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Journal Articles
Optimization and mechanism investigation of pulse etching modes for aluminum line patterning in CMOS image sensor chip manufacturing
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J. Vac. Sci. Technol. B 43, 042209 (2025)
Published: July 2025
Journal Articles
TiN and TaN cointegration for 300 mm superconducting back end of line
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J. Vac. Sci. Technol. B 43, 022216 (2025)
Published: March 2025
Journal Articles
Observation of low-resistance Al and Ni p-type ohmic contacts to dilute GeC and GeCSn alloys
Available to PurchaseJibesh K. Saha, Saif A. A. Taqy, Pallab K. Sarkar, Imteaz Rahaman, Augustus W. Arbogast, Tuhin Dey, Andrei Dolocan, Md. Reaz Rahman Munna, Khorshed Alam, Daniel Wasserman, Seth R. Bank, Mark A. Wistey
J. Vac. Sci. Technol. B 42, 062211 (2024)
Published: December 2024
Journal Articles
Fabrication of silicon W and G center embedded light-emitting diodes for electroluminescence
Nikki Ebadollahi, Pradeep N. Namboodiri, Christian Pederson, Vijin K. Veetil, Marcelo I. Davanco, Kartik A. Srinivasan, Aaron M. Katzenmeyer, Matthew Pelton, Joshua M. Pomeroy
J. Vac. Sci. Technol. B 42, 062208 (2024)
Published: November 2024
Journal Articles
Yasser Pordeli, Céline Steenge, Erwin J. W. Berenschot, Ray J. E. Hueting, Andrea Migliorini, Stuart S. P. Parkin, Niels R. Tas
J. Vac. Sci. Technol. B 42, 062805 (2024)
Published: November 2024
Journal Articles
Enhancing performance of microbolometers by utilizing low-temperature polycrystalline silicon
J. Vac. Sci. Technol. B 42, 063202 (2024)
Published: October 2024
Journal Articles
Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness
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J. Vac. Sci. Technol. B 42, 042603 (2024)
Published: July 2024
Journal Articles
Characteristics of a hybrid radio frequency capacitively and inductively coupled plasma using hydrogen gas
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J. Vac. Sci. Technol. B 42, 044204 (2024)
Published: July 2024
Journal Articles
Emission enhancement of GaN field emitter arrays in an N2 environment
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J. Vac. Sci. Technol. B 42, 044004 (2024)
Published: July 2024
Journal Articles
X-ray photoelectron spectroscopy surface oxidation study of remote plasma-enhanced chemical vapor deposition-grown Ge1−xSnx/Si alloys
Available to PurchaseKevin Choe, Jeremy Hunter, Christopher Sutphin, Daniel Felker, Bruce Claflin, Gordon Grzybowski, Christina Dugan
J. Vac. Sci. Technol. B 42, 042207 (2024)
Published: July 2024
Journal Articles
Numerical analysis of high vacuum packaging efficiency for narrow structured devices
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J. Vac. Sci. Technol. B 42, 044202 (2024)
Published: June 2024
Journal Articles
Electronic and optical properties of lithium-doped boron nitride nanoribbons using density functional theory
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J. Vac. Sci. Technol. B 42, 042201 (2024)
Published: May 2024
Journal Articles
Evolution of hard carbon layers on Ti-45Al-2Nb-2Mn-1B by plasma enhanced chemical vapor deposition of hydrocarbons and hydrogen
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J. Vac. Sci. Technol. B 42, 034006 (2024)
Published: May 2024
Journal Articles
Fabrication of silicon sharp nanocones using dry etch with periodic oxygen plasma shrinking and wet etch
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J. Vac. Sci. Technol. B 42, 033002 (2024)
Published: April 2024
Journal Articles
Sodium adsorption on nanometer-thick TiO2 channel thin-film transistors for enhanced drain currents
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J. Vac. Sci. Technol. B 42, 022213 (2024)
Published: March 2024
Journal Articles
Fabrication of slanted gratings by using glancing angle deposition
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J. Vac. Sci. Technol. B 42, 023002 (2024)
Published: March 2024
Journal Articles
Mid-infrared emission of germanium-tin films produced by sputtering
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J. Vac. Sci. Technol. B 42, 022210 (2024)
Published: March 2024
Journal Articles
J. Vac. Sci. Technol. B 42, 014001 (2024)
Published: January 2024
Journal Articles
Development of “GaSb-on-silicon” metamorphic substrates for optoelectronic device growth
Available to PurchaseFatih F. Ince, Mega Frost, Darryl Shima, Thomas J. Rotter, Sadhvikas Addamane, Chadwick L. Canedy, Stephanie Tomasulo, Chul Soo Kim, William W. Bewley, Igor Vurgaftman, Jerry R. Meyer, Ganesh Balakrishnan
J. Vac. Sci. Technol. B 42, 012205 (2024)
Published: January 2024
Journal Articles
Effect of annealing on focused ion beam induced surface damages in silicon analyzed by micro-Raman spectroscopy
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J. Vac. Sci. Technol. B 41, 054001 (2023)
Published: September 2023
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