhek-Goldian, David Cahen, Sidney R. Cohen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 058501 (2023)
https://doi.org/10.1116/6.0002794
Published: August 2023
View article titled, Measuring and understanding the nanomechanical properties of halide perovskites and their correlation to structure—A perspective
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Journal Articles

Measurements of He-Ar, He-N2, and He-air thermal creep slip and accommodation coefficients at high temperatures

Jason Wilson, Kyle L. Walton, Earl L. Tipton, Tushar K. Ghosh, Robert V. Tompson, Sudarshan K. Loyalka
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 053001 (2023)
https://doi.org/10.1116/6.0002704
Published: July 2023
View article titled, Measurements of He-Ar, He-N<sub>2</sub>, and He-air thermal creep slip and accommodation coefficients at high temperatures
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Journal Articles

Phosphorus deactivation by hydrogen on hot carrier stressed high-voltage N-channel field effect transistor CMOS device demonstrated by scanning capacitance microscopy imaging

Jochonia Nxumalo, Wang Yun-Yu (王允愈), 王允愈, Mike Smith, You Lin (尤林), 尤林, David Fillmore, Matthew Gerber, Jin Qiang (金强), 金强
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042203 (2023)
https://doi.org/10.1116/5.0147443
Published: June 2023
View article titled, Phosphorus deactivation by hydrogen on hot carrier stressed high-voltage N-channel field effect transistor CMOS device demonstrated by scanning capacitance microscopy imaging
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Journal Articles

Morphologic and electronic changes induced by thermally supported hydrogen cleaning of GaAs(110) facets

D. S. Rosenzweig, M. Schnedler, R. E. Dunin-Borkowski, Ph. Ebert, H. Eisele
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044202 (2023)
https://doi.org/10.1116/6.0002733
Published: May 2023
View article titled, Morphologic and electronic changes induced by thermally supported hydrogen cleaning of GaAs(110) facets
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Journal Articles

Effect of water vapor pressure on positive and negative tone electron-beam patterning of poly(methyl methacrylate)

Deepak Kumar, Krishnaroop Chaudhuri, Joseph W. Brill, Jonathan T. Pham, J. Todd Hastings
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012604 (2023)
https://doi.org/10.1116/6.0002118
Published: January 2023
View article titled, Effect of water vapor pressure on positive and negative tone electron-beam patterning of poly(methyl methacrylate)
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Journal Articles

Trilayer process for T-gate and Γ-gate lithography using ternary developer and proximity effect correction superposition

Leonidas E. Ocola, James Bucchignano, Simon Dawes, Andrei Fustochenko
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 062605 (2022)
https://doi.org/10.1116/6.0002121
Published: November 2022
View article titled, Trilayer process for <em>T</em>-gate and Γ-gate lithography using ternary developer and proximity effect correction superposition
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Includes: Supplementary data
Journal Articles

Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films

Antony Premkumar Peter, Alfonso Sepulveda Marquez, Johan Meersschaut, Praveen Dara, Timothee Blanquart, Takayama Tomomi, Ebisudani Taishi, Shiba Elichiro, Yosuke Kimura, Sander van Gompel, Pierre Morin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 054001 (2022)
https://doi.org/10.1116/6.0001922
Published: August 2022
View article titled, Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films
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Journal Articles

Stochastic defect removal coating for high-performance extreme ultraviolet lithography

Young Joo Choi, Ran Namgung, Jun Soo Kim, Dae Seok Song, Hyeon Park, Shin-hyo Bae, Min-Ki Chon, Min Soo Kim, Hyun-Ji Song, Hyun-Woo Kim, Suk Koo Hong
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 042602 (2022)
https://doi.org/10.1116/6.0001723
Published: May 2022
View article titled, Stochastic defect removal coating for high-performance extreme ultraviolet lithography
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Journal Articles

Patterning characteristic control of sol-gel-derived random-structure oligomeric silsesquioxanes having a diazonaphthoquinone derivative

Mitsuhito Suwa, Masao Kamogawa, Manami Fujii, Takuya Nishiyama, Hiromitsu Kozuka
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022602 (2022)
https://doi.org/10.1116/6.0001717
Published: March 2022
View article titled, Patterning characteristic control of sol-gel-derived random-structure oligomeric silsesquioxanes having a diazonaphthoquinone derivative
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Journal Articles

Effective polymerization technique for plasma-treated multiwalled carbon nanotubes to maximize wear resistance of composite polyurethane

Daisuke Ogawa, Seira Morimune-Moriya, Keiji Nakamura
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022803 (2022)
https://doi.org/10.1116/6.0001390
Published: February 2022
View article titled, Effective polymerization technique for plasma-treated multiwalled carbon nanotubes to maximize wear resistance of composite polyurethane
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Journal Articles

New SIMS method to characterize hydrogen in polysilicon films

Xue-feng Lin, Agi Fucsko, Kari Noehring, Elaine Gabriel, Adam Regner, Scott York, David Palsulich
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 014003 (2022)
https://doi.org/10.1116/6.0001472
Published: January 2022
View article titled, New SIMS method to characterize hydrogen in polysilicon films
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Journal Articles

Characterization of GeO2 films formed on Ge substrate using high pressure oxidation

Juhyun Bae, Ilsub Chung
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 043201 (2021)
https://doi.org/10.1116/6.0000963
Published: June 2021
View article titled, Characterization of GeO<sub>2</sub> films formed on Ge substrate using high pressure oxidation
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Journal Articles

Effects of thickness on the wettability and electrical properties of Sn thin films

Jatinder Kaur, Ravish K. Jain, Atul Khanna, Amit K. Chawla
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 032205 (2021)
https://doi.org/10.1116/6.0001026
Published: May 2021
View article titled, Effects of thickness on the wettability and electrical properties of Sn thin films
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Journal Articles

Evidence of hydrogen termination at grain boundaries in ultrananocrystalline diamond/hydrogenated amorphous carbon composite thin films synthesized via coaxial arc plasma

Naofumi Nishikawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062803 (2020)
https://doi.org/10.1116/6.0000545
Published: November 2020
View article titled, Evidence of hydrogen termination at grain boundaries in ultrananocrystalline diamond/hydrogenated amorphous carbon composite thin films synthesized via coaxial arc plasma
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Journal Articles

Direct molecular quantification of electronic disorder in N,N′-Di-[(1-naphthyl)-N,N′-diphenyl]-1,1′-biphenyl)-4,4′-diamine on Au(111)

Jiuyang Wang, Jingying Wang, Daniel B. Dougherty
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 053401 (2020)
https://doi.org/10.1116/6.0000401
Published: August 2020
View article titled, Direct molecular quantification of electronic disorder in <em>N,N</em>′-Di-[(1-naphthyl)-<em>N,N</em>′-diphenyl]-1,1′-biphenyl)-4,4′-diamine on Au(111)
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Journal Articles

Engineering anisotropic magnetoresistance of Hall bars with interfacial organic layers

Jun Hong Park, Mario Ribeiro, Thi Kim Hang Pham, Nyun Jong Lee, Tai-woon Eom, Junhyeon Jo, Seung-Young Park, Sonny H. Rhim, Kohji Nakamura, Jung-Woo Yoo, Tae Hee Kim
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 040602 (2020)
https://doi.org/10.1116/6.0000222
Published: June 2020
View article titled, Engineering anisotropic magnetoresistance of Hall bars with interfacial organic layers
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Journal Articles

Adsorption behavior of cobalt phthalocyanine submonolayer coverages on B-Si(111)- 3 × 3 R 30 °

Milan Kubicki, Susi Lindner, Martin Franz, Holger Eisele, Mario Dähne
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 042803 (2020)
https://doi.org/10.1116/6.0000242
Published: June 2020
View article titled, Adsorption behavior of cobalt phthalocyanine submonolayer coverages on B-Si(111)- 3 × 3 R 30 °
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Journal Articles

Simulation of microparticle motion and contamination in plasma coating systems

Philipp Schulz, Andreas Pflug, Hans-Ulrich Kricheldorf
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 022203 (2020)
https://doi.org/10.1116/1.5130720
Published: January 2020
View article titled, Simulation of microparticle motion and contamination in plasma coating systems
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Journal Articles

Two-step potassium hydroxide etching to enhance aspect ratio in trench fabrication

Huseyin Ekinci, Ripon K. Dey, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062001 (2019)
https://doi.org/10.1116/1.5123530
Published: November 2019
View article titled, Two-step potassium hydroxide etching to enhance aspect ratio in trench fabrication
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Journal Articles

Electronic structure and dielectric function of Mn-Bi-Te layered compounds

Zakir A. Jahangirli, Elvin H. Alizade, Ziya S. Aliev, Mikhail M. Otrokov, Narmin A. Ismayilova, Samir N. Mammadov, Imamaddin R. Amiraslanov, Nazim T. Mamedov, Guseyn S. Orudjev, Mahammad B. Babanly, Alexander M. Shikin, Evgueni V. Chulkov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062910 (2019)
https://doi.org/10.1116/1.5122702
Published: October 2019
View article titled, Electronic structure and dielectric function of Mn-Bi-Te layered compounds
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