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Journal Articles

Lithographic characterization of the field dependent astigmatism and alignment stability of a 0.3 numerical aperture extreme ultraviolet microfield optic

Patrick P. Naulleau, Jason P. Cain, Kenneth A. Goldberg
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 2003–2006 (2005)
https://doi.org/10.1116/1.2037647
Published: September 2005
View articletitled, Lithographic characterization of the field dependent astigmatism and alignment stability of a 0.3 numerical aperture extreme ultraviolet microfield optic
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Journal Articles

Astigmatism measurement by lateral shearing interferometer

Zhiqiang Liu, Kasumi Sugisaki, Mikihiko Ishii, Yucong Zhu, Jun Saito, Akiyosi Suzuki, Masanobu Hasegawa, Katsuhiko Murakami
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 22, 2980–2983 (2004)
https://doi.org/10.1116/1.1815307
Published: December 2004
View articletitled, Astigmatism measurement by lateral shearing interferometer
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