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Journal Articles

Novel inspection technology for detecting via open using parallel e-beam scanning and graphic design system

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Jaewon Hwang, Chihoon Lee, Kyu Lee, Younghun Kwon, Wonjo Woo, Seho Kim, Keunhyuk Yang, Youngwoon Yoon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 034001 (2025)
https://doi.org/10.1116/6.0004425
Published: April 2025
View articletitled, Novel inspection technology for detecting via open using parallel e-beam scanning and graphic design system
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Journal Articles

Operational experiences and upgrade of China Spallation Neutron Source Linac vacuum system

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Shunming Liu, Yigang Wang, Pengcheng Wang, Hong Song, Yuhui Guan, Jiaming Liu, Biao Tan, Xiaoyang Sun, Bangle Zhu, Ahong Li, Weidong Chen, Huafu Ouyang, Bo Li, Xiaolei Wu, Yongjia Lv
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 034201 (2025)
https://doi.org/10.1116/6.0004393
Published: March 2025
View articletitled, Operational experiences and upgrade of China Spallation Neutron Source Linac vacuum system
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Journal Articles

Quantum efficiency characteristics of low-threading-dislocation-density InGaN photocathode grown on GaN substrate

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Mikiya Idei, Daiki Sato, Atsushi Koizumi, Tomohiro Nishitani, Yoshio Honda, Hiroshi Amano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 032202 (2025)
https://doi.org/10.1116/6.0004199
Published: March 2025
View articletitled, Quantum efficiency characteristics of low-threading-dislocation-density InGaN photocathode grown on GaN substrate
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Journal Articles

Focusing electrode effect on the EUV lighting technology based on C-beam irradiation technique

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Iksu Kim, Umesh Balaso Apugade, So Min Oh, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022211 (2025)
https://doi.org/10.1116/6.0004301
Published: March 2025
View articletitled, Focusing electrode effect on the EUV lighting technology based on C-beam irradiation technique
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Journal Articles

Experimental investigation of the feasibility of in situ plasma cleaning in normal-conducting copper cavities

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Qianxu Xia, Lianmin Zheng, Yingchao Du
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023602 (2025)
https://doi.org/10.1116/6.0004012
Published: February 2025
View articletitled, Experimental investigation of the feasibility of in situ plasma cleaning in normal-conducting copper cavities
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Journal Articles

Investigation of the performance optimization of the low-voltage, non-magnetic, pyroelectricity-based ion pump

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Qing Cao, Fang Yang, Pengfei Zou, Jun Wu, Xudi Wang, Hailin Bi, Yue Xu, Jun Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 024202 (2025)
https://doi.org/10.1116/6.0004229
Published: February 2025
View articletitled, Investigation of the performance optimization of the low-voltage, non-magnetic, pyroelectricity-based ion pump
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Journal Articles

Electron emission performance analysis and application of carbon nanotube cold cathode prepared by cold pressing process

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Sheng Lai, Huaping Tang, Xin Jin, Jinsong Pan, Huan Li, Yunpeng Liu, Xiaobin Tang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 013201 (2025)
https://doi.org/10.1116/6.0004182
Published: January 2025
View articletitled, Electron emission performance analysis and application of carbon nanotube cold cathode prepared by cold pressing process
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Journal Articles

Photoassisted electron emission from planar-type electron source based on graphene/oxide/silicon structure

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Hidetaka Shimawaki, Masayoshi Nagao, Katsuhisa Murakami
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 063205 (2024)
https://doi.org/10.1116/6.0004094
Published: November 2024
View articletitled, Photoassisted electron emission from planar-type electron source based on graphene/oxide/silicon structure
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Journal Articles

Large-field and high-resolution low-voltage scanning electron microscopy with correction of beam-image-shift-induced chromatic deflection aberration

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S. Kizawa, D. Bizen, K. Suzuki, S. Mizutani, R. Watanabe, Y. Kasai, Y. Mizuhara
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 054003 (2024)
https://doi.org/10.1116/6.0003891
Published: August 2024
View articletitled, Large-field and high-resolution low-voltage scanning electron microscopy with correction of beam-image-shift-induced chromatic deflection aberration
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Journal Articles

Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications

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A. S. Stodolna, T. W. Mechielsen, P. van der Walle, C. Meekes, H. Lensen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052601 (2024)
https://doi.org/10.1116/6.0003701
Published: August 2024
View articletitled, Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications
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Journal Articles

Roughness-generation mechanism of Ru etching using Cl2/O2-based plasma for advanced interconnect

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Miyako Matsui, Yohei Ishii, Lucas Kovatch, Kathryn Maier, Masaya Imai, Makoto Miura, Kenichi Kuwahara
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042208 (2024)
https://doi.org/10.1116/6.0003736
Published: July 2024
View articletitled, Roughness-generation mechanism of Ru etching using Cl2/O2-based plasma for advanced interconnect
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Journal Articles

Molecular beam epitaxy growth and characterization of GePb alloys

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Tyler T. McCarthy, Allison M. McMinn, Xiaoyang Liu, Razine Hossain, Xin Qi, Zheng Ju, Mark Mangus, Shui-Qing Yu, Yong-Hang Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032210 (2024)
https://doi.org/10.1116/6.0003567
Published: May 2024
View articletitled, Molecular beam epitaxy growth and characterization of GePb alloys
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Journal Articles

Thermal analysis with high accuracy of multi-beam mask fabrication

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Yanjun Zhang, Kaijun Dong, Zhuming Liu, Delong Chen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032602 (2024)
https://doi.org/10.1116/6.0003477
Published: April 2024
View articletitled, Thermal analysis with high accuracy of multi-beam mask fabrication
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Journal Articles

Effect of beam and gate offset size on x-ray focal spot resolution of a cold cathode electron beam

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Jaydip Sawant, Ketan Bhotkar, Yi Yin Yu, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032202 (2024)
https://doi.org/10.1116/6.0003390
Published: April 2024
View articletitled, Effect of beam and gate offset size on x-ray focal spot resolution of a cold cathode electron beam
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Journal Articles

Simulation of the time-dependent propagation of leak-triggered helium density gradients in cryogenic and nonisothermal accelerator vacuum systems

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Stefan Wilfert, Frederic Chill
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 024201 (2024)
https://doi.org/10.1116/6.0003330
Published: March 2024
View articletitled, Simulation of the time-dependent propagation of leak-triggered helium density gradients in cryogenic and nonisothermal accelerator vacuum systems
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Journal Articles

Integrated silicon electron source for high vacuum microelectromechanical system devices

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Michał Krysztof, Paweł Miera, Paweł Urbański, Tomasz Grzebyk, Matthias Hausladen, Rupert Schreiner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 023001 (2024)
https://doi.org/10.1116/6.0003385
Published: March 2024
View articletitled, Integrated silicon electron source for high vacuum microelectromechanical system devices
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Journal Articles

High current field emission from Si nanowires on pillar structures

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Philipp Buchner, Matthias Hausladen, Mathias Bartl, Michael Bachmann, Rupert Schreiner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022208 (2024)
https://doi.org/10.1116/6.0003384
Published: February 2024
View articletitled, High current field emission from Si nanowires on pillar structures
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Journal Articles

Impact of electrical aging on x-ray image quality and dose rate with vertically aligned carbon nanotube based cold cathode electron beam (C-beam)

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Ketan Bhotkar, Yi Yin Yu, Jaydip Sawant, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022207 (2024)
https://doi.org/10.1116/6.0003391
Published: February 2024
View articletitled, Impact of electrical aging on x-ray image quality and dose rate with vertically aligned carbon nanotube based cold cathode electron beam (C-beam)
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Journal Articles

Electron emission properties of titanium nitride coated volcano-structured silicon emitters

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Hiromasa Murata, Katsuhisa Murakami, Masayoshi Nagao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 013203 (2024)
https://doi.org/10.1116/6.0003234
Published: January 2024
View articletitled, Electron emission properties of titanium nitride coated volcano-structured silicon emitters
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Journal Articles

Evaluation of the pumping performance of combinations of Ti–Zr–V–Hf alloy nonevaporable getter coatings with different morphologies, activation protocols controlled at cryogenic temperatures

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Paul Smith, Sam Lodge, Andrew Chew
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 014202 (2024)
https://doi.org/10.1116/6.0003152
Published: January 2024
View articletitled, Evaluation of the pumping performance of combinations of Ti–Zr–V–Hf alloy nonevaporable getter coatings with different morphologies, activation protocols controlled at cryogenic temperatures
Open the PDF for Evaluation of the pumping performance of combinations of Ti–Zr–V–Hf alloy nonevaporable getter coatings with different morphologies, activation protocols controlled at cryogenic temperatures in another window