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Journal Articles
J. Vac. Sci. Technol. B 43, 022204 (2025)
Published: February 2025
Journal Articles
Tomohiro Nishitani, Yuta Arakawa, Shotaro Noda, Atsushi Koizumi, Daiki Sato, Haruka Shikano, Hokuto Iijima, Yoshio Honda, Hiroshi Amano
J. Vac. Sci. Technol. B 40, 064203 (2022)
Published: November 2022
Journal Articles
Yue Zhao, Takeru Yoshida, Yuzuka Ohmori, Yuta Miyashita, Masato Morita, Tetsuo Sakamoto, Kotaro Kato, Ryohei Terabayashi, Volker Sonnenschein, Hideki Tomita, Toshihide Kawai, Takeo Okumura, Yukihiko Satou, Masabumi Miyabe, Ikuo Wakaida
J. Vac. Sci. Technol. B 38, 044001 (2020)
Published: May 2020
Journal Articles
Reiko Saito, Haruko Akutsu, Jun Asakawa, Yue Zhao, Kei Kiyokawa, Masato Morita, Tetsuo Sakamoto, Masaaki Fujii
J. Vac. Sci. Technol. B 38, 034011 (2020)
Published: April 2020
Journal Articles
J. Vac. Sci. Technol. B 38, 032203 (2020)
Published: March 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. B 37, 012906 (2019)
Published: January 2019
Journal Articles
Reiko Saito, Haruko Akutsu, Jun Asakawa, Shiro Takeno, Kei Kiyokawa, Satoru Nagashima, Takeharu Ishikawa, Takahiro Kashiwagi, Akio Takano, Tetsuo Sakamoto, Masaaki Fujii
J. Vac. Sci. Technol. B 36, 03F128 (2018)
Published: March 2018
Journal Articles
Rong Ji, Zhenxiang Xing, Yansheng Ma, Ji Feng Ying, Rongyan Zheng, Huiqing Xie, Xiaobai Wang, Angeline Yan Xuan Tan, Ching Mui Cho, Jianwei Xu
J. Vac. Sci. Technol. B 34, 03H136 (2016)
Published: April 2016
Journal Articles
J. Vac. Sci. Technol. B 33, 04E104 (2015)
Published: July 2015
Journal Articles
J. Vac. Sci. Technol. B 32, 06FF03 (2014)
Published: October 2014
Journal Articles
J. Vac. Sci. Technol. B 30, 011807 (2012)
Published: January 2012
Journal Articles
J. Vac. Sci. Technol. B 29, 041603 (2011)
Published: June 2011
Journal Articles
J. Vac. Sci. Technol. B 29, 02B104 (2011)
Published: January 2011
Journal Articles
J. Vac. Sci. Technol. B 29, 02B103 (2011)
Published: January 2011
Journal Articles
J. Vac. Sci. Technol. B 28, C2C41–C2C44 (2010)
Published: March 2010
Journal Articles
J. Vac. Sci. Technol. B 28, C2B27–C2B29 (2010)
Published: March 2010
Journal Articles
J. Vac. Sci. Technol. B 28, C2B11–C2B13 (2010)
Published: March 2010
Journal Articles
J. Vac. Sci. Technol. B 27, 1068–1071 (2009)
Published: April 2009
Journal Articles
J. Vac. Sci. Technol. B 27, 761–765 (2009)
Published: March 2009
Journal Articles
J. Vac. Sci. Technol. B 26, 760–763 (2008)
Published: April 2008
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