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Journal Articles

Computational lithography: Exhausting the resolution limits of 193-nm projection lithography systems

David O. S. Melville, Alan E. Rosenbluth, Andreas Waechter, Marc Millstone, Jaione Tirapu-Azpiroz, Kehan Tian, Kafai Lai, Tadanobu Inoue, Masaharu Sakamoto, Kostas Adam, Alexander Tritchkov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06FH04 (2011)
https://doi.org/10.1116/1.3662090
Published: November 2011
View article titled, Computational lithography: Exhausting the resolution limits of 193-nm projection lithography systems
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Journal Articles

Analysis of a scheme for de-magnified Talbot lithography

L. Urbanski, M. C. Marconi, A. Isoyan, A. Stein, C. S. Menoni, J. J. Rocca
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06F504 (2011)
https://doi.org/10.1116/1.3653507
Published: November 2011
View article titled, Analysis of a scheme for de-magnified Talbot lithography
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Journal Articles

Improving lithography pattern fidelity and line-edge roughness by reducing laser speckle

Oleg Kritsun, Ivan Lalovic, Slava Rokitski, Bill Partlo, Bruno La Fontaine, Nigel Farrar, Harry Levinson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 2145–2150 (2008)
https://doi.org/10.1116/1.2992027
Published: December 2008
View article titled, Improving lithography pattern fidelity and line-edge roughness by reducing laser speckle
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Journal Articles

Optical antennas: A boost for infrared detection

Huifeng Li, Xing Cheng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 2156–2159 (2008)
https://doi.org/10.1116/1.3013272
Published: December 2008
View article titled, Optical antennas: A boost for infrared detection
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Journal Articles

Self-aligned metal-contact and passivation technique for submicron ridge waveguide laser fabrication

J. H. Teng, E. L. Lim, S. J. Chua, S. S. Ang, L. F. Chong, J. R. Dong, R. Yin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 1748–1752 (2008)
https://doi.org/10.1116/1.2982246
Published: September 2008
View article titled, Self-aligned metal-contact and passivation technique for submicron ridge waveguide laser fabrication
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Journal Articles

Fabrication and tuning of nanoscale metallic ring and split-ring arrays

A. K. Sheridan, A. W. Clark, A. Glidle, J. M. Cooper, D. R. S. Cumming
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 2628–2631 (2007)
https://doi.org/10.1116/1.2794328
Published: December 2007
View article titled, Fabrication and tuning of nanoscale metallic ring and split-ring arrays
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Journal Articles

Optical waveguide loss induced by metal cladding

Jie Lin, Andreas Leven, R. Reyes, Y. K. Chen, Fow-sen Choa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 1361–1363 (2005)
https://doi.org/10.1116/1.1990126
Published: July 2005
View article titled, Optical waveguide loss induced by metal cladding
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Journal Articles

Critical tool performance analysis for SCALPEL extensibility

Stuart T. Stanton, J. Alexander Liddle, Warren K. Waskiewicz, Masis M. Mkrtchyan
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 18, 112–116 (2000)
https://doi.org/10.1116/1.591160
Published: January 2000
View article titled, Critical tool performance analysis for SCALPEL extensibility
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Journal Articles

Projection reduction exposure with variable axis immersion lenses: Next generation lithography

H. C. Pfeiffer, R. S. Dhaliwal, S. D. Golladay, S. K. Doran, M. S. Gordon, T. R. Groves, R. A. Kendall, J. E. Lieberman, P. F. Petric, D. J. Pinckney, R. J. Quickle, C. F. Robinson, J. D. Rockrohr, J. J. Senesi, W. Stickel, E. V. Tressler, A. Tanimoto, T. Yamaguchi, K. Okamoto, K. Suzuki, T. Okino, S. Kawata, K. Morita, S. C. Suziki, H. Shimizu, S. Kojima, G. Varnell, W. T. Novak, D. P. Stumbo, M. Sogard
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 17, 2840–2846 (1999)
https://doi.org/10.1116/1.591080
Published: November 1999
View article titled, Projection reduction exposure with variable axis immersion lenses: Next generation lithography
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Journal Articles

Fabrication of a microcavity structure with a polyimide thin film prepared by vacuum deposition polymerization

Y. Sakakibara, T. Tani
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 17, 1361–1365 (1999)
https://doi.org/10.1116/1.590761
Published: July 1999
View article titled, Fabrication of a microcavity structure with a polyimide thin film prepared by vacuum deposition polymerization
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Journal Articles

Particle manipulation and surface patterning by laser guidance

Michael J. Renn, Robert Pastel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 16, 3859–3863 (1998)
https://doi.org/10.1116/1.590424
Published: November 1998
View article titled, Particle manipulation and surface patterning by laser guidance
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Journal Articles

Intensification of optical electric fields caused by the interaction with a metal tip in photofield emission and laser-assisted scanning tunneling microscopy

Mark J. Hagmann
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 15, 597–601 (1997)
https://doi.org/10.1116/1.589298
Published: May 1997
View article titled, Intensification of optical electric fields caused by the interaction with a metal tip in photofield emission and laser-assisted scanning tunneling microscopy
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Journal Articles

Simulations of the interaction of tunneling electrons with optical fields in laser‐illuminated field emission

Mark J. Hagmann
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 13, 1348–1352 (1995)
https://doi.org/10.1116/1.587851
Published: May 1995
View article titled, Simulations of the interaction of tunneling electrons with optical fields in laser‐illuminated field emission
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