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Journal Articles

Nanocalorimetry for plasma metrology relevant to semiconductor fabrication

Editor’s Pick
J. Trey Diulus, Carles Corbella, Feng Yi, David LaVan, Berc Kalanyan, Mark McLean, Lakshmi Ravi Narayan, William A. Osborn, James E. Maslar, Andrei Kolmakov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 020601 (2025)
https://doi.org/10.1116/6.0004294
Published: February 2025
View article titled, Nanocalorimetry for plasma metrology relevant to semiconductor fabrication
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Journal Articles

Tungsten oxide nanowires prepared by thermal oxidation for application in cold cathode flat panel x-ray source

Qi Liu, Zufang Lin, Guichen Song, Song Kang, Chengyun Wang, Shaozhi Deng, Ningsheng Xu, Jun Chen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023201 (2025)
https://doi.org/10.1116/6.0004123
Published: January 2025
View article titled, Tungsten oxide nanowires prepared by thermal oxidation for application in cold cathode flat panel x-ray source
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Journal Articles

One-step formation of ZrON thin film on surface of carbon fine particles for membrane electrode assembly

Yudai Aihara, Takashi Iida, Kakeru Kodama, Hiroshi Iwata, Takao Sekiya
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034202 (2024)
https://doi.org/10.1116/6.0003542
Published: May 2024
View article titled, One-step formation of ZrON thin film on surface of carbon fine particles for membrane electrode assembly
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Journal Articles

Plasma-assisted synthesis of gold-silver core-shell nanoparticles and their enhanced catalytic dye degradation and surface enhanced Raman spectroscopy performance

Siddiqa Ismail, W. Ahmed, Muhammad Farooq, N. U. Rehman
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 024005 (2024)
https://doi.org/10.1116/6.0003245
Published: March 2024
View article titled, Plasma-assisted synthesis of gold-silver core-shell nanoparticles and their enhanced catalytic dye degradation and surface enhanced Raman spectroscopy performance
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Journal Articles

Field emission characterization of field-aligned carbon nanotubes synthesized in an environmental transmission electron microscope

Pascal Vincent, Federico Panciera, Ileana Florea, Anthony Ayari, Sorin Perisanu, Costel Sorin Cojocaru, Haifa Taoum, Chen Wei, Khakimjon Saidov, Utkur Mirsaidov, Ilias Aguili, Nicholas Blanchard, Pierre Legagneux, Stephen Thomas Purcell
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022802 (2024)
https://doi.org/10.1116/6.0003413
Published: March 2024
View article titled, Field emission characterization of field-aligned carbon nanotubes synthesized in an environmental transmission electron microscope
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Includes: Supplementary data
Journal Articles

Ce0.7La0.15Ca0.15O2−δ nanoparticles synthesis via colloidal solution combustion method: Studying structural and physicochemical properties and Congo Red dye photodegradation

Adnene Midouni, Anis Chaouachi, Sami Barkaoui, Nejib Abassi, Samir Chakhari, Ammar Mahjoubi, Djamel Ghernaout, Ahmed Hichem Hamzaoui, Muhammad Imran Khan, Noureddine Elboughdiri
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052804 (2023)
https://doi.org/10.1116/6.0002825
Published: August 2023
View article titled, Ce<sub>0.7</sub>La<sub>0.15</sub>Ca<sub>0.15</sub>O<sub>2−δ</sub> nanoparticles synthesis via colloidal solution combustion method: Studying structural and physicochemical properties and Congo Red dye photodegradation
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Journal Articles

Barrier/seed system for electroless metallization on complex surfaces using (aminomethylaminoethyl)phenethyltrimethoxysilane self-assembled films

J. K. L. Peters, G. D. Ashby, H. D. Hallen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042209 (2023)
https://doi.org/10.1116/6.0002519
Published: July 2023
View article titled, Barrier/seed system for electroless metallization on complex surfaces using (aminomethylaminoethyl)phenethyltrimethoxysilane self-assembled films
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Journal Articles

Surface and functional characterization of nanostructured thin films for environmental remediation

Enrica Maria Malannata, Alessandro Auditore, Antonino Licciardello
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044008 (2023)
https://doi.org/10.1116/6.0002611
Published: June 2023
View article titled, Surface and functional characterization of nanostructured thin films for environmental remediation
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Includes: Supplementary data
Journal Articles

Plasmon resonance-based study of the peroxidaselike catalytic effect of gold nanoparticles

Minjie Zheng, Yujuan Cai, Jun Zhang, Liying Li, Zhigang Tai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 062801 (2022)
https://doi.org/10.1116/6.0002076
Published: October 2022
View article titled, Plasmon resonance-based study of the peroxidaselike catalytic effect of gold nanoparticles
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Journal Articles

In-plasma photo-assisted etching of Si with chlorine aided by an external vacuum ultraviolet source

Editor’s Pick
Linfeng Du, Demetre J. Economou, Vincent M. Donnelly
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022207 (2022)
https://doi.org/10.1116/6.0001710
Published: February 2022
View article titled, In-plasma photo-assisted etching of Si with chlorine aided by an external vacuum ultraviolet source
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Journal Articles

Electrical conductivity across the alumina support layer following carbon nanotube growth

Berg Dodson, Guohai Chen, Robert Davis, Richard Vanfleet
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052803 (2021)
https://doi.org/10.1116/6.0001115
Published: August 2021
View article titled, Electrical conductivity across the alumina support layer following carbon nanotube growth
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Journal Articles

Organotrialkoxysilane-mediated synthesis of Ni–Pd nanocatalysts at lower concentrations of noble metal: Catalysts for faster hydrogen evolution kinetics

Prem C. Pandey, Shubhangi Shukla, Roger J. Narayan
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 032802 (2021)
https://doi.org/10.1116/6.0000881
Published: May 2021
View article titled, Organotrialkoxysilane-mediated synthesis of Ni–Pd nanocatalysts at lower concentrations of noble metal: Catalysts for faster hydrogen evolution kinetics
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Journal Articles

Systematic growth of carbon nanotubes on aluminum substrate for enhanced field emission performance

Palash Chandra Maity, Subham Gandhi, Manuj Dixit, Indranil Lahiri
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 022801 (2021)
https://doi.org/10.1116/6.0000560
Published: February 2021
View article titled, Systematic growth of carbon nanotubes on aluminum substrate for enhanced field emission performance
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Journal Articles

Stability of TiO2-coated ZnO photocatalytic thin films for photodegradation of methylene blue

Rogel Jan B. Butalid, Anna Patricia S. Cristobal, Arantxa Danielle S. Montallana, Magdaleno R. Vasquez, Jr.
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062205 (2020)
https://doi.org/10.1116/6.0000306
Published: October 2020
View article titled, Stability of TiO<sub>2</sub>-coated ZnO photocatalytic thin films for photodegradation of methylene blue
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Journal Articles

Synthesis of TiN/N-doped TiO2 composite films as visible light active photocatalyst

Glenson R. Panghulan, Magdaleno R. Vasquez, Jr., Yasmin D. Edañol, Narong Chanlek, Leon M. Payawan, Jr.
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062203 (2020)
https://doi.org/10.1116/6.0000304
Published: October 2020
View article titled, Synthesis of TiN/N-doped TiO<sub>2</sub> composite films as visible light active photocatalyst
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Journal Articles

Colloidal synthesis, physical properties, and applications of zero- and one-dimensional GeSn nanostructures

Drew Z. Spera, Indika U. Arachchige
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 030802 (2020)
https://doi.org/10.1116/6.0000040
Published: April 2020
View article titled, Colloidal synthesis, physical properties, and applications of zero- and one-dimensional GeSn nanostructures
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Journal Articles

Low-temperature chemical vapor deposition growth of graphene films enabled by ultrathin alloy catalysts

Samuel Olson, Otto Zietz, Joshua Tracy, Yanlong Li, Chenggang Tao, Jun Jiao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 032202 (2020)
https://doi.org/10.1116/1.5144692
Published: March 2020
View article titled, Low-temperature chemical vapor deposition growth of graphene films enabled by ultrathin alloy catalysts
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Journal Articles

Insulating regions in a TiO2 thin film defined by laser irradiation

Syeed E. Ahmed, Jesse Huso, Jacob R. Ritter, John Igo, Yi Gu, Matthew D. McCluskey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 032203 (2020)
https://doi.org/10.1116/1.5142402
Published: March 2020
View article titled, Insulating regions in a TiO<sub>2</sub> thin film defined by laser irradiation
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Includes: Supplementary data
Journal Articles

Structural, morphologic and optical properties of graphene doped binary TiO2–P2O5 nanocomposite

L. Baschir, A. M. Iordache, D. Savastru, A. A. Popescu, I. C. Vasiliu, M. Elisa, C. Obreja, M. Filipescu, R. Trusca, M. Stchakovsky, S. Iordache
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061208 (2019)
https://doi.org/10.1116/1.5122897
Published: November 2019
View article titled, Structural, morphologic and optical properties of graphene doped binary TiO<sub>2</sub>–P<sub>2</sub>O<sub>5</sub> nanocomposite
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Journal Articles

Chemical nature and thermal decomposition behavior of tartaric acid multilayers on rutile TiO2(110)

Elisa Meriggio, Rémi Lazzari, Christophe Méthivier, Pascal David, Stéphane Chenot, Xavier Carrier, Gregory Cabailh, Vincent Humblot
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 051803 (2019)
https://doi.org/10.1116/1.5100957
Published: August 2019
View article titled, Chemical nature and thermal decomposition behavior of tartaric acid multilayers on rutile TiO<sub>2</sub>(110)
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