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Journal Articles

Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask

Featured
Shiyang Li, Shuhu Huan, Tao Ren, Ying Liu, Yilin Hong, Shaojun Fu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062603 (2024)
https://doi.org/10.1116/6.0003946
Published: November 2024
View article titled, Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask
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Journal Articles

High-efficiency metalenses for zone-plate-array lithography

Henry I. Smith, Mark Mondol, Feng Zhang, Timothy Savas, Michael Walsh
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062601 (2023)
https://doi.org/10.1116/6.0003024
Published: September 2023
View article titled, High-efficiency metalenses for zone-plate-array lithography
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Journal Articles

Transmission Mueller-matrix characterization of transparent ramie films

Arturo Mendoza-Galván, Yuanyuan Li, Xuan Yang, Roger Magnusson, Kenneth Järrendahl, Lars Berglund, Hans Arwin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 014008 (2020)
https://doi.org/10.1116/1.5129651
Published: December 2019
View article titled, Transmission Mueller-matrix characterization of transparent ramie films
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Journal Articles

Characterizing profile tilt of nanoscale deep-etched gratings via x-ray diffraction

Jungki Song, Ralf K. Heilmann, Alexander R. Bruccoleri, Mark L. Schattenburg
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062917 (2019)
https://doi.org/10.1116/1.5119713
Published: October 2019
View article titled, Characterizing profile tilt of nanoscale deep-etched gratings via x-ray diffraction
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Journal Articles

Direct laser writing of birefringent photonic crystals for the infrared spectral range

Editor’s Pick
Marc Lata, Yanzeng Li, Serang Park, Micheal J. McLamb, Tino Hofmann
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062905 (2019)
https://doi.org/10.1116/1.5122991
Published: October 2019
View article titled, Direct laser writing of birefringent photonic crystals for the infrared spectral range
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Journal Articles

Reflective metamaterial polarizer enabled by solid-immersion Lloyd's mirror interference lithography

Fan Hong, Richard Blaikie
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061801 (2019)
https://doi.org/10.1116/1.5119138
Published: September 2019
View article titled, Reflective metamaterial polarizer enabled by solid-immersion Lloyd's mirror interference lithography
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Journal Articles

Tip-to-tip variation mitigation in extreme ultraviolet lithography for 7 nm and beyond metallization layers and design rule analysis

Yulu Chen, Lei Sun, Zhengqing John Qi, Shuo Zhao, Francis Goodwin, Itty Matthew, Vince Plachecki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G601 (2017)
https://doi.org/10.1116/1.4994908
Published: November 2017
View article titled, Tip-to-tip variation mitigation in extreme ultraviolet lithography for 7 nm and beyond metallization layers and design rule analysis
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Journal Articles

Two-beam interference patterning of biodegradable magnesium alloy: Influence of number of passes and spots overlap

Valentina Furlan, Marco Biondi, Ali Gökhan Demir, Barbara Previtali, Giorgio Pariani, Andrea Bianco
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 01A102 (2018)
https://doi.org/10.1116/1.4996504
Published: October 2017
View article titled, Two-beam interference patterning of biodegradable magnesium alloy: Influence of number of passes and spots overlap
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Journal Articles

Pulsed laser assisted synthesis of Ho3+/Yb3+ codoped CaMoO4 nanocolloid and its upconversion luminescence

Kyoungwon Cho, Jaeha Choi, Sungwook Mhin, Kang Min Kim, Jung-Il Lee, Jeong Ho Ryu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 041201 (2015)
https://doi.org/10.1116/1.4922024
Published: June 2015
View article titled, Pulsed laser assisted synthesis of Ho<sup>3+</sup>/Yb<sup>3+</sup> codoped CaMoO<sub>4</sub> nanocolloid and its upconversion luminescence
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Journal Articles

Fabrication of large-scale spherical-cap structure and the application on n-GaN based light-emitting diodes

Hong-Xing Yin, Chuan-Rui Zhu, Yan Shen, Hai-Fang Yang, Zhe Liu, Chang-Zhi Gu, Bao-Li Liu, Xian-Gang Xu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 031208 (2014)
https://doi.org/10.1116/1.4874611
Published: May 2014
View article titled, Fabrication of large-scale spherical-cap structure and the application on n-GaN based light-emitting diodes
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Journal Articles

Growth properties and resistive switching effects of diamond-like carbon films deposited using a linear ion source

Wei Dai, Peiling Ke, Aiying Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 031207 (2013)
https://doi.org/10.1116/1.4803741
Published: May 2013
View article titled, Growth properties and resistive switching effects of diamond-like carbon films deposited using a linear ion source
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Journal Articles

Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays

Serhiy Danylyuk, Hyun-su Kim, Sascha Brose, Carsten Dittberner, Peter Loosen, Thomas Taubner, Klaus Bergmann, Larissa Juschkin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 021602 (2013)
https://doi.org/10.1116/1.4789445
Published: January 2013
View article titled, Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays
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Journal Articles

Selective laser ablation of radiation exposed methyl acetoxy calix(6)arene

Pradeep N. Perera, Adam M. Schwartzberg, Dimas G. de Oteyza, Scott D. Dhuey, Bruce D. Harteneck, Stefano Cabrini, Deirdre L. Olynick
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06FI02 (2012)
https://doi.org/10.1116/1.4767347
Published: November 2012
View article titled, Selective laser ablation of radiation exposed methyl acetoxy calix(6)arene
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Journal Articles

Scanned-spot-array extreme ultraviolet imaging for high-volume maskless lithography

Kenneth C. Johnson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 051606 (2012)
https://doi.org/10.1116/1.4752112
Published: September 2012
View article titled, Scanned-spot-array extreme ultraviolet imaging for high-volume maskless lithography
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Journal Articles

Probing temporal evolution of extreme ultraviolet assisted contamination on Ru mirror by x-ray photoelectron spectroscopy

A. Al-Ajlony, A. Kanjilal, M. Catalfano, M. Fields, S. S. Harilal, A. Hassanein, B. Rice
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 021601 (2012)
https://doi.org/10.1116/1.3680122
Published: February 2012
View article titled, Probing temporal evolution of extreme ultraviolet assisted contamination on Ru mirror by x-ray photoelectron spectroscopy
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Journal Articles

Process window modeling using focus balancing technique

Artak Isoyan, Ebo Croffie, Lawrence S. Melvin, III
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06F903 (2011)
https://doi.org/10.1116/1.3662407
Published: November 2011
View article titled, Process window modeling using focus balancing technique
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Journal Articles

Analysis of a scheme for de-magnified Talbot lithography

L. Urbanski, M. C. Marconi, A. Isoyan, A. Stein, C. S. Menoni, J. J. Rocca
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06F504 (2011)
https://doi.org/10.1116/1.3653507
Published: November 2011
View article titled, Analysis of a scheme for de-magnified Talbot lithography
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Journal Articles

Flexible poly(dimethyl siloxane) support layers for the evanescent characterization of near-field lithography systems

Ciaran P. Moore, Richard J. Blaikie
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06FH02 (2011)
https://doi.org/10.1116/1.3653511
Published: October 2011
View article titled, Flexible poly(dimethyl siloxane) support layers for the evanescent characterization of near-field lithography systems
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Journal Articles

3D Nanostructuring of hydrogen silsesquioxane resist by 100 keV electron beam lithography

Joan Vila-Comamala, Sergey Gorelick, Vitaliy A. Guzenko, Christian David
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06F301 (2011)
https://doi.org/10.1116/1.3629811
Published: August 2011
View article titled, 3D Nanostructuring of hydrogen silsesquioxane resist by 100 keV electron beam lithography
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Journal Articles

Optimizing photon sieves to approach Fresnel diffraction limit via pixel-based inverse lithography

Mosong Cheng, Chenggang Zhou
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 041002 (2011)
https://doi.org/10.1116/1.3605473
Published: July 2011
View article titled, Optimizing photon sieves to approach Fresnel diffraction limit via pixel-based inverse lithography
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