1-13 of 13
Electromagnetic interactions
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

Measurement of periodicity and strain in arrays of single crystal silicon and pseudomorphic Si1−xGex/Si fin structures using x-ray reciprocal space maps

Manasa Medikonda, Gangadhara R. Muthinti, Jody Fronheiser, Vimal Kamineni, Matthew Wormington, Kevin Matney, Thomas N. Adam, Evguenia Karapetrova, Alain C. Diebold
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 021804 (2014)
https://doi.org/10.1116/1.4863316
Published: February 2014
View articletitled, Measurement of periodicity and strain in arrays of single crystal silicon and pseudomorphic Si1−xGex/Si fin structures using x-ray reciprocal space maps
Open the PDF for Measurement of periodicity and strain in arrays of single crystal silicon and pseudomorphic Si1−xGex/Si fin structures using x-ray reciprocal space maps in another window
Includes: Supplementary data
Journal Articles

Optical properties of TaTe2O7 thin films as absorber materials for extreme ultraviolet lithography binary masks

Hee Young Kang, Pazhanisami Peranantham, Chang Kwon Hwangbo, Hwan-Seok Seo, Seong-Su Kim, Jang Hoon Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06F505 (2012)
https://doi.org/10.1116/1.4766879
Published: November 2012
View articletitled, Optical properties of TaTe2O7 thin films as absorber materials for extreme ultraviolet lithography binary masks
Open the PDF for Optical properties of TaTe2O7 thin films as absorber materials for extreme ultraviolet lithography binary masks in another window
Journal Articles

Spatial coherence in electron-beam patterning

Ginusha M. Perera, Gila E. Stein, J. Alexander Liddle
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, 1048–1055 (2010)
https://doi.org/10.1116/1.3490407
Published: September 2010
View articletitled, Spatial coherence in electron-beam patterning
Open the PDF for Spatial coherence in electron-beam patterning in another window
Journal Articles

Potential contributions of noncontact atomic force microscopy for the future Casimir force measurements

W. J. Kim, U. D. Schwarz
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C4A1–C4A7 (2010)
https://doi.org/10.1116/1.3294709
Published: March 2010
View articletitled, Potential contributions of noncontact atomic force microscopy for the future Casimir force measurements
Open the PDF for Potential contributions of noncontact atomic force microscopy for the future Casimir force measurements in another window
Journal Articles

Grazing incident small angle x-ray scattering: A metrology to probe nanopatterned surfaces

T. Hofmann, E. Dobisz, B. M. Ocko
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 3238–3243 (2009)
https://doi.org/10.1116/1.3253608
Published: December 2009
View articletitled, Grazing incident small angle x-ray scattering: A metrology to probe nanopatterned surfaces
Open the PDF for Grazing incident small angle x-ray scattering: A metrology to probe nanopatterned surfaces in another window
Journal Articles

Fabrication methods for creating flexible polymer substrate sensor tags

Harvey Ho, Jack L. Skinner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 3104–3108 (2009)
https://doi.org/10.1116/1.3258142
Published: December 2009
View articletitled, Fabrication methods for creating flexible polymer substrate sensor tags
Open the PDF for Fabrication methods for creating flexible polymer substrate sensor tags in another window
Journal Articles

Anomalous x-ray diffraction study of disorders in epitaxial films of the Heusler alloy Co 2 Mn Ge

Brian A. Collins, Yuncheng Zhong, Yong S. Chu, Liang He, Frank Tsui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 999–1003 (2007)
https://doi.org/10.1116/1.2720857
Published: May 2007
View articletitled, Anomalous x-ray diffraction study of disorders in epitaxial films of the Heusler alloy Co 2 Mn Ge
Open the PDF for Anomalous x-ray diffraction study of disorders in epitaxial films of the Heusler alloy Co 2 Mn Ge in another window
Journal Articles

Ultracompact electron-beam column

Huei Pei Kuo, Sity Lam, Xia Sheng, Henryk Birecki, Steve Naberhuis
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 1030–1034 (2006)
https://doi.org/10.1116/1.2179455
Published: March 2006
View articletitled, Ultracompact electron-beam column
Open the PDF for Ultracompact electron-beam column in another window
Journal Articles

Optical measurement and fabrication from a Morpho-butterfly-scale quasistructure by focused ion beam chemical vapor deposition

Keiichiro Watanabe, Takayuki Hoshino, Kazuhiro Kanda, Yuichi Haruyama, Takashi Kaito, Shinji Matsui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 570–574 (2005)
https://doi.org/10.1116/1.1868697
Published: April 2005
View articletitled, Optical measurement and fabrication from a Morpho-butterfly-scale quasistructure by focused ion beam chemical vapor deposition
Open the PDF for Optical measurement and fabrication from a Morpho-butterfly-scale quasistructure by focused ion beam chemical vapor deposition in another window
Journal Articles

Polyvinyl alcohol templates for low cost, high resolution, complex printing

Charles D. Schaper, Alan Miahnahri
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 22, 3323–3326 (2004)
https://doi.org/10.1116/1.1827218
Published: December 2004
View articletitled, Polyvinyl alcohol templates for low cost, high resolution, complex printing
Open the PDF for Polyvinyl alcohol templates for low cost, high resolution, complex printing in another window
Journal Articles

Review of progress in extreme ultraviolet lithography masks

Scott Hector, Pawitter Mangat
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 19, 2612–2616 (2001)
https://doi.org/10.1116/1.1408957
Published: November 2001
View articletitled, Review of progress in extreme ultraviolet lithography masks
Open the PDF for Review of progress in extreme ultraviolet lithography masks in another window
Journal Articles

Calculated I–V characteristics of a gold liquid metal ion source for a prototype emitter modeled as a cone–sphere

Shana Nicole Miskovsky, N. M. Miskovsky, P. H. Cutler
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 12, 737–744 (1994)
https://doi.org/10.1116/1.587382
Published: March 1994
View articletitled, Calculated I–V characteristics of a gold liquid metal ion source for a prototype emitter modeled as a cone–sphere
Open the PDF for Calculated I–V characteristics of a gold liquid metal ion source for a prototype emitter modeled as a cone–sphere in another window
Journal Articles

Tape automated bonding inner lead bonding with a laser for high performance applications

Phillip J. Spletter, Claire T. Galanakis, Neik Luijtjes, Colin MacKay, Yong Jee, Ollie C. Woodard
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 7, 1967–1970 (1989)
https://doi.org/10.1116/1.584658
Published: November 1989
View articletitled, Tape automated bonding inner lead bonding with a laser for high performance applications
Open the PDF for Tape automated bonding inner lead bonding with a laser for high performance applications in another window