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Journal Articles

Optical angular scatterometry: In-line metrology approach for roll-to-roll and nanoimprint fabrication

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Juan J. Faria-Briceno, Ruichao Zhu, Vineeth Sasidharan, Alexander Neumann, Shrawan Singhal, S. V. Sreenivasan, S. R. J. Brueck
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 052904 (2019)
https://doi.org/10.1116/1.5119707
Published: September 2019
View article titled, Optical angular scatterometry: In-line metrology approach for roll-to-roll and nanoimprint fabrication
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Journal Articles

Scatterometry for nanoimprint lithography

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Ruichao Zhu, Steven R. J. Brueck, Noel Dawson, Tito Busani, Praveen Joseph, Shrawan Singhal, S. V. Sreenivasan
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06K503 (2016)
https://doi.org/10.1116/1.4967933
Published: November 2016
View article titled, Scatterometry for nanoimprint lithography
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Journal Articles

Deposition and etching characteristic of magnetite thin film for absorptive wire grid polarizer with 45 nm line and space pattern

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Young Tae Cho, Jiyun Jeong, Ji Hoon Kim, Yun Jae Kim, Yeon Ho Jeong, Yoon Gyo Jung, Sin Kwon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06K407 (2016)
https://doi.org/10.1116/1.4964822
Published: October 2016
View article titled, Deposition and etching characteristic of magnetite thin film for absorptive wire grid polarizer with 45 nm line and space pattern
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Journal Articles

Compact mirror-tunable laser interference system for wafer-scale patterning of grating structures with flexible periodicity

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Yung-Jr Hung, Ping-Chien Chang, Yu-Nung Lin, Jia-Jin Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 040609 (2016)
https://doi.org/10.1116/1.4955172
Published: June 2016
View article titled, Compact mirror-tunable laser interference system for wafer-scale patterning of grating structures with flexible periodicity
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Journal Articles

High-throughput fabrication of compact and flexible bilayer nanowire grid polarizers for deep-ultraviolet to infrared range

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Li Wang, Helmut Schift, Jens Gobrecht, Yasin Ekinci, Per Magnus Kristiansen, Harun H. Solak, Konstantins Jefimovs
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 031206 (2014)
https://doi.org/10.1116/1.4874318
Published: April 2014
View article titled, High-throughput fabrication of compact and flexible bilayer nanowire grid polarizers for deep-ultraviolet to infrared range
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Journal Articles

High-density pattern transfer via roll-to-roll ultraviolet nanoimprint lithography using replica mold

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Jun Taniguchi, Hiroshi Yoshikawa, Go Tazaki, Toshiyuki Zento
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06FB07 (2012)
https://doi.org/10.1116/1.4758922
Published: October 2012
View article titled, High-density pattern transfer via roll-to-roll ultraviolet nanoimprint lithography using replica mold
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Journal Articles

Application of double patterning technology to fabricate optical elements: Process simulation, fabrication, and measurement

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S. Babin, G. Glushenko, T. Weber, T. Kaesebier, E.-B. Kley, A. Szeghalmi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 031605 (2012)
https://doi.org/10.1116/1.3698315
Published: April 2012
View article titled, Application of double patterning technology to fabricate optical elements: Process simulation, fabrication, and measurement
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Journal Articles

Large-diameter roll mold fabrication method using a small-diameter quartz roll mold and UV nanoimprint lithography

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Jun Taniguchi, Noriyuki Unno, Hiroki Maruyama
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06FC08 (2011)
https://doi.org/10.1116/1.3657524
Published: November 2011
View article titled, Large-diameter roll mold fabrication method using a small-diameter quartz roll mold and UV nanoimprint lithography
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Journal Articles

Fabrication of a seamless roll mold by direct writing with an electron beam on a rotating cylindrical substrate

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Jun Taniguchi, Masao Aratani
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 2841–2845 (2009)
https://doi.org/10.1116/1.3237141
Published: December 2009
View article titled, Fabrication of a seamless roll mold by direct writing with an electron beam on a rotating cylindrical substrate
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Journal Articles

58 nm half-pitch plastic wire-grid polarizer by nanoimprint lithography

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Lei Chen, Jian Jim Wang, Frank Walters, Xuegong Deng, Mike Buonanno, Stephen Tai, Xiaoming Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 2654–2657 (2007)
https://doi.org/10.1116/1.2801967
Published: December 2007
View article titled, 58 nm half-pitch plastic wire-grid polarizer by nanoimprint lithography
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Journal Articles

Bilayer metal wire-grid polarizer fabricated by roll-to-roll nanoimprint lithography on flexible plastic substrate

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Se Hyun Ahn, Jin-Sung Kim, L. Jay Guo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 2388–2391 (2007)
https://doi.org/10.1116/1.2798747
Published: December 2007
View article titled, Bilayer metal wire-grid polarizer fabricated by roll-to-roll nanoimprint lithography on flexible plastic substrate
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