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Journal Articles

Improved abrasion resistance of silica-based CVD thin films on polycarbonate substrates for automotive applications

Sae Tanaka, Hayate Endo, Akira Shirakura, Shinya Kudo, Tetsuya Suzuki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 040602 (2021)
https://doi.org/10.1116/6.0001040
Published: June 2021
View article titled, Improved abrasion resistance of silica-based CVD thin films on polycarbonate substrates for automotive applications
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Journal Articles

Determination of border/bulk traps parameters based on (C-G-V) admittance measurements

Andrzej Mazurak, Jakub Jasin´ski, Bogdan Majkusiak
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 032904 (2019)
https://doi.org/10.1116/1.5060674
Published: May 2019
View article titled, Determination of border/bulk traps parameters based on (<em>C</em>-<em>G</em>-<em>V</em>) admittance measurements
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Includes: Supplementary data
Journal Articles

Dependence of dielectric constant of hydrocarbon bridged low-k films on porosity

Alexander P. Palov, Mikhail R. Baklanov, Shuhua Wei
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 010601 (2019)
https://doi.org/10.1116/1.5082781
Published: January 2019
View article titled, Dependence of dielectric constant of hydrocarbon bridged low-k films on porosity
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Journal Articles

Etching of glass, silicon, and silicon dioxide using negative ionic liquid ion sources

Tiantong Xu, Zhi Tao, Paulo C. Lozano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 052601 (2018)
https://doi.org/10.1116/1.5034131
Published: September 2018
View article titled, Etching of glass, silicon, and silicon dioxide using negative ionic liquid ion sources
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Journal Articles

Synchrotron radiation study of metallic titanium deposited on dielectric substrates

Justin Bogan, Venkateswaran Selvaraju, Anita Brady-Boyd, Greg Hughes, Robert O'Connor
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 040602 (2018)
https://doi.org/10.1116/1.5036943
Published: June 2018
View article titled, Synchrotron radiation study of metallic titanium deposited on dielectric substrates
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Journal Articles

Time multiplexed deep reactive ion etching of germanium and silicon—A comparison of mechanisms and application to x-ray optics

Vincent J. Genova, David N. Agyeman-Budu, Arthur R. Woll
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 011205 (2018)
https://doi.org/10.1116/1.4991875
Published: January 2018
View article titled, Time multiplexed deep reactive ion etching of germanium and silicon—A comparison of mechanisms and application to x-ray optics
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Journal Articles

ScAlN etch mask for highly selective silicon etching

Michael David Henry, Travis R. Young, Ben Griffin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 052001 (2017)
https://doi.org/10.1116/1.4994841
Published: September 2017
View article titled, ScAlN etch mask for highly selective silicon etching
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Journal Articles

Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching

Pragya Tiwari, Puspen Mondal, A. K. Srivastava, Himanshu Srivastava, Rajnish Dhawan, Sanjay Rai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 051602 (2017)
https://doi.org/10.1116/1.4999933
Published: August 2017
View article titled, Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching
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Journal Articles

Optimized process for fabrication of free-standing silicon nanophotonic devices

Paul Seidler
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 031209 (2017)
https://doi.org/10.1116/1.4983173
Published: May 2017
View article titled, Optimized process for fabrication of free-standing silicon nanophotonic devices
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Journal Articles

Current conduction mechanisms through thin tunnel oxide during erase operation of flash electrically erasable programmable read-only memory devices

Piyas Samanta
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 032202 (2017)
https://doi.org/10.1116/1.4981134
Published: April 2017
View article titled, Current conduction mechanisms through thin tunnel oxide during erase operation of flash electrically erasable programmable read-only memory devices
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Journal Articles

Development of transparent microwell arrays for optical monitoring and dissection of microbial communities

Michelle Halsted, Jared L. Wilmoth, Paige A. Briggs, Ryan R. Hansen, Dayrl P. Briggs, Andrea C. Timm, Scott T. Retterer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06KI03 (2016)
https://doi.org/10.1116/1.4962739
Published: September 2016
View article titled, Development of transparent microwell arrays for optical monitoring and dissection of microbial communities
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Journal Articles

Tilted ion implantation as a cost-efficient sublithographic patterning technique

Sang Wan Kim, Peng Zheng, Kimihiko Kato, Leonard Rubin, Tsu-Jae King Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 040608 (2016)
https://doi.org/10.1116/1.4953085
Published: June 2016
View article titled, Tilted ion implantation as a cost-efficient sublithographic patterning technique
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Journal Articles

Fabrication of nanoporous membranes for tuning microbial interactions and biochemical reactions

Peter G. Shankles, Andrea C. Timm, Mitchel J. Doktycz, Scott T. Retterer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 06FM03 (2015)
https://doi.org/10.1116/1.4932671
Published: October 2015
View article titled, Fabrication of nanoporous membranes for tuning microbial interactions and biochemical reactions
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Journal Articles

Nanofluidic interfaces in microfluidic networks

Larry J. Millet, Mitchel J. Doktycz, Scott T. Retterer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 06FM01 (2015)
https://doi.org/10.1116/1.4931590
Published: September 2015
View article titled, Nanofluidic interfaces in microfluidic networks
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Journal Articles

Fabrication of long-range surface plasmon hydrogen sensors on Cytop membranes integrating grating couplers

Norman R. Fong, Pierre Berini, Niall Tait
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 021201 (2015)
https://doi.org/10.1116/1.4906827
Published: January 2015
View article titled, Fabrication of long-range surface plasmon hydrogen sensors on Cytop membranes integrating grating couplers
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Journal Articles

Silicon photodetectors integrated with vertical silicon nitride waveguides as image sensor pixels: Fabrication and characterization

Turgut Tut, Yaping Dan, Peter Duane, Winnie N. Ye, Fatih Degirmenci, Young Yu, Munib Wober, Kenneth B. Crozier
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 031201 (2014)
https://doi.org/10.1116/1.4868627
Published: March 2014
View article titled, Silicon photodetectors integrated with vertical silicon nitride waveguides as image sensor pixels: Fabrication and characterization
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Journal Articles

Nickel nanoparticle size and density effects on non-volatile memory performance

Emanuele Verrelli, Giorgos Galanopoulos, Ilias Zouboulis, Dimitris Tsoukalas
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 032204 (2013)
https://doi.org/10.1116/1.4804407
Published: May 2013
View article titled, Nickel nanoparticle size and density effects on non-volatile memory performance
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Journal Articles

Nanoscale optical critical dimension measurement of a contact hole using deep ultraviolet spectroscopic ellipsometry

Houssam Chouaib, Qiang Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 011803 (2013)
https://doi.org/10.1116/1.4771969
Published: December 2012
View article titled, Nanoscale optical critical dimension measurement of a contact hole using deep ultraviolet spectroscopic ellipsometry
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Journal Articles

Optimization of a self-closing effect to produce nanochannels with top slits in fused silica

Mariusz Graczyk, Martina Balaz, Anders Kvennefors, Heiner Linke, Ivan Maximov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06FF09 (2012)
https://doi.org/10.1116/1.4766317
Published: November 2012
View article titled, Optimization of a self-closing effect to produce nanochannels with top slits in fused silica
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Journal Articles

Study of silica nano-pattern erosion in H2SO4-H2O2 mixture using spectroscopic ellipsometry

Zhaoning Yu, Nobuo Kurataka, Hieu Tran, Gene Gauzner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 041807 (2012)
https://doi.org/10.1116/1.4732121
Published: June 2012
View article titled, Study of silica nano-pattern erosion in H<sub>2</sub>SO<sub>4</sub>-H<sub>2</sub>O<sub>2</sub> mixture using spectroscopic ellipsometry
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