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Journal Articles

Ohmic contact structures on β-Ga2O3 with n+ β-Ga2O3 pulsed laser deposition layers

Elizabeth V. Favela, Hyung Min Jeon, Kevin D. Leedy, Kun Zhang, Szu-Wei Tung, Francelia Sanchez Escobar, C. V. Ramana, Lisa M. Porter
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 032205 (2023)
https://doi.org/10.1116/6.0002620
Published: May 2023
View article titled, Ohmic contact structures on <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> with n+ <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> pulsed laser deposition layers
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Includes: Supplementary data
Journal Articles

Investigation of a defect in the β-Ga2O3 substrate material from capacitance transients

Jian V. Li, Adam T. Neal, Shin Mou, Man Hoi Wong
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 064001 (2022)
https://doi.org/10.1116/6.0002045
Published: October 2022
View article titled, Investigation of a defect in the β-Ga<sub>2</sub>O<sub>3</sub> substrate material from capacitance transients
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Journal Articles

Formation of ideally ordered porous Ga oxide by anodization of pretextured Ga

Toshiaki Kondo, Yusuke Kuroda, Tomoki Shichijo, Takashi Yanagishita, Hideki Masuda
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 010603 (2022)
https://doi.org/10.1116/6.0001619
Published: January 2022
View article titled, Formation of ideally ordered porous Ga oxide by anodization of pretextured Ga
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Journal Articles

Selective dry etching of UV-nanoimprinted resin passivation masks for area selective atomic layer deposition of aluminum oxide

Chiaki Miyajima, Shunya Ito, Masaru Nakagawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052804 (2021)
https://doi.org/10.1116/6.0001250
Published: September 2021
View article titled, Selective dry etching of UV-nanoimprinted resin passivation masks for area selective atomic layer deposition of aluminum oxide
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Journal Articles

Electrical conductivity across the alumina support layer following carbon nanotube growth

Berg Dodson, Guohai Chen, Robert Davis, Richard Vanfleet
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052803 (2021)
https://doi.org/10.1116/6.0001115
Published: August 2021
View article titled, Electrical conductivity across the alumina support layer following carbon nanotube growth
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Journal Articles

Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga2O3 with neutron irradiation and forming gas anneals

Hantian Gao, Shreyas Muralidharan, Md Rezaul Karim, Lei R. Cao, Kevin D. Leedy, Hongping Zhao, Siddharth Rajan, David C. Look, Leonard J. Brillson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052205 (2021)
https://doi.org/10.1116/6.0001240
Published: August 2021
View article titled, Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga<sub>2</sub>O<sub>3</sub> with neutron irradiation and forming gas anneals
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Journal Articles

Characterization of nanoscale vertical-channel charge-trap memory thin film transistors using oxide semiconducting active and trap layers

Soo-Hyun Bae, Hyun-Joo Ryoo, Nak-Jin Seong, Kyu-Jeong Choi, Gi-Heon Kim, Sung-Min Yoon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 043202 (2021)
https://doi.org/10.1116/6.0001049
Published: June 2021
View article titled, Characterization of nanoscale vertical-channel charge-trap memory thin film transistors using oxide semiconducting active and trap layers
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Journal Articles

Temperature dependence of barrier height inhomogeneity in β-Ga2O3 Schottky barrier diodes

Aakash Jadhav, Luke A. M. Lyle, Ziyi Xu, Kalyan K. Das, Lisa M. Porter, Biplab Sarkar
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 040601 (2021)
https://doi.org/10.1116/6.0001059
Published: June 2021
View article titled, Temperature dependence of barrier height inhomogeneity in <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> Schottky barrier diodes
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Journal Articles

Systematic study of the outgassing behavior of different ceramic materials

Katharina Battes, Christian Day, Volker Hauer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 034202 (2021)
https://doi.org/10.1116/6.0000954
Published: April 2021
View article titled, Systematic study of the outgassing behavior of different ceramic materials
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Journal Articles

β-Ga2O3 Schottky diodes based strain gauges with high resistance, large gauge factor, and high operating temperature

Bo-You Liu, Jian V. Li
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 012206 (2021)
https://doi.org/10.1116/6.0000776
Published: January 2021
View article titled, β-Ga<sub>2</sub>O<sub>3</sub> Schottky diodes based strain gauges with high resistance, large gauge factor, and high operating temperature
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Journal Articles

Electrospun Mn2O3 web electrodes: Influence of fabrication parameters on electrochemical performance

Molly Brockway, Jack L. Skinner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062401 (2020)
https://doi.org/10.1116/6.0000553
Published: October 2020
View article titled, Electrospun Mn<sub>2</sub>O<sub>3</sub> web electrodes: Influence of fabrication parameters on electrochemical performance
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Journal Articles

Mechanism of premature etch stop in high-density magnetic-tunnel-junction patterning using CO/NH3 plasma with Ta mask

Makoto Satake, Masaki Yamada, Kenetsu Yokogawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 042805 (2020)
https://doi.org/10.1116/6.0000305
Published: July 2020
View article titled, Mechanism of premature etch stop in high-density magnetic-tunnel-junction patterning using CO/NH<sub>3</sub> plasma with Ta mask
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Journal Articles

Absorption, discharge, and internal partitioning behavior of hydrogen in the tantalum and tantalum oxide system investigated by in situ oxidation SIMS and ab initio calculations

Tsutomu Asakawa, Daisuke Nagano, Hiromu Miyazawa, Ian Clark
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 034008 (2020)
https://doi.org/10.1116/6.0000100
Published: April 2020
View article titled, Absorption, discharge, and internal partitioning behavior of hydrogen in the tantalum and tantalum oxide system investigated by <em>in situ</em> oxidation SIMS and <em>ab initio</em> calculations
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Journal Articles

ToF-SIMS study of selective anchoring of Ru(tpy)2 complexes on zirconium-phosphate functionalized oxide surfaces

Stefania Vitale, Baptiste Laramée-Milette, Andrea Valenti, Maria Emanuela Amato, Garry S. Hanan, Nunzio Tuccitto, Antonino Licciardello
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 032802 (2020)
https://doi.org/10.1116/6.0000045
Published: April 2020
View article titled, ToF-SIMS study of selective anchoring of Ru(tpy)<sub>2</sub> complexes on zirconium-phosphate functionalized oxide surfaces
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Includes: Supplementary data
Journal Articles

Multilayer film passivation for enhanced reliability of power semiconductor devices

Roberta Busca, Davide Cimmino, Sergio Ferrero, Luciano Scaltrito, Candido Fabrizio Pirri, Giovanni Richieri, Rossano Carta
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 022206 (2020)
https://doi.org/10.1116/1.5121880
Published: February 2020
View article titled, Multilayer film passivation for enhanced reliability of power semiconductor devices
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Journal Articles

Electrical and optical properties of copper oxide thin films prepared by DC magnetron sputtering

Anmar H. Shukor, Haider A. Alhattab, Ichiro Takano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 012803 (2020)
https://doi.org/10.1116/1.5131518
Published: December 2019
View article titled, Electrical and optical properties of copper oxide thin films prepared by DC magnetron sputtering
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Journal Articles

Forward bias degradation and thermal simulations of vertical geometry β-Ga2O3 Schottky rectifiers

Minghan Xian, Randy Elhassani, Chaker Fares, Fan Ren, Marko Tadjer, S. J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061205 (2019)
https://doi.org/10.1116/1.5127511
Published: October 2019
View article titled, Forward bias degradation and thermal simulations of vertical geometry β-Ga<sub>2</sub>O<sub>3</sub> Schottky rectifiers
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Journal Articles

In situ spectroelectrochemical ellipsometry using super continuum white laser: Study of the anodization of magnesium alloy

Alexandre Zimmer, Delphine Veys-Renaux, Laurent Broch, Nicolas Stein, Emmanuel Rocca
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062911 (2019)
https://doi.org/10.1116/1.5122320
Published: October 2019
View article titled, <em>In situ</em> spectroelectrochemical ellipsometry using super continuum white laser: Study of the anodization of magnesium alloy
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Includes: Supplementary data
Journal Articles

Effect of thermal annealing for W/β-Ga2O3 Schottky diodes up to 600 °C

Minghan Xian, Chaker Fares, Fan Ren, Brent P. Gila, Yen-Ting Chen, Yu-Te Liao, Marko Tadjer, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061201 (2019)
https://doi.org/10.1116/1.5125006
Published: September 2019
View article titled, Effect of thermal annealing for W/β-Ga<sub>2</sub>O<sub>3</sub> Schottky diodes up to 600 °C
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Journal Articles

Diffusion of implanted Ge and Sn in β-Ga2O3

Ribhu Sharma, Mark E. Law, Minghan Xian, Marko Tadjer, Elaf A. Anber, Daniel Foley, Andrew C. Lang, James L. Hart, James Nathaniel, Mitra L. Taheri, Fan Ren, S. J. Pearton, A. Kuramata
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 051204 (2019)
https://doi.org/10.1116/1.5118001
Published: August 2019
View article titled, Diffusion of implanted Ge and Sn in β-Ga<sub>2</sub>O<sub>3</sub>
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