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Journal Articles

Maximizing the performance of a field emission device by profiling the emitter’s height distribution

Sergey V. Filippov, Fernando F. Dall’Agnol, Eugeni O. Popov, Anatoly G. Kolosko, Thiago A. de Assis
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 050601 (2023)
https://doi.org/10.1116/6.0003016
Published: September 2023
View article titled, Maximizing the performance of a field emission device by profiling the emitter’s height distribution
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Journal Articles

Improvement of ionization yield in sputtered neutral mass spectrometry using pulsed infrared and ultraviolet lasers

Reiko Saito, Haruko Akutsu, Jun Asakawa, Yue Zhao, Kei Kiyokawa, Masato Morita, Tetsuo Sakamoto, Masaaki Fujii
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 034011 (2020)
https://doi.org/10.1116/6.0000088
Published: April 2020
View article titled, Improvement of ionization yield in sputtered neutral mass spectrometry using pulsed infrared and ultraviolet lasers
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Journal Articles

Toward accurate composition analysis of GaN and AlGaN using atom probe tomography

Richard. J. H. Morris, Ramya Cuduvally, Davit Melkonyan, Claudia Fleischmann, Ming Zhao, Laurent Arnoldi, Paul van der Heide, Wilfried Vandervorst
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 03F130 (2018)
https://doi.org/10.1116/1.5019693
Published: March 2018
View article titled, Toward accurate composition analysis of GaN and AlGaN using atom probe tomography
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Journal Articles

On the formation of cleaved mirror facets of GaN-based laser diodes—A comparative study of diamond-tip edge-scribing and laser scribing

Ji Hye Kang, Olaf Krüger, Uwe Spengler, Ute Zeimer, Sven Einfeldt, Michael Kneissl
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 041222 (2016)
https://doi.org/10.1116/1.4953885
Published: June 2016
View article titled, On the formation of cleaved mirror facets of GaN-based laser diodes—A comparative study of diamond-tip edge-scribing and laser scribing
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Journal Articles

Defect-free periodic structures using extreme ultraviolet Talbot lithography in a table-top system

Wei Li, Victor Martinez Esquiroz, Lukasz Urbanski, Dinesh Patel, Carmen S. Menoni, Mario C. Marconi, Aaron Stein, Weilun Chao, Erik H. Anderson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 06F604 (2013)
https://doi.org/10.1116/1.4826344
Published: October 2013
View article titled, Defect-free periodic structures using extreme ultraviolet Talbot lithography in a table-top system
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Journal Articles

Defect tolerant extreme ultraviolet lithography technique

Lukasz Urbanski, Wei Li, Jorge J. Rocca, Carmen S. Menoni, Mario C. Marconi, Artak Isoyan, Aaron Stein
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06F502 (2012)
https://doi.org/10.1116/1.4758758
Published: October 2012
View article titled, Defect tolerant extreme ultraviolet lithography technique
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Journal Articles

Analysis of a scheme for de-magnified Talbot lithography

L. Urbanski, M. C. Marconi, A. Isoyan, A. Stein, C. S. Menoni, J. J. Rocca
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06F504 (2011)
https://doi.org/10.1116/1.3653507
Published: November 2011
View article titled, Analysis of a scheme for de-magnified Talbot lithography
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Journal Articles

Compact holographic lithography system for photonic-crystal structure

Mei-Li Hsieh, Shawn-Yu Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 011015 (2011)
https://doi.org/10.1116/1.3522658
Published: January 2011
View article titled, Compact holographic lithography system for photonic-crystal structure
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Journal Articles

Electron emission from LiNbO 3 crystal excited by ultraviolet laser

T. Kisa, K. Murakami, S. Abo, F. Wakaya, M. Takai, T. Ishida
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C2B27–C2B29 (2010)
https://doi.org/10.1116/1.3333438
Published: March 2010
View article titled, Electron emission from LiNbO 3 crystal excited by ultraviolet laser
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Journal Articles

Precision laser micromachining of trenches in GaN on sapphire

G. Y. Mak, E. Y. Lam, H. W. Choi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, 380–385 (2010)
https://doi.org/10.1116/1.3359593
Published: March 2010
View article titled, Precision laser micromachining of trenches in GaN on sapphire
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Journal Articles

Laser micromachining of optical microstructures with inclined sidewall profile

X. H. Wang, P. T. Lai, H. W. Choi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 1048–1052 (2009)
https://doi.org/10.1116/1.3117344
Published: April 2009
View article titled, Laser micromachining of optical microstructures with inclined sidewall profile
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Journal Articles

Nanoscale patterning in high resolution HSQ photoresist by interferometric lithography with tabletop extreme ultraviolet lasers

P. W. Wachulak, M. G. Capeluto, M. C. Marconi, D. Patel, C. S. Menoni, J. J. Rocca
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 2094–2097 (2007)
https://doi.org/10.1116/1.2801870
Published: December 2007
View article titled, Nanoscale patterning in high resolution HSQ photoresist by interferometric lithography with tabletop extreme ultraviolet lasers
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Journal Articles

Narrow cone emission from negative electron affinity photocathodes

Zhi Liu, Yun Sun, P. Pianetta, R. F. W. Pease
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 2758–2762 (2005)
https://doi.org/10.1116/1.2101726
Published: December 2005
View article titled, Narrow cone emission from negative electron affinity photocathodes
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Journal Articles

Dynamically ordered thin film nanoclusters

Wei Zhang, Chi Zhang, Ramki Kalyanaraman
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, L5–L8 (2005)
https://doi.org/10.1116/1.1941207
Published: July 2005
View article titled, Dynamically ordered thin film nanoclusters
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Journal Articles

Influence of gas atmosphere during laser surface treatment of CNT cathode

W. Rochanachirapar, K. Murakami, N. Yamasaki, S. Abo, F. Wakaya, M. Takai, A. Hosono, S. Okuda
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 762–764 (2005)
https://doi.org/10.1116/1.1868698
Published: April 2005
View article titled, Influence of gas atmosphere during laser surface treatment of CNT cathode
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Journal Articles

Desorption/ionization mass spectrometry on array of silicon microtips

Anna Gorecka-Drzazga, Jan Dziuban, Wlodzimierz Drzazga, Agnieszka Kraj, Jerzy Silberring
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 819–823 (2005)
https://doi.org/10.1116/1.1861046
Published: April 2005
View article titled, Desorption/ionization mass spectrometry on array of silicon microtips
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Journal Articles

Nanostructures produced by ultraviolet laser irradiation of silicon. II. Nanoprotrusions and nanoparticles

Y. F. Guan, A. J. Pedraza, J. D. Fowlkes, D. A. Joy
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 22, 2836–2843 (2004)
https://doi.org/10.1116/1.1821576
Published: November 2004
View article titled, Nanostructures produced by ultraviolet laser irradiation of silicon. II. Nanoprotrusions and nanoparticles
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Journal Articles

Nanostructures produced by ultraviolet laser irradiation of silicon. I. Rippled structures

A. J. Pedraza, Y. F. Guan, J. D. Fowlkes, D. A. Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 22, 2823–2835 (2004)
https://doi.org/10.1116/1.1821575
Published: November 2004
View article titled, Nanostructures produced by ultraviolet laser irradiation of silicon. I. Rippled structures
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Journal Articles

Combination lithography for photonic-crystal circuits

Garrett J. Schneider, Janusz Murakowski, Sriram Venkataraman, Dennis W. Prather
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 22, 146–151 (2004)
https://doi.org/10.1116/1.1637915
Published: January 2004
View article titled, Combination lithography for photonic-crystal circuits
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Journal Articles

Field emission from screen-printed carbon nanotubes irradiated by tunable ultraviolet laser in different atmospheres

W. J. Zhao, N. Kawakami, A. Sawada, M. Takai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 21, 1734–1737 (2003)
https://doi.org/10.1116/1.1587136
Published: July 2003
View article titled, Field emission from screen-printed carbon nanotubes irradiated by tunable ultraviolet laser in different atmospheres
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