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Journal Articles

Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel

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Aiman H. Al-Allaq, Md Abdullah Mamun, Matt Poelker, Abdelmageed Elmustafa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 034203 (2025)
https://doi.org/10.1116/6.0004446
Published: April 2025
View articletitled, Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel
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Journal Articles

Influence of etching profile on pattern collapse in complementary metal oxide semiconductor image sensor pixel with deep trench isolation

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Clément Sart, Jérôme Dubois, Emilie Prevost, Philippe Garnier, Benjamin Vianne, Frédéric Giovannoni, Caroline Bringolf-Penner, Sébastien Gallois-Garreignot
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 033203 (2025)
https://doi.org/10.1116/6.0004309
Published: April 2025
View articletitled, Influence of etching profile on pattern collapse in complementary metal oxide semiconductor image sensor pixel with deep trench isolation
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Journal Articles

Controlled preparation of tungsten diselenide thin films via chemical vapor deposition

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Pingfan Ning, Xuerong Li, Feifei Lan, Xiangyu Li, Yingmin Wang, Hongjuan Cheng, Yujian Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 030601 (2025)
https://doi.org/10.1116/6.0004352
Published: April 2025
View articletitled, Controlled preparation of tungsten diselenide thin films via chemical vapor deposition
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Journal Articles

Operational experiences and upgrade of China Spallation Neutron Source Linac vacuum system

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Shunming Liu, Yigang Wang, Pengcheng Wang, Hong Song, Yuhui Guan, Jiaming Liu, Biao Tan, Xiaoyang Sun, Bangle Zhu, Ahong Li, Weidong Chen, Huafu Ouyang, Bo Li, Xiaolei Wu, Yongjia Lv
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 034201 (2025)
https://doi.org/10.1116/6.0004393
Published: March 2025
View articletitled, Operational experiences and upgrade of China Spallation Neutron Source Linac vacuum system
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Journal Articles

Comparative research on the secondary electron yields and photon-stimulated desorption of Ti and Pd/Ti bilayer thin films

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Tao Guo, Xinyu Jin, Xiaopeng Xu, Xuesong Zhou, Wenjing Ma, Le Fan, Yuanzhi Hong, Xin Liu, Sihui Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 024203 (2025)
https://doi.org/10.1116/6.0004378
Published: March 2025
View articletitled, Comparative research on the secondary electron yields and photon-stimulated desorption of Ti and Pd/Ti bilayer thin films
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Journal Articles

Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering

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Akihiro Shimizu, Kazuhiro Fukada, Shinichi Endo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023203 (2025)
https://doi.org/10.1116/6.0004239
Published: February 2025
View articletitled, Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering
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Journal Articles

Photoluminescence lifetime of perovskites on modified substrates

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Xavier Vorhies, Jessica M. Andriolo, Joseph J. Thiebes, Emma K. Orcutt, Erik M. Grumstrup, Jack L. Skinner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022203 (2025)
https://doi.org/10.1116/6.0004115
Published: February 2025
View articletitled, Photoluminescence lifetime of perovskites on modified substrates
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Journal Articles

Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet

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Catherine Joy Enrile Antipuesto, Catherine Joy M. Dela Cruz, Christian Lorenz S. Mahinay
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022802 (2025)
https://doi.org/10.1116/6.0004081
Published: January 2025
View articletitled, Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet
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Journal Articles

Enhancement of performance and reliability in MOSFETs via high-pressure microwave annealing

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Geonhyeong Kang, Hunbeom Shin, Seungyeob Kim, Lingwei Zhang, Giuk Kim, Sujeong Lee, Yunseok Nam, Chaeheon Kim, Hoon Kim, Jinho Ahn, Sanghun Jeon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 012206 (2025)
https://doi.org/10.1116/6.0004086
Published: January 2025
View articletitled, Enhancement of performance and reliability in MOSFETs via high-pressure microwave annealing
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Journal Articles

Modeling of water outgassing from polymers incorporating surface adsorption and desorption

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Wenbing Wang, Hailin Bi, Yuhao Cui, Junru Zhang, Xudi Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 014201 (2025)
https://doi.org/10.1116/6.0004175
Published: January 2025
View articletitled, Modeling of water outgassing from polymers incorporating surface adsorption and desorption
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Journal Articles

Ultralow impact energy dynamic secondary ion mass spectrometry with nonfully oxidizing surface conditions

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A. Merkulov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 064005 (2024)
https://doi.org/10.1116/6.0004064
Published: December 2024
View articletitled, Ultralow impact energy dynamic secondary ion mass spectrometry with nonfully oxidizing surface conditions
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Journal Articles

Study of selected mild steels for application in vacuum systems of future gravitational wave detectors

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Carlo Scarcia, Giuseppe Bregliozzi, Paolo Chiggiato, Alice Ingrid Michet, Ana Teresa Perez Fontenla, Martino Rimoldi, Mauro Taborelli, Ivo Wevers
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 054202 (2024)
https://doi.org/10.1116/6.0003820
Published: August 2024
View articletitled, Study of selected mild steels for application in vacuum systems of future gravitational wave detectors
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Journal Articles

Desorption model of volatile Ru species induced by partial chlorination on Ru(0001) under an O2/Cl2-based plasma process

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Masaya Imai, Miyako Matsui, Ryoko Sugano, Yohei Ishii, Makoto Miura, Kenichi Kuwahara
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042209 (2024)
https://doi.org/10.1116/6.0003706
Published: July 2024
View articletitled, Desorption model of volatile Ru species induced by partial chlorination on Ru(0001) under an O2/Cl2-based plasma process
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Journal Articles

Emission enhancement of GaN field emitter arrays in an N2 environment

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Reza Farsad Asadi, Tao Zheng, Pao-Chuan Shih, Tomás Palacios, Akintunde I. Akinwande, Bruce Gnade
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 044004 (2024)
https://doi.org/10.1116/6.0003704
Published: July 2024
View articletitled, Emission enhancement of GaN field emitter arrays in an N2 environment
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Journal Articles

X-ray photoelectron spectroscopy surface oxidation study of remote plasma-enhanced chemical vapor deposition-grown Ge1−xSnx/Si alloys

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Kevin Choe, Jeremy Hunter, Christopher Sutphin, Daniel Felker, Bruce Claflin, Gordon Grzybowski, Christina Dugan
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042207 (2024)
https://doi.org/10.1116/6.0003688
Published: July 2024
View articletitled, X-ray photoelectron spectroscopy surface oxidation study of remote plasma-enhanced chemical vapor deposition-grown Ge1−xSnx/Si alloys
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Journal Articles

Performance enhancement in spin transfer torque magnetic random access memory through in situ cap layer optimization

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Zhenghui Ji, Yongzhao Peng, Guoxiu Qiu, Guchang Han, Qijun Guo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 043801 (2024)
https://doi.org/10.1116/6.0003661
Published: June 2024
View articletitled, Performance enhancement in spin transfer torque magnetic random access memory through in situ cap layer optimization
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Journal Articles

Effects of graphene doping and gas adsorption on the peak positions of graphene plasmon resonance and adsorbate infrared absorption

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Jongpil Ye
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032803 (2024)
https://doi.org/10.1116/6.0003588
Published: May 2024
View articletitled, Effects of graphene doping and gas adsorption on the peak positions of graphene plasmon resonance and adsorbate infrared absorption
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Includes: Supplementary data
Journal Articles

Effects of high-temperature annealing on vacancy complexes and luminescence properties in multilayer periodic structures with elastically strained GeSiSn layers

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Vyacheslav Timofeev, Ilya Skvortsov, Vladimir Mashanov, Alexandr Nikiforov, Dmitry Kolyada, Dmitry Firsov, Oleg Komkov, Samir Samadov, Alexey Sidorin, Oleg Orlov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 030601 (2024)
https://doi.org/10.1116/6.0003557
Published: April 2024
View articletitled, Effects of high-temperature annealing on vacancy complexes and luminescence properties in multilayer periodic structures with elastically strained GeSiSn layers
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Journal Articles

Sodium adsorption on nanometer-thick TiO2 channel thin-film transistors for enhanced drain currents

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Ryo Miyazawa, Haruto Suzuki, Hibiki Takeda, Masanori Miura, Bashir Ahmmad, Fumihiko Hirose
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022213 (2024)
https://doi.org/10.1116/6.0003217
Published: March 2024
View articletitled, Sodium adsorption on nanometer-thick TiO2 channel thin-film transistors for enhanced drain currents
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Journal Articles

Low power silicon evaporation source—Construction, performances, and applications

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S. Kovalchuk, M. Nowicki, I. Morawski
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 024003 (2024)
https://doi.org/10.1116/6.0003284
Published: March 2024
View articletitled, Low power silicon evaporation source—Construction, performances, and applications
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