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Journal Articles

Spatial variation of the elemental components of thin films from BiSrCaCuO target deposited using low energy femtosecond pulsed laser deposition in high background gas pressure

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Joy Kristelle De Mata, Roland Sarmago, Wilson Garcia, Lean Dasallas
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 024003 (2025)
https://doi.org/10.1116/6.0004082
Published: January 2025
View articletitled, Spatial variation of the elemental components of thin films from BiSrCaCuO target deposited using low energy femtosecond pulsed laser deposition in high background gas pressure
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Journal Articles

Cu1−xAlx films as alternatives to copper for advanced interconnect metallization

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Jean-Philippe Soulié, Kiroubanand Sankaran, Geoffrey Pourtois, Johan Swerts, Zsolt Tőkei, Christoph Adelmann
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 043203 (2024)
https://doi.org/10.1116/6.0003634
Published: June 2024
View articletitled, Cu1−xAlx films as alternatives to copper for advanced interconnect metallization
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Journal Articles

Effects of H+ ion bombardment on GaAs photocathode surface with Cs-O and Cs-F activation layers

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Kaimin Zhang, Yijun Zhang, Qiming Wang, Jingzhi Zhang, Shiman Li, Yunsheng Qian, Feng Shi, Gangcheng Jiao, Lei Yan, Cheng Feng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062210 (2023)
https://doi.org/10.1116/6.0003173
Published: December 2023
View articletitled, Effects of H+ ion bombardment on GaAs photocathode surface with Cs-O and Cs-F activation layers
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Journal Articles

Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?

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Charles W. Magee, Temel H. Buyuklimanli
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 030803 (2023)
https://doi.org/10.1116/6.0002466
Published: April 2023
View articletitled, Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?
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Journal Articles

Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films

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Antony Premkumar Peter, Alfonso Sepulveda Marquez, Johan Meersschaut, Praveen Dara, Timothee Blanquart, Takayama Tomomi, Ebisudani Taishi, Shiba Elichiro, Yosuke Kimura, Sander van Gompel, Pierre Morin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 054001 (2022)
https://doi.org/10.1116/6.0001922
Published: August 2022
View articletitled, Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films
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Journal Articles

Optical properties of Mo and amorphous MoOx, and application to antireflection coatings for metals

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David V. Tsu, Matthias Muehle, Harald Köstenbauer, Christian Linke, Jörg Winkler
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022209 (2022)
https://doi.org/10.1116/6.0001659
Published: March 2022
View articletitled, Optical properties of Mo and amorphous MoOx, and application to antireflection coatings for metals
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Journal Articles

Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks

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Tobias Gergs, Borislav Borislavov, Jan Trieschmann
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 012802 (2022)
https://doi.org/10.1116/6.0001485
Published: December 2021
View articletitled, Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks
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Journal Articles

Influences of etching chemical parameters on AlGaN/GaN electrical degradation in power devices

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Frédéric Le Roux, Nicolas Possémé, Pauline Burtin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 063201 (2021)
https://doi.org/10.1116/6.0001130
Published: October 2021
View articletitled, Influences of etching chemical parameters on AlGaN/GaN electrical degradation in power devices
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Journal Articles

Multideck light-induced reset in a transparent bilayer synaptic device

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Dan Berco, Diing S. Ang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 053202 (2021)
https://doi.org/10.1116/6.0001186
Published: August 2021
View articletitled, Multideck light-induced reset in a transparent bilayer synaptic device
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Journal Articles

Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy

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Arnoud J. Onnink, Ramazan O. Apaydin, Antonius A. I. Aarnink, Michel P. de Jong, Dirk J. Gravesteijn, Alexey Y. Kovalgin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 044009 (2020)
https://doi.org/10.1116/6.0000193
Published: July 2020
View articletitled, Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy
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Includes: Supplementary data
Journal Articles

Dielectric breakdown in epitaxial BaTiO3 thin films

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HsinWei Wu, Patrick Ponath, Edward L. Lin, Robert M. Wallace, Chadwin Young, John G. Ekerdt, Alexander A. Demkov, Martha R. McCartney, David J. Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 044007 (2020)
https://doi.org/10.1116/6.0000237
Published: July 2020
View articletitled, Dielectric breakdown in epitaxial BaTiO3 thin films
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Journal Articles

Integration of the Ni/InP system on a 300 mm platform for III-V/Si hybrid lasers

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Flore Boyer, Patrice Gergaud, Karen Dabertrand, Denis Mariolle, Christophe Jany, Fabrice Nemouchi, Magali Grégoire, Quentin Rafhay, Philippe Rodriguez
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 012209 (2020)
https://doi.org/10.1116/1.5128554
Published: January 2020
View articletitled, Integration of the Ni/InP system on a 300 mm platform for III-V/Si hybrid lasers
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Journal Articles

Inducing alternating nanoscale rectification in a dielectric material for bidirectional-trigger artificial synapses

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Dan Berco, Diing Shenp Ang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061806 (2019)
https://doi.org/10.1116/1.5123665
Published: October 2019
View articletitled, Inducing alternating nanoscale rectification in a dielectric material for bidirectional-trigger artificial synapses
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Journal Articles

Effects of oxygen on the resistivity in Au thin films with Ti-Al adhesion layer

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Chiara D. Nascimento, Everton G. Souza, Cesar Aguzzoli, Rafael L. Cruz
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 052202 (2019)
https://doi.org/10.1116/1.5119099
Published: August 2019
View articletitled, Effects of oxygen on the resistivity in Au thin films with Ti-Al adhesion layer
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Journal Articles

High-density energy storage in Si-doped hafnium oxide thin films on area-enhanced substrates

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Kati Kühnel, Malte Czernohorsky, Clemens Mart, Wenke Weinreich
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 021401 (2019)
https://doi.org/10.1116/1.5060738
Published: February 2019
View articletitled, High-density energy storage in Si-doped hafnium oxide thin films on area-enhanced substrates
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Journal Articles

Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1−xOy on InGaZnO4

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David C. Hays, Brent P. Gila, Stephen J. Pearton, Andres Trucco, Ryan Thorpe, Fan Ren
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 011206 (2017)
https://doi.org/10.1116/1.4973882
Published: January 2017
View articletitled, Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1−xOy on InGaZnO4
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Journal Articles

Bulk crystal growth and surface preparation of NiSb, MnSb, and NiMnSb

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Ian Maskery, Christopher W. Burrows, Marc Walker, Ravi P. Singh, Geetha Balakrishnan, Jon A. Duffy, Gavin R. Bell
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 041219 (2016)
https://doi.org/10.1116/1.4953549
Published: June 2016
View articletitled, Bulk crystal growth and surface preparation of NiSb, MnSb, and NiMnSb
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Journal Articles

Pulsed laser deposition of highly oriented stoichiometric thin films of topological insulator Sb2Te3

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Biswajit Saha, Pragati Chaturvedi, Anil K. Yadav, Dipankar Saha, Swaroop Ganguly
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 021806 (2016)
https://doi.org/10.1116/1.4943026
Published: March 2016
View articletitled, Pulsed laser deposition of highly oriented stoichiometric thin films of topological insulator Sb2Te3
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Journal Articles

Flux dependent Sb-incorporation during molecular beam epitaxy of InAsSb

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Wendy L. Sarney, Stefan P. Svensson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 060604 (2015)
https://doi.org/10.1116/1.4935892
Published: November 2015
View articletitled, Flux dependent Sb-incorporation during molecular beam epitaxy of InAsSb
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Journal Articles

Co-implantation of Al+, P+, and S+ with Si+ implants into In0.53Ga0.47As

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Aaron G. Lind, Henry L. Aldridge, Jr., Kevin S. Jones, Christopher Hatem
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 051217 (2015)
https://doi.org/10.1116/1.4931030
Published: September 2015
View articletitled, Co-implantation of Al+, P+, and S+ with Si+ implants into In0.53Ga0.47As
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