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Journal Articles

Development of two-color resonant ionization sputtered neutral mass spectrometry and microarea imaging for Sr

Yue Zhao, Takeru Yoshida, Yuzuka Ohmori, Yuta Miyashita, Masato Morita, Tetsuo Sakamoto, Kotaro Kato, Ryohei Terabayashi, Volker Sonnenschein, Hideki Tomita, Toshihide Kawai, Takeo Okumura, Yukihiko Satou, Masabumi Miyabe, Ikuo Wakaida
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 044001 (2020)
https://doi.org/10.1116/6.0000006
Published: May 2020
View articletitled, Development of two-color resonant ionization sputtered neutral mass spectrometry and microarea imaging for Sr
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Journal Articles

Current-driven interface magnetic transition in complex oxide heterostructure

F. Fang, H. Zhai, X. Ma, Y. W. Yin, Qi Li, G. Lüpke
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 04F101 (2017)
https://doi.org/10.1116/1.4976587
Published: February 2017
View articletitled, Current-driven interface magnetic transition in complex oxide heterostructure
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Journal Articles

Coexistence of weak ferromagnetism and polar lattice distortion in epitaxial NiTiO3 thin films of the LiNbO3-type structure

Tamas Varga, Timothy C. Droubay, Mark E. Bowden, Robert J. Colby, Sandeep Manandhar, Vaithiyalingam Shutthanandan, Dehong Hu, Bernd C. Kabius, Edoardo Apra, William A. Shelton, Scott A. Chambers
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 030603 (2013)
https://doi.org/10.1116/1.4801664
Published: April 2013
View articletitled, Coexistence of weak ferromagnetism and polar lattice distortion in epitaxial NiTiO3 thin films of the LiNbO3-type structure
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Includes: Supplementary data
Journal Articles

Charge trapping defects in Si / SiO 2 / Hf ( 1 − x ) Si x O 2 film stacks characterized by spectroscopic second-harmonic generation

J. Price, Ming Lei, P. S. Lysaght, G. Bersuker, M. C. Downer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 04D101 (2011)
https://doi.org/10.1116/1.3591433
Published: May 2011
View articletitled, Charge trapping defects in Si / SiO 2 / Hf ( 1 − x ) Si x O 2 film stacks characterized by spectroscopic second-harmonic generation
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Journal Articles

Probing and modeling of interfacial carrier motion in organic devices by optical second harmonic generation

Mitsumasa Iwamoto, Takaaki Manaka, Martin Weis, Dai Taguchi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C5F12–C5F16 (2010)
https://doi.org/10.1116/1.3454371
Published: July 2010
View articletitled, Probing and modeling of interfacial carrier motion in organic devices by optical second harmonic generation
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Journal Articles

Enhancement in hyper-numerical-aperture imaging through selective TM polarization

Bruce Smith, Jianming Zhou, Peng Xie
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 2116–2120 (2008)
https://doi.org/10.1116/1.3002565
Published: December 2008
View articletitled, Enhancement in hyper-numerical-aperture imaging through selective TM polarization
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Journal Articles

Fabrication of periodically polarity-inverted ZnO films

T. Minegishi, A. Ishizawa, J. Kim, D. Kim, S. Ahn, S. Park, J. Park, I. Im, D. C. Oh, H. Nakano, K. Fujii, H. Jeon, T. Yao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 1120–1123 (2008)
https://doi.org/10.1116/1.2905244
Published: May 2008
View articletitled, Fabrication of periodically polarity-inverted ZnO films
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Journal Articles

Route to production of suspended perforated membranes

D. B. Burckel, S. R. J. Brueck
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 589–592 (2008)
https://doi.org/10.1116/1.2889431
Published: March 2008
View articletitled, Route to production of suspended perforated membranes
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Journal Articles

Phase control in multiexposure spatial frequency multiplication

Yong Zhao, Chih-Hao Chang, Ralf K. Heilmann, Mark L. Schattenburg
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 2439–2443 (2007)
https://doi.org/10.1116/1.2794318
Published: December 2007
View articletitled, Phase control in multiexposure spatial frequency multiplication
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Journal Articles

Fabrication of 22 nm half-pitch silicon lines by single-exposure self-aligned spatial-frequency doubling

Alex K. Raub, Dong Li, Andrew Frauenglass, S. R. J. Brueck
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 2224–2227 (2007)
https://doi.org/10.1116/1.2801889
Published: December 2007
View articletitled, Fabrication of 22 nm half-pitch silicon lines by single-exposure self-aligned spatial-frequency doubling
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Journal Articles

Optical characterization of process-dependent charging in hafnium oxide structures

R. Carriles, J. Kwon, Y. Q. An, L. Sun, S. K. Stanley, J. G. Ekerdt, M. C. Downer, J. Price, T. Boescke, A. C. Diebold
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 2160–2168 (2006)
https://doi.org/10.1116/1.2218867
Published: July 2006
View articletitled, Optical characterization of process-dependent charging in hafnium oxide structures
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Journal Articles

Emission characteristics of printed carbon nanotube cathodes after laser treatment

Akihiko Hosono, Tetsuya Shiroishi, Kunihiko Nishimura, Fumio Abe, Zhiying Shen, Shuhei Nakata, Soichiro Okuda
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 1423–1427 (2006)
https://doi.org/10.1116/1.2202123
Published: May 2006
View articletitled, Emission characteristics of printed carbon nanotube cathodes after laser treatment
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Journal Articles

Improvement of emission characteristics uniformity of carbon nanotube field emission display by surface treatment

Tetsuya Shiroishi, Akihiko Hosono, Atsuhiro Sono, Kunihiko Nishimura, Yousuke Suzuki, Shuhei Nakata, Soichiro Okuda
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 979–982 (2006)
https://doi.org/10.1116/1.2172955
Published: March 2006
View articletitled, Improvement of emission characteristics uniformity of carbon nanotube field emission display by surface treatment
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Journal Articles

Characterization of the synchrotron-based 0.3 numerical aperture extreme ultraviolet microexposure tool at the Advanced Light Source

Patrick Naulleau, Jason P. Cain, Erik Anderson, Kim Dean, Paul Denham, Kenneth A. Goldberg, Brian Hoef, Keith Jackson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 2840–2843 (2005)
https://doi.org/10.1116/1.2127940
Published: December 2005
View articletitled, Characterization of the synchrotron-based 0.3 numerical aperture extreme ultraviolet microexposure tool at the Advanced Light Source
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Journal Articles

Hybrid optical maskless lithography: Scaling beyond the 45 nm node

M. Fritze, T. M. Bloomstein, B. Tyrrell, T. H. Fedynyshyn, N. N. Efremow, Jr., D. E. Hardy, S. Cann, D. Lennon, S. Spector, M. Rothschild, P. Brooker
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 2743–2748 (2005)
https://doi.org/10.1116/1.2062327
Published: December 2005
View articletitled, Hybrid optical maskless lithography: Scaling beyond the 45 nm node
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Journal Articles

Large-area patterning for photonic crystals via coherent diffraction lithography

Christel Zanke, Minghao Qi, Henry I. Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 22, 3352–3355 (2004)
https://doi.org/10.1116/1.1813448
Published: December 2004
View articletitled, Large-area patterning for photonic crystals via coherent diffraction lithography
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Journal Articles

Nanometer gap measurement and verification via the chirped-Talbot effect

Euclid E. Moon, Lynn Chen, Patrick N. Everett, Mark K. Mondol, Henry I. Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 22, 3378–3381 (2004)
https://doi.org/10.1116/1.1808739
Published: December 2004
View articletitled, Nanometer gap measurement and verification via the chirped-Talbot effect
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Journal Articles

Molecular-beam epitaxy growth of quantum cascade lasers on (111)B substrates for second harmonic generation

X. Marcadet, V. Ortiz, J.-Y. Bengloan, S. Dhillon, M. Calligaro, C. Sirtori
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 22, 1558–1561 (2004)
https://doi.org/10.1116/1.1752916
Published: June 2004
View articletitled, Molecular-beam epitaxy growth of quantum cascade lasers on (111)B substrates for second harmonic generation
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Journal Articles

Application of the simplified bond-hyperpolarizability model to fourth-harmonic generation

J.-K. Hansen, H. J. Peng, D. E. Aspnes
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 21, 1798–1803 (2003)
https://doi.org/10.1116/1.1593057
Published: August 2003
View articletitled, Application of the simplified bond-hyperpolarizability model to fourth-harmonic generation
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Journal Articles

Simplified bond-hyperpolarizability model of second harmonic generation: Application to Si-dielectric interfaces

J.-F. T. Wang, G. D. Powell, R. S. Johnson, G. Lucovsky, D. E. Aspnes
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 20, 1699–1705 (2002)
https://doi.org/10.1116/1.1493783
Published: August 2002
View articletitled, Simplified bond-hyperpolarizability model of second harmonic generation: Application to Si-dielectric interfaces
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