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Journal Articles

Exploring the mysteries of topology in quantum materials by spin-resolved spectroscopies

Open Access
C. Tusche, K. Hagiwara, X. L. Tan, Y.-J. Chen, C. M. Schneider
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042201 (2023)
https://doi.org/10.1116/6.0002707
Published: May 2023
View articletitled, Exploring the mysteries of topology in quantum materials by spin-resolved spectroscopies
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Journal Articles

Topological impact of a simple self-replication geometric structure with great application potential in vacuum pumping and photovoltaic industry

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Xueli Luo, Christian Day
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 054203 (2021)
https://doi.org/10.1116/6.0001222
Published: September 2021
View articletitled, Topological impact of a simple self-replication geometric structure with great application potential in vacuum pumping and photovoltaic industry
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Journal Articles

Medusa 82—Hydrogen silsesquioxane based high sensitivity negative-tone resist with long shelf-life and grayscale lithography capability

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Mandy Grube, Benjamin Schille, Matthias Schirmer, Maik Gerngroß, Uwe Hübner, Paul Voigt, Sascha Brose
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 012602 (2021)
https://doi.org/10.1116/6.0000542
Published: January 2021
View articletitled, Medusa 82—Hydrogen silsesquioxane based high sensitivity negative-tone resist with long shelf-life and grayscale lithography capability
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Journal Articles

Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines

Open Access
Shirly Espinoza, Fabio Samparisi, Fabio Frassetto, Steffen Richter, Mateusz Rebarz, Ondrej Finke, Martin Albrecht, Matej Jurkovic, Ondrej Hort, Nicola Fabris, Anna Zymaková, Dong Du Mai, Roman Antipenkov, Jaroslav Nejdl, Luca Poletto, Jakob Andreasson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 024005 (2020)
https://doi.org/10.1116/1.5129674
Published: February 2020
View articletitled, Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines
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Journal Articles

Correlation of Auger electron spectroscopy and microsynchrotron radiation x-ray photoelectron spectroscopy investigations of Ba-Sc-O desorption on W(100)

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Michael V. Mroz, Martin E. Kordesch, Jerzy T. Sadowski, Samuel A. Tenney, Calley N. Eads
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 024003 (2020)
https://doi.org/10.1116/1.5134649
Published: February 2020
View articletitled, Correlation of Auger electron spectroscopy and microsynchrotron radiation x-ray photoelectron spectroscopy investigations of Ba-Sc-O desorption on W(100)
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Journal Articles

Surface analysis and pumping speed measurements of oxygen-free palladium/titanium nonevaporable getter after heating at 100–450 °C

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Tetsuya Miyazawa, Yuta Sugawara, Ichiro Yoshikawa, Yuta Sato, Shinya Ohno, Tomohiro Okada, Masuaki Matsumoto, Takashi Kikuchi, Kazuhiko Mase
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062923 (2019)
https://doi.org/10.1116/1.5111879
Published: November 2019
View articletitled, Surface analysis and pumping speed measurements of oxygen-free palladium/titanium nonevaporable getter after heating at 100–450 °C
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Journal Articles

Characterizing profile tilt of nanoscale deep-etched gratings via x-ray diffraction

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Jungki Song, Ralf K. Heilmann, Alexander R. Bruccoleri, Mark L. Schattenburg
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062917 (2019)
https://doi.org/10.1116/1.5119713
Published: October 2019
View articletitled, Characterizing profile tilt of nanoscale deep-etched gratings via x-ray diffraction
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Journal Articles

Solid-solid dewetting of scandium thin films on the W(100) surface observed using emission microscopy

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Michael V. Mroz, Tatiana Savina, Martin E. Kordesch, Jerzy T. Sadowski, Samuel A. Tenney
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 012903 (2019)
https://doi.org/10.1116/1.5066015
Published: January 2019
View articletitled, Solid-solid dewetting of scandium thin films on the W(100) surface observed using emission microscopy
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Journal Articles

Improving the resolution and throughput of achromatic Talbot lithography

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Dimitrios Kazazis, Li-Ting Tseng, Yasin Ekinci
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 06J501 (2018)
https://doi.org/10.1116/1.5048506
Published: September 2018
View articletitled, Improving the resolution and throughput of achromatic Talbot lithography
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Journal Articles

Numerical and experimental thermal analysis of polyimide-based x-ray masks at the Canadian Light Source

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Sven Achenbach, Chen Shen, Garth Wells
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 012001 (2018)
https://doi.org/10.1116/1.5005115
Published: January 2018
View articletitled, Numerical and experimental thermal analysis of polyimide-based x-ray masks at the Canadian Light Source
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Journal Articles

Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching

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Pragya Tiwari, Puspen Mondal, A. K. Srivastava, Himanshu Srivastava, Rajnish Dhawan, Sanjay Rai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 051602 (2017)
https://doi.org/10.1116/1.4999933
Published: August 2017
View articletitled, Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching
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Journal Articles

Influence of symmetry and duty cycles on the pattern generation in achromatic Talbot lithography

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Shumin Yang, Jun Zhao, Liansheng Wang, Fangyuan Zhu, Chaofan Xue, Haigang Liu, Huazheng Sang, Yanqing Wu, Renzhong Tai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 021601 (2017)
https://doi.org/10.1116/1.4974930
Published: January 2017
View articletitled, Influence of symmetry and duty cycles on the pattern generation in achromatic Talbot lithography
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Journal Articles

Fabrication process for 200 nm-pitch polished freestanding ultrahigh aspect ratio gratings

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Alexander R. Bruccoleri, Ralf K. Heilmann, Mark L. Schattenburg
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06KD02 (2016)
https://doi.org/10.1116/1.4966595
Published: November 2016
View articletitled, Fabrication process for 200 nm-pitch polished freestanding ultrahigh aspect ratio gratings
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Journal Articles

Versatile multicharacterization platform involving tailored superhydrophobic SU-8 micropillars for the investigation of breast cancer estrogen receptor isoforms

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Angelo Accardo, Emmanuelle Trevisiol, Aline Cerf, Christophe Thibault, Henrik Laurell, Melissa Buscato, Françoise Lenfant, Jean-François Arnal, Coralie Fontaine, Christophe Vieu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06K201 (2016)
https://doi.org/10.1116/1.4962382
Published: September 2016
View articletitled, Versatile multicharacterization platform involving tailored superhydrophobic SU-8 micropillars for the investigation of breast cancer estrogen receptor isoforms
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Includes: Supplementary data
Journal Articles

Demonstration of 22-nm half pitch resolution on the SHARP EUV microscope

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Markus P. Benk, Kenneth A. Goldberg, Antoine Wojdyla, Christopher N. Anderson, Farhad Salmassi, Patrick P. Naulleau, Michael Kocsis
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 06FE01 (2015)
https://doi.org/10.1116/1.4929509
Published: August 2015
View articletitled, Demonstration of 22-nm half pitch resolution on the SHARP EUV microscope
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Journal Articles

Method of predicting resist sensitivity for 6.x nm extreme ultraviolet lithography

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Tomoko Gowa Oyama, Akihiro Oshima, Masakazu Washio, Seiichi Tagawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 041604 (2013)
https://doi.org/10.1116/1.4813789
Published: July 2013
View articletitled, Method of predicting resist sensitivity for 6.x nm extreme ultraviolet lithography
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Journal Articles

Epitaxial growth and surface studies of the Half Heusler compound NiTiSn (001)

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Jason K. Kawasaki, Thomas Neulinger, Rainer Timm, Martin Hjort, Alexei A. Zakharov, Anders Mikkelsen, Brian D. Schultz, Chris J. Palmstrøm
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 04D106 (2013)
https://doi.org/10.1116/1.4807715
Published: May 2013
View articletitled, Epitaxial growth and surface studies of the Half Heusler compound NiTiSn (001)
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Journal Articles

Outgassing and photochemical studies of photosensitive films upon irradiation at 13.5 nm

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Grace H. Ho, Chih-H. Shao, Jia-J. Sung, Fu-H. Kang, Chih-B. Kao, Wei-L. Hung, Yu-L. Chou, Yen-H. Huang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 051602 (2012)
https://doi.org/10.1116/1.4739000
Published: July 2012
View articletitled, Outgassing and photochemical studies of photosensitive films upon irradiation at 13.5 nm
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Journal Articles

High-resolution nanopatterning by achromatic spatial frequency multiplication with electroplated grating structures

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Li Wang, Bernd Terhalle, Mohamad Hojeij, Vitaliy A. Guzenko, Yasin Ekinci
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 031603 (2012)
https://doi.org/10.1116/1.3697753
Published: March 2012
View articletitled, High-resolution nanopatterning by achromatic spatial frequency multiplication with electroplated grating structures
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Journal Articles

Removing imperceptible fluoride residue after chemical dry-cleaning to fabricate uniform low-resistance NiSi film

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Takuya Futase, Hisanori Tanioto, Mitsuo Kimoto, Hideaki Tsugane, Hidenori Suzuki, Hiroshi Tobimatsu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 051203 (2011)
https://doi.org/10.1116/1.3622301
Published: August 2011
View articletitled, Removing imperceptible fluoride residue after chemical dry-cleaning to fabricate uniform low-resistance NiSi film
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