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Journal Articles

Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications

FeaturedScilight
A. S. Stodolna, T. W. Mechielsen, P. van der Walle, C. Meekes, H. Lensen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052601 (2024)
https://doi.org/10.1116/6.0003701
Published: August 2024
View article titled, Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications
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Journal Articles

Thermal analysis with high accuracy of multi-beam mask fabrication

Yanjun Zhang, Kaijun Dong, Zhuming Liu, Delong Chen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032602 (2024)
https://doi.org/10.1116/6.0003477
Published: April 2024
View article titled, Thermal analysis with high accuracy of multi-beam mask fabrication
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Journal Articles

Effect of beam and gate offset size on x-ray focal spot resolution of a cold cathode electron beam

Jaydip Sawant, Ketan Bhotkar, Yi Yin Yu, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032202 (2024)
https://doi.org/10.1116/6.0003390
Published: April 2024
View article titled, Effect of beam and gate offset size on x-ray focal spot resolution of a cold cathode electron beam
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Journal Articles

Impact of electrical aging on x-ray image quality and dose rate with vertically aligned carbon nanotube based cold cathode electron beam (C-beam)

Ketan Bhotkar, Yi Yin Yu, Jaydip Sawant, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022207 (2024)
https://doi.org/10.1116/6.0003391
Published: February 2024
View article titled, Impact of electrical aging on x-ray image quality and dose rate with vertically aligned carbon nanotube based cold cathode electron beam (C-beam)
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Journal Articles

Heating samples to 2000 °C and above for scanning tunneling microscopy studies in ultrahigh vacuum

Editor’s Pick
Buddhika S. A. Gedara, Michael Trenary
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 014201 (2024)
https://doi.org/10.1116/6.0003280
Published: January 2024
View article titled, Heating samples to 2000 °C and above for scanning tunneling microscopy studies in ultrahigh vacuum
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Includes: Supplementary data
Journal Articles

Interfacial reactivity in the Co/CuO samples as investigated by x-ray photoelectron spectroscopy

A. R. Chourasia, D. R. Chopra
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062806 (2023)
https://doi.org/10.1116/6.0002922
Published: November 2023
View article titled, Interfacial reactivity in the Co/CuO samples as investigated by x-ray photoelectron spectroscopy
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Journal Articles

Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies

Sumit Choudhary, Midathala Yogesh, Daniel Schwarz, Hannes S. Funk, Subrata Ghosh, Satinder K. Sharma, Jörg Schulze, Kenneth E. Gonsalves
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052203 (2023)
https://doi.org/10.1116/6.0002767
Published: August 2023
View article titled, Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies
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Includes: Supplementary data
Journal Articles

Synergy of cold development and electron-beam exposure for Si nanotip patterning in quantum-electronic devices

I-Hsiang Wang, Pei-Wen Li
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052601 (2023)
https://doi.org/10.1116/6.0002845
Published: August 2023
View article titled, Synergy of cold development and electron-beam exposure for Si nanotip patterning in quantum-electronic devices
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Journal Articles

Surface modification of s235 steel, molybdenum, and tungsten using electron beam scanning and electric discharge machining

Piotr Konarski, Joachim Ażgin, Aleksander Zawada, Sung-Hui Feng, Ching-Hsiang Chien, Dong-Yea Sheu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044205 (2023)
https://doi.org/10.1116/6.0002605
Published: June 2023
View article titled, Surface modification of s235 steel, molybdenum, and tungsten using electron beam scanning and electric discharge machining
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Includes: Supplementary data
Journal Articles

Development of 3D tomosynthesis technique for nondestructive technology application using vertically aligned carbon nanotube-based high-resolution cold cathode electron beam

Jaydip Sawant, Yi Yin Yu, Ketan Bhotkar, Hyun-Jung Jung, Gi Joon Nam, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 033201 (2023)
https://doi.org/10.1116/6.0002286
Published: March 2023
View article titled, Development of 3D tomosynthesis technique for nondestructive technology application using vertically aligned carbon nanotube-based high-resolution cold cathode electron beam
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Journal Articles

Effect of water vapor pressure on positive and negative tone electron-beam patterning of poly(methyl methacrylate)

Deepak Kumar, Krishnaroop Chaudhuri, Joseph W. Brill, Jonathan T. Pham, J. Todd Hastings
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012604 (2023)
https://doi.org/10.1116/6.0002118
Published: January 2023
View article titled, Effect of water vapor pressure on positive and negative tone electron-beam patterning of poly(methyl methacrylate)
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Journal Articles

Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices

Editor’s Pick
Kaustubh Vyas, Kashif M. Awan, Ksenia Dolgaleva
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012804 (2023)
https://doi.org/10.1116/6.0002167
Published: January 2023
View article titled, Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices
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Journal Articles

Time response measurement of pulsed electron beam from InGaN photocathode

Daiki Sato, Haruka Shikano, Atsushi Koizumi, Tomohiro Nishitani
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 064204 (2022)
https://doi.org/10.1116/6.0002122
Published: November 2022
View article titled, Time response measurement of pulsed electron beam from InGaN photocathode
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Journal Articles

Scanning electron microscope imaging by selective e-beaming using photoelectron beams from semiconductor photocathodes

Tomohiro Nishitani, Yuta Arakawa,