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Journal Articles

Improved abrasion resistance of silica-based CVD thin films on polycarbonate substrates for automotive applications

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Sae Tanaka, Hayate Endo, Akira Shirakura, Shinya Kudo, Tetsuya Suzuki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 040602 (2021)
https://doi.org/10.1116/6.0001040
Published: June 2021
View article titled, Improved abrasion resistance of silica-based CVD thin films on polycarbonate substrates for automotive applications
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Journal Articles

Determination of border/bulk traps parameters based on (C-G-V) admittance measurements

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Andrzej Mazurak, Jakub Jasin´ski, Bogdan Majkusiak
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 032904 (2019)
https://doi.org/10.1116/1.5060674
Published: May 2019
View article titled, Determination of border/bulk traps parameters based on (C-G-V) admittance measurements
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Includes: Supplementary data
Journal Articles

Dependence of dielectric constant of hydrocarbon bridged low-k films on porosity

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Alexander P. Palov, Mikhail R. Baklanov, Shuhua Wei
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 010601 (2019)
https://doi.org/10.1116/1.5082781
Published: January 2019
View article titled, Dependence of dielectric constant of hydrocarbon bridged low-k films on porosity
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Journal Articles

Etching of glass, silicon, and silicon dioxide using negative ionic liquid ion sources

Open Access
Tiantong Xu, Zhi Tao, Paulo C. Lozano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 052601 (2018)
https://doi.org/10.1116/1.5034131
Published: September 2018
View article titled, Etching of glass, silicon, and silicon dioxide using negative ionic liquid ion sources
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Journal Articles

Synchrotron radiation study of metallic titanium deposited on dielectric substrates

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Justin Bogan, Venkateswaran Selvaraju, Anita Brady-Boyd, Greg Hughes, Robert O'Connor
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 040602 (2018)
https://doi.org/10.1116/1.5036943
Published: June 2018
View article titled, Synchrotron radiation study of metallic titanium deposited on dielectric substrates
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Journal Articles

Time multiplexed deep reactive ion etching of germanium and silicon—A comparison of mechanisms and application to x-ray optics

Free
Vincent J. Genova, David N. Agyeman-Budu, Arthur R. Woll
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 011205 (2018)
https://doi.org/10.1116/1.4991875
Published: January 2018
View article titled, Time multiplexed deep reactive ion etching of germanium and silicon—A comparison of mechanisms and application to x-ray optics
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Journal Articles

ScAlN etch mask for highly selective silicon etching

Free
Michael David Henry, Travis R. Young, Ben Griffin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 052001 (2017)
https://doi.org/10.1116/1.4994841
Published: September 2017
View article titled, ScAlN etch mask for highly selective silicon etching
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Journal Articles

Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching

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Pragya Tiwari, Puspen Mondal, A. K. Srivastava, Himanshu Srivastava, Rajnish Dhawan, Sanjay Rai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 051602 (2017)
https://doi.org/10.1116/1.4999933
Published: August 2017
View article titled, Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching
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Journal Articles

Optimized process for fabrication of free-standing silicon nanophotonic devices

Open Access
Paul Seidler
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 031209 (2017)
https://doi.org/10.1116/1.4983173
Published: May 2017
View article titled, Optimized process for fabrication of free-standing silicon nanophotonic devices
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Journal Articles

Current conduction mechanisms through thin tunnel oxide during erase operation of flash electrically erasable programmable read-only memory devices

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Piyas Samanta
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 032202 (2017)
https://doi.org/10.1116/1.4981134
Published: April 2017
View article titled, Current conduction mechanisms through thin tunnel oxide during erase operation of flash electrically erasable programmable read-only memory devices
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Journal Articles

Development of transparent microwell arrays for optical monitoring and dissection of microbial communities

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Michelle Halsted, Jared L. Wilmoth, Paige A. Briggs, Ryan R. Hansen, Dayrl P. Briggs, Andrea C. Timm, Scott T. Retterer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06KI03 (2016)
https://doi.org/10.1116/1.4962739
Published: September 2016
View article titled, Development of transparent microwell arrays for optical monitoring and dissection of microbial communities
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Journal Articles

Tilted ion implantation as a cost-efficient sublithographic patterning technique

Free
Sang Wan Kim, Peng Zheng, Kimihiko Kato, Leonard Rubin, Tsu-Jae King Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 040608 (2016)
https://doi.org/10.1116/1.4953085
Published: June 2016
View article titled, Tilted ion implantation as a cost-efficient sublithographic patterning technique
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Journal Articles

Fabrication of nanoporous membranes for tuning microbial interactions and biochemical reactions

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Peter G. Shankles, Andrea C. Timm, Mitchel J. Doktycz, Scott T. Retterer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 06FM03 (2015)
https://doi.org/10.1116/1.4932671
Published: October 2015
View article titled, Fabrication of nanoporous membranes for tuning microbial interactions and biochemical reactions
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Journal Articles

Nanofluidic interfaces in microfluidic networks

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Larry J. Millet, Mitchel J. Doktycz, Scott T. Retterer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 06FM01 (2015)
https://doi.org/10.1116/1.4931590
Published: September 2015
View article titled, Nanofluidic interfaces in microfluidic networks
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Journal Articles

Fabrication of long-range surface plasmon hydrogen sensors on Cytop membranes integrating grating couplers

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Norman R. Fong, Pierre Berini, Niall Tait
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 021201 (2015)
https://doi.org/10.1116/1.4906827
Published: January 2015
View article titled, Fabrication of long-range surface plasmon hydrogen sensors on Cytop membranes integrating grating couplers
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Journal Articles

Silicon photodetectors integrated with vertical silicon nitride waveguides as image sensor pixels: Fabrication and characterization

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Turgut Tut, Yaping Dan, Peter Duane, Winnie N. Ye, Fatih Degirmenci, Young Yu, Munib Wober, Kenneth B. Crozier
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 031201 (2014)
https://doi.org/10.1116/1.4868627
Published: March 2014
View article titled, Silicon photodetectors integrated with vertical silicon nitride waveguides as image sensor pixels: Fabrication and characterization
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Journal Articles

Nickel nanoparticle size and density effects on non-volatile memory performance

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Emanuele Verrelli, Giorgos Galanopoulos, Ilias Zouboulis, Dimitris Tsoukalas
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 032204 (2013)
https://doi.org/10.1116/1.4804407
Published: May 2013
View article titled, Nickel nanoparticle size and density effects on non-volatile memory performance
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Journal Articles

Nanoscale optical critical dimension measurement of a contact hole using deep ultraviolet spectroscopic ellipsometry

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Houssam Chouaib, Qiang Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 011803 (2013)
https://doi.org/10.1116/1.4771969
Published: December 2012
View article titled, Nanoscale optical critical dimension measurement of a contact hole using deep ultraviolet spectroscopic ellipsometry
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Journal Articles

Optimization of a self-closing effect to produce nanochannels with top slits in fused silica

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Mariusz Graczyk, Martina Balaz, Anders Kvennefors, Heiner Linke, Ivan Maximov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06FF09 (2012)
https://doi.org/10.1116/1.4766317
Published: November 2012
View article titled, Optimization of a self-closing effect to produce nanochannels with top slits in fused silica
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Journal Articles

Study of silica nano-pattern erosion in H2SO4-H2O2 mixture using spectroscopic ellipsometry

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Zhaoning Yu, Nobuo Kurataka, Hieu Tran, Gene Gauzner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 041807 (2012)
https://doi.org/10.1116/1.4732121
Published: June 2012
View article titled, Study of silica nano-pattern erosion in H2SO4-H2O2 mixture using spectroscopic ellipsometry
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