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Journal Articles

Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography

Henock Demessie Yallew, Jana Jágerská, Martin M. Greve
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012601 (2023)
https://doi.org/10.1116/6.0002187
Published: December 2022
View article titled, Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography
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Journal Articles

Statistical analysis of subnanometer residual disorder in photonic crystal waveguides: Correlation between slow light properties and structural properties

N. Le Thomas, Z. Diao, H. Zhang, R. Houdré
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 051601 (2011)
https://doi.org/10.1116/1.3622289
Published: August 2011
View article titled, Statistical analysis of subnanometer residual disorder in photonic crystal waveguides: Correlation between slow light properties and structural properties
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Journal Articles

Polythiophene-based charge dissipation layer for electron beam lithography of zinc oxide and gallium nitride

R. Dylewicz, S. Lis, R. M. De La Rue, F. Rahman
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, 817–822 (2010)
https://doi.org/10.1116/1.3460903
Published: July 2010
View article titled, Polythiophene-based charge dissipation layer for electron beam lithography of zinc oxide and gallium nitride
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Journal Articles

Suspended slab and photonic crystal waveguides in lithium niobate

Guangyuan Si, Ee Jin Teo, Andrew A. Bettiol, Jinghua Teng, Aaron J. Danner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, 316–320 (2010)
https://doi.org/10.1116/1.3327925
Published: March 2010
View article titled, Suspended slab and photonic crystal waveguides in lithium niobate
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Journal Articles

Fabrication of two dimensional GaN nanophotonic crystals (31)

Bifeng Rong, Huub W. M. Salemink, Erik M. Roeling, Rob van der Heijden, Fouad Karouta, Emile van der Drift
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 2632–2636 (2007)
https://doi.org/10.1116/1.2794066
Published: December 2007
View article titled, Fabrication of two dimensional GaN nanophotonic crystals (31)
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Journal Articles

Nonlinear optical polymer patterned by nanoimprint lithography as a photonic crystal waveguide structure

Motoki Okinaka, Shin-ichiro Inoue, Kazuhito Tsukagoshi, Yoshinobu Aoyagi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 271–273 (2006)
https://doi.org/10.1116/1.2151911
Published: January 2006
View article titled, Nonlinear optical polymer patterned by nanoimprint lithography as a photonic crystal waveguide structure
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Journal Articles

Fabrication of photonic crystal waveguides composed of a square lattice of dielectric rods

Solomon Assefa, G. S. Petrich, L. A. Kolodziejski, M. K. Mondol, H. I. Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 22, 3363–3365 (2004)
https://doi.org/10.1116/1.1821573
Published: December 2004
View article titled, Fabrication of photonic crystal waveguides composed of a square lattice of dielectric rods
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Journal Articles

Photonic crystal waveguides with propagation losses in the 1 dB ∕ mm range

J. Zimmermann, H. Scherer, M. Kamp, S. Deubert, J. P. Reithmaier, A. Forchel, R. März, S. Anand
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 22, 3356–3358 (2004)
https://doi.org/10.1116/1.1824053
Published: December 2004
View article titled, Photonic crystal waveguides with propagation losses in the 1 dB ∕ mm range
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Journal Articles

Low-loss InP-based photonic-crystal waveguides etched with Ar/Cl 2 chemically assisted ion beam etching

M. Mulot, S. Anand, M. Swillo, M. Qiu, B. Jaskorzynska, A. Talneau
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 21, 900–903 (2003)
https://doi.org/10.1116/1.1563257
Published: March 2003
View article titled, Low-loss InP-based photonic-crystal waveguides etched with Ar/Cl 2 chemically assisted ion beam etching
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Journal Articles

Fabrication of two-dimensional photonic crystal waveguides for 1.5 μm in silicon by deep anisotropic dry etching

T. Zijlstra, E. van der Drift, M. J. A. de Dood, E. Snoeks, A. Polman
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 17, 2734–2739 (1999)
https://doi.org/10.1116/1.591054
Published: November 1999
View article titled, Fabrication of two-dimensional photonic crystal waveguides for 1.5 μm in silicon by deep anisotropic dry etching
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