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Journal Articles
Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel
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J. Vac. Sci. Technol. B 43, 034203 (2025)
Published: April 2025
Journal Articles
Influence of etching profile on pattern collapse in complementary metal oxide semiconductor image sensor pixel with deep trench isolation
Available to PurchaseClément Sart, Jérôme Dubois, Emilie Prevost, Philippe Garnier, Benjamin Vianne, Frédéric Giovannoni, Caroline Bringolf-Penner, Sébastien Gallois-Garreignot
J. Vac. Sci. Technol. B 43, 033203 (2025)
Published: April 2025
Journal Articles
Controlled preparation of tungsten diselenide thin films via chemical vapor deposition
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J. Vac. Sci. Technol. B 43, 030601 (2025)
Published: April 2025
Journal Articles
Operational experiences and upgrade of China Spallation Neutron Source Linac vacuum system
Available to PurchaseShunming Liu, Yigang Wang, Pengcheng Wang, Hong Song, Yuhui Guan, Jiaming Liu, Biao Tan, Xiaoyang Sun, Bangle Zhu, Ahong Li, Weidong Chen, Huafu Ouyang, Bo Li, Xiaolei Wu, Yongjia Lv
J. Vac. Sci. Technol. B 43, 034201 (2025)
Published: March 2025
Journal Articles
Comparative research on the secondary electron yields and photon-stimulated desorption of Ti and Pd/Ti bilayer thin films
Available to PurchaseTao Guo, Xinyu Jin, Xiaopeng Xu, Xuesong Zhou, Wenjing Ma, Le Fan, Yuanzhi Hong, Xin Liu, Sihui Wang
J. Vac. Sci. Technol. B 43, 024203 (2025)
Published: March 2025
Journal Articles
Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering
J. Vac. Sci. Technol. B 43, 023203 (2025)
Published: February 2025
Journal Articles
Photoluminescence lifetime of perovskites on modified substrates
Available to PurchaseXavier Vorhies, Jessica M. Andriolo, Joseph J. Thiebes, Emma K. Orcutt, Erik M. Grumstrup, Jack L. Skinner
J. Vac. Sci. Technol. B 43, 022203 (2025)
Published: February 2025
Journal Articles
Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet
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J. Vac. Sci. Technol. B 43, 022802 (2025)
Published: January 2025
Journal Articles
Enhancement of performance and reliability in MOSFETs via high-pressure microwave annealing
Available to PurchaseGeonhyeong Kang, Hunbeom Shin, Seungyeob Kim, Lingwei Zhang, Giuk Kim, Sujeong Lee, Yunseok Nam, Chaeheon Kim, Hoon Kim, Jinho Ahn, Sanghun Jeon
J. Vac. Sci. Technol. B 43, 012206 (2025)
Published: January 2025
Journal Articles
Modeling of water outgassing from polymers incorporating surface adsorption and desorption
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J. Vac. Sci. Technol. B 43, 014201 (2025)
Published: January 2025
Journal Articles
Ultralow impact energy dynamic secondary ion mass spectrometry with nonfully oxidizing surface conditions
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J. Vac. Sci. Technol. B 42, 064005 (2024)
Published: December 2024
Journal Articles
Study of selected mild steels for application in vacuum systems of future gravitational wave detectors
Carlo Scarcia, Giuseppe Bregliozzi, Paolo Chiggiato, Alice Ingrid Michet, Ana Teresa Perez Fontenla, Martino Rimoldi, Mauro Taborelli, Ivo Wevers
J. Vac. Sci. Technol. B 42, 054202 (2024)
Published: August 2024
Journal Articles
Desorption model of volatile Ru species induced by partial chlorination on Ru(0001) under an O2/Cl2-based plasma process
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J. Vac. Sci. Technol. B 42, 042209 (2024)
Published: July 2024
Journal Articles
Emission enhancement of GaN field emitter arrays in an N2 environment
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J. Vac. Sci. Technol. B 42, 044004 (2024)
Published: July 2024
Journal Articles
X-ray photoelectron spectroscopy surface oxidation study of remote plasma-enhanced chemical vapor deposition-grown Ge1−xSnx/Si alloys
Available to PurchaseKevin Choe, Jeremy Hunter, Christopher Sutphin, Daniel Felker, Bruce Claflin, Gordon Grzybowski, Christina Dugan
J. Vac. Sci. Technol. B 42, 042207 (2024)
Published: July 2024
Journal Articles
Performance enhancement in spin transfer torque magnetic random access memory through in situ cap layer optimization
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J. Vac. Sci. Technol. B 42, 043801 (2024)
Published: June 2024
Journal Articles
Effects of graphene doping and gas adsorption on the peak positions of graphene plasmon resonance and adsorbate infrared absorption
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J. Vac. Sci. Technol. B 42, 032803 (2024)
Published: May 2024
Includes: Supplementary data
Journal Articles
Effects of high-temperature annealing on vacancy complexes and luminescence properties in multilayer periodic structures with elastically strained GeSiSn layers
Available to PurchaseVyacheslav Timofeev, Ilya Skvortsov, Vladimir Mashanov, Alexandr Nikiforov, Dmitry Kolyada, Dmitry Firsov, Oleg Komkov, Samir Samadov, Alexey Sidorin, Oleg Orlov
J. Vac. Sci. Technol. B 42, 030601 (2024)
Published: April 2024
Journal Articles
Sodium adsorption on nanometer-thick TiO2 channel thin-film transistors for enhanced drain currents
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J. Vac. Sci. Technol. B 42, 022213 (2024)
Published: March 2024
Journal Articles
Low power silicon evaporation source—Construction, performances, and applications
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J. Vac. Sci. Technol. B 42, 024003 (2024)
Published: March 2024
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