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Journal Articles
Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness
Available to Purchase
J. Vac. Sci. Technol. B 42, 042603 (2024)
Published: July 2024
Journal Articles
Growth of CdS heterojunctions on Cd0.9Zn0.1Te single crystals with H2S
Available to Purchase
J. Vac. Sci. Technol. B 42, 012206 (2024)
Published: January 2024
Journal Articles
Low trap density of oxygen-rich HfO2/GaN interface for GaN MIS-HEMT applications
Available to PurchaseWei-Chih Cheng, Jiaqi He, Minghao He, Zepeng Qiao, Yang Jiang, Fangzhou Du, Xiang Wang, Haimin Hong, Qing Wang, Hongyu Yu
J. Vac. Sci. Technol. B 40, 022212 (2022)
Published: March 2022
Journal Articles
Double replication for characterizing cracks in surface-hardened polydimethylsiloxane
Available to Purchase
J. Vac. Sci. Technol. B 37, 061805 (2019)
Published: October 2019
Journal Articles
Study of the electrical and chemical properties of the multistep deposited and two-step (ultraviolet ozone cum rapid thermal) annealed HfO2 gate stack
Available to Purchase
J. Vac. Sci. Technol. B 34, 011205 (2016)
Published: December 2015
Journal Articles
Fabrication and electrical performance of through silicon via interconnects filled with a copper/carbon nanotube composite
Available to Purchase
J. Vac. Sci. Technol. B 33, 022004 (2015)
Published: February 2015
Journal Articles
Guided wrinkling with nanoimprinted SU-8 surfaces
Available to PurchaseChristian Steinberg, Daniel Blenskens, Khalid Dhima, Si Wang, Marc Papenheim, Hella-Christin Scheer, Joachim Zajadacz, Klaus Zimmer
J. Vac. Sci. Technol. B 32, 06FG05 (2014)
Published: October 2014
Journal Articles
Phase control of HfO2-based dielectric films for higher-k materials
Available to Purchase
J. Vac. Sci. Technol. B 32, 03D109 (2014)
Published: January 2014
Journal Articles
Ozone priming of patterned carbon nanotube forests for subsequent atomic layer deposition-like deposition of SiO2 for the preparation of microfabricated thin layer chromatography plates
Available to PurchaseDavid S. Jensen, Supriya S. Kanyal, Nitesh Madaan, Andrew J. Miles, Robert C. Davis, Richard Vanfleet, Michael A. Vail, Andrew E. Dadson, Matthew R. Linford
J. Vac. Sci. Technol. B 31, 031803 (2013)
Published: May 2013
Includes: Supplementary data
Journal Articles
Detailed leakage current analysis of metal–insulator–metal capacitors with ZrO2, ZrO2/SiO2/ZrO2, and ZrO2/Al2O3/ZrO2 as dielectric and TiN electrodes
Available to PurchaseWenke Weinreich, Ahmed Shariq, Konrad Seidel, Jonas Sundqvist, Albena Paskaleva, Martin Lemberger, Anton J. Bauer
J. Vac. Sci. Technol. B 31, 01A109 (2013)
Published: December 2012
Journal Articles
Comparison of CuPc-based organic thin-film transistors made by different dielectric structures
Available to Purchase
J. Vac. Sci. Technol. B 31, 012201 (2013)
Published: December 2012
Journal Articles
Investigation of nonreactive fluoroalkyl-containing surfactants for reducing release energy of ultraviolet-cured acrylate resins
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J. Vac. Sci. Technol. B 30, 06FB10 (2012)
Published: November 2012
Journal Articles
Carbon contamination and oxidation of Au surfaces under extreme ultraviolet radiation: An x-ray photoelectron spectroscopy study
Available to Purchase
J. Vac. Sci. Technol. B 30, 041603 (2012)
Published: July 2012
Journal Articles
Effects of semiconductor processing chemicals on conductivity of graphene
Available to PurchaseChung Wei Chen, F. Ren, Gou-Chung Chi, S. C. Hung, Y. P. Huang, Jihyun Kim, Ivan Kravchenko, Stephen J. Pearton
J. Vac. Sci. Technol. B 30, 040602 (2012)
Published: July 2012
Journal Articles
Morphology of inkjet printed 6,13 bis(tri-isopropylsilylethynyl) pentacene on surface-treated silica
Available to Purchase
J. Vac. Sci. Technol. B 30, 021206 (2012)
Published: March 2012
Journal Articles
Impact of exposure doses on demolding process in UV nanoimprint lithography
Available to Purchase
J. Vac. Sci. Technol. B 28, 1239–1241 (2010)
Published: November 2010
Journal Articles
UV ozone passivation of the metal/dielectric interface for HfO 2 -based organic thin film transistors
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J. Vac. Sci. Technol. B 28, 1100–1103 (2010)
Published: October 2010
Journal Articles
Degradation behavior of release layers for nanoimprint lithography formed on atomically flat Si(111) terraces
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J. Vac. Sci. Technol. B 28, 968–972 (2010)
Published: September 2010
Journal Articles
Resist residues and transistor gate fabrication
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J. Vac. Sci. Technol. B 27, 2597–2601 (2009)
Published: December 2009
Journal Articles
Behavior of zirconium oxide films processed from novel monocyclopentadienyl precursors by atomic layer deposition
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J. Vac. Sci. Technol. B 27, 226–229 (2009)
Published: February 2009
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