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Journal Articles
C. Spampinato, S. Valastro, E. Smecca, V. Arena, G. Mannino, A. La Magna, C. Corsaro, F. Neri, E. Fazio, A. Alberti
J. Vac. Sci. Technol. B 41, 012802 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. B 41, 012203 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. B 40, 062210 (2022)
Published: November 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. B 40, 060601 (2022)
Published: October 2022
Journal Articles
Fabrication of black GaAs by maskless inductively coupled plasma etching in Cl2/BCl3/O2/Ar chemistry
J. Vac. Sci. Technol. B 40, 022205 (2022)
Published: February 2022
Journal Articles
J. Vac. Sci. Technol. B 39, 054203 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. B 39, 052203 (2021)
Published: August 2021
Journal Articles
J. Vac. Sci. Technol. B 39, 042203 (2021)
Published: July 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. B 39, 032202 (2021)
Published: April 2021
Journal Articles
J. Vac. Sci. Technol. B 39, 012401 (2021)
Published: December 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. B 38, 062803 (2020)
Published: November 2020
Journal Articles
J. Vac. Sci. Technol. B 38, 063203 (2020)
Published: October 2020
Journal Articles
Stefania Vitale, Baptiste Laramée-Milette, Andrea Valenti, Maria Emanuela Amato, Garry S. Hanan, Nunzio Tuccitto, Antonino Licciardello
J. Vac. Sci. Technol. B 38, 032802 (2020)
Published: April 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. B 38, 030802 (2020)
Published: April 2020
Journal Articles
J. Vac. Sci. Technol. B 38, 032201 (2020)
Published: March 2020
Journal Articles
J. Vac. Sci. Technol. B 38, 020602 (2020)
Published: February 2020
Journal Articles
J. Vac. Sci. Technol. B 38, 014013 (2020)
Published: December 2019
Journal Articles
J. Vac. Sci. Technol. B 37, 062402 (2019)
Published: November 2019
Journal Articles
Daniel Franta, Jiří Vohánka, Martin Bránecký, Pavel Franta, Martin Čermák, Ivan Ohlídal, Vladimír Čech
J. Vac. Sci. Technol. B 37, 062907 (2019)
Published: October 2019
Journal Articles
Soumia Nemmour, Siham Djoumi, Fatiha Kail, Pere Roura-Grabulosa, Pere Roca i Cabarrocas, Larbi Chahed
J. Vac. Sci. Technol. B 37, 031218 (2019)
Published: May 2019
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