1-20 of 104
Polymer chemistry
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness

Naoki Takano, Hiromasa Niinomi, Tomoya Oshikiri, Masaru Nakagawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042603 (2024)
https://doi.org/10.1116/6.0003779
Published: July 2024
View article titled, Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness
Open the PDF for Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness in another window
Journal Articles

Atmospheric pressure plasma treatment of chitosan-acrylic acid blends

Kathrina Lois M. Taaca, Eloise I. Prieto, Magdaleno R. Vasquez, Jr.
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 034001 (2023)
https://doi.org/10.1116/6.0002335
Published: April 2023
View article titled, Atmospheric pressure plasma treatment of chitosan-acrylic acid blends
Open the PDF for Atmospheric pressure plasma treatment of chitosan-acrylic acid blends in another window
Journal Articles

Effective polymerization technique for plasma-treated multiwalled carbon nanotubes to maximize wear resistance of composite polyurethane

Daisuke Ogawa, Seira Morimune-Moriya, Keiji Nakamura
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022803 (2022)
https://doi.org/10.1116/6.0001390
Published: February 2022
View article titled, Effective polymerization technique for plasma-treated multiwalled carbon nanotubes to maximize wear resistance of composite polyurethane
Open the PDF for Effective polymerization technique for plasma-treated multiwalled carbon nanotubes to maximize wear resistance of composite polyurethane in another window
Journal Articles

Direct imprinting of TiO2 patterns on highly curved substrates

Scilight
Ming Luo, Xin Hu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062604 (2020)
https://doi.org/10.1116/6.0000554
Published: October 2020
View article titled, Direct imprinting of TiO<sub>2</sub> patterns on highly curved substrates
Open the PDF for Direct imprinting of TiO<sub>2</sub> patterns on highly curved substrates in another window
Includes: Supplementary data
Journal Articles

Synthesis and self-assembly of high-χ poly(4-tertbutylstyrene)-block-poly(2-hydroxyethylmethacrylate)

Caleb L. Breaux, Brandon L. Sharp, Peter J. Ludovice, Clifford L. Henderson, Haibo Li, Bing Li, Mark Neisser
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 011603 (2019)
https://doi.org/10.1116/1.5056256
Published: January 2019
View article titled, Synthesis and self-assembly of high-χ poly(4-tertbutylstyrene)-block-poly(2-hydroxyethylmethacrylate)
Open the PDF for Synthesis and self-assembly of high-χ poly(4-tertbutylstyrene)-block-poly(2-hydroxyethylmethacrylate) in another window
Journal Articles

Ultraviolet transmittance of SU-8 photoresist and its importance in multi-wavelength photolithography

Vijay V. Parsi Sreenivas, Andreas Winkler, Stefan Harazim, Oliver G. Schmidt
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 051601 (2018)
https://doi.org/10.1116/1.5033996
Published: August 2018
View article titled, Ultraviolet transmittance of SU-8 photoresist and its importance in multi-wavelength photolithography
Open the PDF for Ultraviolet transmittance of SU-8 photoresist and its importance in multi-wavelength photolithography in another window
Journal Articles

Innovative metallic solutions for alpine ski bases

Francesco Ripamonti, Valentina Furlan, Ali G. Demir, Barbara Previtali, Michele Derai, Federico Cheli, Paolo M. Ossi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 01A108 (2018)
https://doi.org/10.1116/1.5002542
Published: January 2018
View article titled, Innovative metallic solutions for alpine ski bases
Open the PDF for Innovative metallic solutions for alpine ski bases in another window
Journal Articles

Extreme-low k porous pSiCOH dielectrics prepared by PECVD

Han You, Petra Mennell, Matthew Shoudy, Devika Sil, Donald Dorman, Stephan Cohen, Eric Liniger, Thomas Shaw, Tsong-Lin Leo, Donald Canaperi, Mark Raymond, Anita Madan, Alfred Grill
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 012202 (2018)
https://doi.org/10.1116/1.5007177
Published: December 2017
View article titled, Extreme-low k porous pSiCOH dielectrics prepared by PECVD
Open the PDF for Extreme-low k porous pSiCOH dielectrics prepared by PECVD in another window
Journal Articles

3D-printed microfluidics on thin poly(methyl methacrylate) substrates for genetic applications

Valentina Bertana, Cristina Potrich, Giorgio Scordo, Luciano Scaltrito, Sergio Ferrero, Andrea Lamberti, Francesco Perrucci, Candido Fabrizio Pirri, Cecilia Pederzolli, Matteo Cocuzza, Simone Luigi Marasso
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 01A106 (2018)
https://doi.org/10.1116/1.5003203
Published: December 2017
View article titled, 3D-printed microfluidics on thin poly(methyl methacrylate) substrates for genetic applications
Open the PDF for 3D-printed microfluidics on thin poly(methyl methacrylate) substrates for genetic applications in another window
Includes: Supplementary data
Journal Articles

Positive-tone crosslinked molecular resist based on acid-catalyzed depolymerization

Brandon L. Sharp, Hannah L. Narcross, Laren M. Tolbert, Clifford L. Henderson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06GE03 (2017)
https://doi.org/10.1116/1.4991904
Published: November 2017
View article titled, Positive-tone crosslinked molecular resist based on acid-catalyzed depolymerization
Open the PDF for Positive-tone crosslinked molecular resist based on acid-catalyzed depolymerization in another window
Includes: Supplementary data
Journal Articles

Lithographic performance of ZEP520A and mr-PosEBR resists exposed by electron beam and extreme ultraviolet lithography

Roberto Fallica, Dimitrios Kazazis, Robert Kirchner, Anja Voigt, Iacopo Mochi, Helmut Schift, Yasin Ekinci
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 061603 (2017)
https://doi.org/10.1116/1.5003476
Published: November 2017
View article titled, Lithographic performance of ZEP520A and mr-PosEBR resists exposed by electron beam and extreme ultraviolet lithography
Open the PDF for Lithographic performance of ZEP520A and mr-PosEBR resists exposed by electron beam and extreme ultraviolet lithography in another window
Journal Articles

Stochastic simulation of the UV curing process in nanoimprint lithography: Pattern size and shape effects in sub-50 nm lithography

Masanori Koyama, Masamitsu Shirai, Hiroaki Kawata, Yoshihiko Hirai, Masaaki Yasuda
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G307 (2017)
https://doi.org/10.1116/1.4997295
Published: November 2017
View article titled, Stochastic simulation of the UV curing process in nanoimprint lithography: Pattern size and shape effects in sub-50 nm lithography
Open the PDF for Stochastic simulation of the UV curing process in nanoimprint lithography: Pattern size and shape effects in sub-50 nm lithography in another window
Journal Articles

Crosslinkable photoacid generators for ultrahigh loading in epoxide functionalized molecular resists

Hannah Narcross, Brandon L. Sharp, Laren M. Tolbert, Clifford L. Henderson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06GE02 (2017)
https://doi.org/10.1116/1.4991894
Published: November 2017
View article titled, Crosslinkable photoacid generators for ultrahigh loading in epoxide functionalized molecular resists
Open the PDF for Crosslinkable photoacid generators for ultrahigh loading in epoxide functionalized molecular resists in another window
Journal Articles

Impact of preparation conditions on the properties of materials for replica stamps

Marc Papenheim, Wolfgang Eidemüller, Christian Steinberg, Andre Mayer, Hella-Christin Scheer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G305 (2017)
https://doi.org/10.1116/1.4991868
Published: October 2017
View article titled, Impact of preparation conditions on the properties of materials for replica stamps
Open the PDF for Impact of preparation conditions on the properties of materials for replica stamps in another window
Journal Articles

Bio-inspired nanostructures for enhanced light management

Editor’s Pick
Honglei Wang, Yuchen Liang, Samantha Cheng, Benjamin Li, Andrew Li, George Du, Walter Hu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06GJ02 (2017)
https://doi.org/10.1116/1.4995472
Published: October 2017
View article titled, Bio-inspired nanostructures for enhanced light management
Open the PDF for Bio-inspired nanostructures for enhanced light management in another window
Journal Articles

Block copolymer directed self-assembly using chemoepitaxial guiding underlayers with topography

Benjamin D. Nation, Peter J. Ludovice, Clifford L. Henderson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06GI01 (2017)
https://doi.org/10.1116/1.4991895
Published: September 2017
View article titled, Block copolymer directed self-assembly using chemoepitaxial guiding underlayers with topography
Open the PDF for Block copolymer directed self-assembly using chemoepitaxial guiding underlayers with topography in another window
Journal Articles

Gold microelectrodes fabricated by a print-and-imprint method using laser-drilled polyimide through-hole masks

Takahiro Nakamura, Kento Seki, Kazuro Nagase, Masaru Nakagawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G301 (2017)
https://doi.org/10.1116/1.4991629
Published: September 2017
View article titled, Gold microelectrodes fabricated by a print-and-imprint method using laser-drilled polyimide through-hole masks
Open the PDF for Gold microelectrodes fabricated by a print-and-imprint method using laser-drilled polyimide through-hole masks in another window
Journal Articles

Chemical copatterning strategies using azlactone-based block copolymers

Mohammadali Masigol, Niloy Barua, Scott T. Retterer, Bradley S. Lokitz, Ryan R. Hansen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06GJ01 (2017)
https://doi.org/10.1116/1.4991881
Published: September 2017
View article titled, Chemical copatterning strategies using azlactone-based block copolymers
Open the PDF for Chemical copatterning strategies using azlactone-based block copolymers in another window
Journal Articles

High quality semicontinuous deep reactive ion etching of silicon for the creation of x-ray lenses

Karola Richter, André Mocker, Johann-Wolfgang Bartha
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 031206 (2017)
https://doi.org/10.1116/1.4982712
Published: May 2017
View article titled, High quality semicontinuous deep reactive ion etching of silicon for the creation of x-ray lenses
Open the PDF for High quality semicontinuous deep reactive ion etching of silicon for the creation of x-ray lenses in another window
Journal Articles

Pore surface grafting of porous low-k dielectrics by selective polymers

Askar Rezvanov, Liping Zhang, Mitsuhiro Watanabe, Mikhail B. Krishtab, Lin Zhang, Nigel Hacker, Patrick Verdonck, Silvia Armini, Jean-François G. N. G. de Marneffe
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 021211 (2017)
https://doi.org/10.1116/1.4978046
Published: March 2017
View article titled, Pore surface grafting of porous low-k dielectrics by selective polymers
Open the PDF for Pore surface grafting of porous low-k dielectrics by selective polymers in another window