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Journal Articles

Laser oscillation from a distributed feedback structure with a diffraction grating directly fabricated on an organic crystal surface using a focused ion beam and plasma etching

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Yuhi Inada, Momonosuke Odani, Shuya Murakami, Haruki Kishimoto, Yuya Arita, Kazuo Takahashi, Takeshi Yamao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 042210 (2025)
https://doi.org/10.1116/5.0279913
Published: July 2025
View article titled, Laser oscillation from a distributed feedback structure with a diffraction grating directly fabricated on an organic crystal surface using a focused ion beam and plasma etching
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Journal Articles

Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring

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Lukáš Šilhan, Jon Ander Arregi, Tomáš Plichta, Ondřej Vaculík, Jan Novotný, Mojmír Šerý
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 034202 (2025)
https://doi.org/10.1116/6.0004296
Published: April 2025
View article titled, Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring
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Journal Articles

Effect of quality improvement in active region on temperature characteristics of GaN-based ultraviolet laser diode

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Yujie Huang, Jing Yang, Degang Zhao, Zongshun Liu, Feng Liang, Ping Chen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 032204 (2025)
https://doi.org/10.1116/6.0004363
Published: April 2025
View article titled, Effect of quality improvement in active region on temperature characteristics of GaN-based ultraviolet laser diode
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Journal Articles

Gradient-composition upper-waveguide and electron-blocking layers for enhanced performance in near-ultraviolet laser diodes

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MaoLin Gao, Jing Yang, Wei Jia, DeGang Zhao, HaiLiang Dong, XiuYang Jia, GuangMei Zhai, BingShe Xu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 032201 (2025)
https://doi.org/10.1116/6.0004374
Published: March 2025
View article titled, Gradient-composition upper-waveguide and electron-blocking layers for enhanced performance in near-ultraviolet laser diodes
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Journal Articles

Realizing GaN-based blue laser diode with 7.5 W output power via electron blocking layer thickness adjustment

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Zhenyu Chen, Feng Liang, Degang Zhao, Zongshun Liu, Jing Yang, Ping Chen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 032203 (2025)
https://doi.org/10.1116/6.0004426
Published: March 2025
View article titled, Realizing GaN-based blue laser diode with 7.5 W output power via electron blocking layer thickness adjustment
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Journal Articles

High-precision thermal characterization technique with dual-laser Raman thermometry

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Yingtao Wang, Xian Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 024005 (2025)
https://doi.org/10.1116/6.0004303
Published: February 2025
View article titled, High-precision thermal characterization technique with dual-laser Raman thermometry
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Journal Articles

Carbon impurities in oxide thin films: The effect of annealing and laser irradiation

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Syeed E. Ahmed, Cody Ingraham, Matthew D. McCluskey, Jesse Huso, Violet M. Poole
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022204 (2025)
https://doi.org/10.1116/6.0004193
Published: February 2025
View article titled, Carbon impurities in oxide thin films: The effect of annealing and laser irradiation
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Journal Articles

Spatial variation of the elemental components of thin films from BiSrCaCuO target deposited using low energy femtosecond pulsed laser deposition in high background gas pressure

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Joy Kristelle De Mata, Roland Sarmago, Wilson Garcia, Lean Dasallas
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 024003 (2025)
https://doi.org/10.1116/6.0004082
Published: January 2025
View article titled, Spatial variation of the elemental components of thin films from BiSrCaCuO target deposited using low energy femtosecond pulsed laser deposition in high background gas pressure
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Journal Articles

Tapered quantum cascade lasers with isolated channel emitting at 9 μm

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Chenyang Wan, Yuzhe Lin, Yuan Ma, Lijun Ge, Zixian Wang, Fengxin Dong, Xuyan Zhou, Jinchuan Zhang, Fengqi Liu, Wanhua Zheng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 012202 (2025)
https://doi.org/10.1116/6.0004059
Published: January 2025
View article titled, Tapered quantum cascade lasers with isolated channel emitting at 9 μm
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Journal Articles

Fabricating distributed feedback laser gratings with bismuth and gold focused ion beams

Open Access
B. Salmond, D. D. John, W. J. Mitchell, B. J. Thibeault, T. Richter, A. Nadzeyka, P. Mazarov, F. Meyer, J. Fridmann, Y. Yu, M. Wale, W. Meredith, P. M. Smowton, D. Read, S. Shutts
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062214 (2024)
https://doi.org/10.1116/6.0004056
Published: December 2024
View article titled, Fabricating distributed feedback laser gratings with bismuth and gold focused ion beams
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Journal Articles

In situ mass spectrometric investigation to probe GeSn growth dynamics and mechanisms in the chemical vapor deposition processes

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Joshua M. Grant, Enbo Yang, Narges Masoumi, Alexander Golden, Joe Margetis, Andrew Chizmeshya, Wei Du, Shui-Qing Yu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 044002 (2024)
https://doi.org/10.1116/6.0003566
Published: June 2024
View article titled, In situ mass spectrometric investigation to probe GeSn growth dynamics and mechanisms in the chemical vapor deposition processes
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Journal Articles

5.0 μm emitting interband cascade lasers with superlattice and bulk AlGaAsSb claddings

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B. Petrović, A. Bader, J. Nauschütz, T. Sato, S. Birner, R. Weih, F. Hartmann, S. Höfling
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 043202 (2024)
https://doi.org/10.1116/6.0003584
Published: June 2024
View article titled, 5.0 μm emitting interband cascade lasers with superlattice and bulk AlGaAsSb claddings
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Journal Articles

Millimeter-wave generation with a room-temperature nonlinear quantum cascade laser

Open Access
Shohei Hayashi, Akio Ito, Tatsuo Dougakiuchi, Masahiro Hitaka, Kazuue Fujita
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 040601 (2024)
https://doi.org/10.1116/6.0003536
Published: June 2024
View article titled, Millimeter-wave generation with a room-temperature nonlinear quantum cascade laser
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Journal Articles

Generation of broadband optical chaos at mid-infrared wavelength with an interband cascade laser

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O. Spitz, Y. B. Shuai, S. Zhao, P. Didier, D. A. Díaz-Thomas, A. N. Baranov, L. Cerutti, D. Rontani, J. Wu, F. Grillot
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032213 (2024)
https://doi.org/10.1116/6.0003572
Published: May 2024
View article titled, Generation of broadband optical chaos at mid-infrared wavelength with an interband cascade laser
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Journal Articles

Continuous wave interband cascade lasers near 13 μm

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Yixuan Shen, Rui Q. Yang, S. D. Hawkins, A. J. Muhowski
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022206 (2024)
https://doi.org/10.1116/6.0003365
Published: February 2024
View article titled, Continuous wave interband cascade lasers near 13 μm
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Journal Articles

Doping engineering: Next step toward room temperature performance of terahertz quantum cascade lasers

Open Access
Nathalie Lander Gower, Shiran Levy, Silvia Piperno, Sadhvikas J. Addamane, John L. Reno, Asaf Albo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 010801 (2024)
https://doi.org/10.1116/6.0003160
Published: January 2024
View article titled, Doping engineering: Next step toward room temperature performance of terahertz quantum cascade lasers
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Journal Articles

III–V semiconductor devices grown by metalorganic chemical vapor deposition—The development of the Swiss Army Knife for semiconductor epitaxial growth

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Russell D. Dupuis
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 060803 (2023)
https://doi.org/10.1116/6.0003062
Published: October 2023
View article titled, III–V semiconductor devices grown by metalorganic chemical vapor deposition—The development of the Swiss Army Knife for semiconductor epitaxial growth
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Journal Articles

Maximizing the performance of a field emission device by profiling the emitter’s height distribution

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Sergey V. Filippov, Fernando F. Dall’Agnol, Eugeni O. Popov, Anatoly G. Kolosko, Thiago A. de Assis
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 050601 (2023)
https://doi.org/10.1116/6.0003016
Published: September 2023
View article titled, Maximizing the performance of a field emission device by profiling the emitter’s height distribution
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Journal Articles

Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?

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Charles W. Magee, Temel H. Buyuklimanli
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 030803 (2023)
https://doi.org/10.1116/6.0002466
Published: April 2023
View article titled, Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?
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Journal Articles

High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining

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Roghayeh Nikbakht, Xitong Xie, Arnaud Weck, Raphael St-Gelais
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 023002 (2023)
https://doi.org/10.1116/5.0124150
Published: March 2023
View article titled, High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining
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