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Journal Articles

Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography

Henock Demessie Yallew, Jana Jágerská, Martin M. Greve
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012601 (2023)
https://doi.org/10.1116/6.0002187
Published: December 2022
View article titled, Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography
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Journal Articles

Electron beam lithography using fixed beam moving stage

Iman Khodadad, Nathan Nelson-Fitzpatrick, Kevin Burcham, Arsen Hajian, Simarjeet S. Saini
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 051601 (2017)
https://doi.org/10.1116/1.4997018
Published: August 2017
View article titled, Electron beam lithography using fixed beam moving stage
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Journal Articles

Defect density reduction in core layer of ZnTe electro-optical waveguide by low lattice mismatched interfaces

Wei-Che Sun, Taizo Nakusu, Keisuke Odaka, Masakazu Kobayashi, Toshiaki Asahi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 04F104 (2017)
https://doi.org/10.1116/1.4984962
Published: June 2017
View article titled, Defect density reduction in core layer of ZnTe electro-optical waveguide by low lattice mismatched interfaces
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Journal Articles

Crystallization and microstructure evolution of nanoscale NiTi thin films prepared by biased target ion beam deposition

Huilong Hou, Reginald F. Hamilton, Mark W. Horn
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 010601 (2016)
https://doi.org/10.1116/1.4936392
Published: November 2015
View article titled, Crystallization and microstructure evolution of nanoscale NiTi thin films prepared by biased target ion beam deposition
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Journal Articles

Numerical study of the laser-tip coupling in surface plasmon assisted stacked-double-gate field emitter arrays

Youngjin Oh, Anna Mustonen, Thomas Feurer, Soichiro Tsujino
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 03C112 (2015)
https://doi.org/10.1116/1.4915252
Published: March 2015
View article titled, Numerical study of the laser-tip coupling in surface plasmon assisted stacked-double-gate field emitter arrays
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Journal Articles

Structural defects responsible for excessive leakage current in Schottky diodes prepared on undoped n-GaN films grown by hydride vapor phase epitaxy

Alexander Y. Polyakov, Eugene B. Yakimov, Nikolai B. Smirnov, Anatoliy V. Govorkov, Alexander S. Usikov, Heikki Helava, Yuri N. Makarov, In-Hwan Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 051212 (2014)
https://doi.org/10.1116/1.4895658
Published: September 2014
View article titled, Structural defects responsible for excessive leakage current in Schottky diodes prepared on undoped n-GaN films grown by hydride vapor phase epitaxy
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Journal Articles

Fabrication of sub-200 nm AlN-GaN-AlN waveguide with cleaved end facet

Yijing Chen, Vivek Krishnamurthy, Yicheng Lai, Yi Luo, Zhibiao Hao, Lai Wang, Seng-Tiong Ho
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 041207 (2014)
https://doi.org/10.1116/1.4890487
Published: July 2014
View article titled, Fabrication of sub-200 nm AlN-GaN-AlN waveguide with cleaved end facet
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Journal Articles

Inductively coupled plasma reactive ion etching of GaAs wafer pieces with enhanced device yield

Michael K. Connors, Leo J. Missaggia, William S. Spencer, George W. Turner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 021207 (2014)
https://doi.org/10.1116/1.4867356
Published: March 2014
View article titled, Inductively coupled plasma reactive ion etching of GaAs wafer pieces with enhanced device yield
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Journal Articles

Semipolar ( 20 2 ¯ 1 ) GaN laser diodes operating at 388 nm grown by plasma-assisted molecular beam epitaxy

Marta Sawicka, Grzegorz Muziol, Henryk Turski, Anna Feduniewicz-Żmuda, Marcin Kryśko, Szymon Grzanka, Ewa Grzanka, Julita Smalc-Koziorowska, Martin Albrecht, Robert Kucharski, Piotr Perlin, Czeslaw Skierbiszewski
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 02C115 (2014)
https://doi.org/10.1116/1.4865913
Published: February 2014
View article titled, Semipolar ( 20 2 ¯ 1 ) GaN laser diodes operating at 388 nm grown by plasma-assisted molecular beam epitaxy
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Journal Articles

Microcathodoluminescence spectra evolution for planar and nanopillar multiquantum-well GaN-based structures as a function of electron irradiation dose

Eugene B. Yakimov, Paul S. Vergeles, Alexander Y. Polyakov, Han-Su Cho, Lee-Woon Jang, In-Hwan Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 011207 (2014)
https://doi.org/10.1116/1.4840255
Published: December 2013
View article titled, Microcathodoluminescence spectra evolution for planar and nanopillar multiquantum-well GaN-based structures as a function of electron irradiation dose
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Journal Articles

Chamber conditioning process development for improved inductively coupled plasma reactive ion etching of GaAs/AlGaAs materials

Michael K. Connors, Jason J. Plant, Kevin G. Ray, George W. Turner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 021207 (2013)
https://doi.org/10.1116/1.4792839
Published: February 2013
View article titled, Chamber conditioning process development for improved inductively coupled plasma reactive ion etching of GaAs/AlGaAs materials
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Journal Articles

Fabrication of digital planar holograms into high refractive index waveguide core for spectroscopy-on-chip applications

Cosimo Calò, Valeria Lacatena, Scott D. Dhuey, Stefano Cabrini, Sergey Babin, Christophe Peroz, Alexander Koshelev, Igor Ivonin, Alexander Goltsov, Vladimir Yankov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06FE01 (2012)
https://doi.org/10.1116/1.4750038
Published: September 2012
View article titled, Fabrication of digital planar holograms into high refractive index waveguide core for spectroscopy-on-chip applications
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Journal Articles

Electron beam direct write of chalcogenide glass integrated optics

Galen B. Hoffman, Ronald M. Reano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06F301 (2012)
https://doi.org/10.1116/1.4748567
Published: August 2012
View article titled, Electron beam direct write of chalcogenide glass integrated optics
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Journal Articles

Inductively coupled plasma deep etching of InP/InGaAsP in Cl2/CH4/H2 based chemistries with the electrode at 20 °C

Andreas Wieczorek, Vladimir Djara, Frank H. Peters, James O’Callaghan, Kevin Thomas, Brian Corbett
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 051208 (2012)
https://doi.org/10.1116/1.4748807
Published: August 2012
View article titled, Inductively coupled plasma deep etching of InP/InGaAsP in Cl<sub>2</sub>/CH<sub>4</sub>/H<sub>2</sub> based chemistries with the electrode at 20 °C
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Journal Articles

Electron-beam lithography for photonic waveguide fabrication: Measurement of the effect of field stitching errors on optical performance and evaluation of a new compensation method

Alexei L. Bogdanov, Jean Lapointe, Jens H. Schmid
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 031606 (2012)
https://doi.org/10.1116/1.3700439
Published: April 2012
View article titled, Electron-beam lithography for photonic waveguide fabrication: Measurement of the effect of field stitching errors on optical performance and evaluation of a new compensation method
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Journal Articles

Deep anisotropic LiNbO3 etching with SF6/Ar inductively coupled plasmas

Deng Jun, Jia Wei, Ching Eng Png, Si Guangyuan, Jaesung Son, Hyunsoo Yang, Aaron J. Danner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 011208 (2012)
https://doi.org/10.1116/1.3674282
Published: January 2012
View article titled, Deep anisotropic LiNbO<sub>3</sub> etching with SF<sub>6</sub>/Ar inductively coupled plasmas
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Journal Articles

Electron beam lithography writing strategies for low loss, high confinement silicon optical waveguides

Richard J. Bojko, Jing Li, Li He, Tom Baehr-Jones, Michael Hochberg, Yukinori Aida
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06F309 (2011)
https://doi.org/10.1116/1.3653266
Published: October 2011
View article titled, Electron beam lithography writing strategies for low loss, high confinement silicon optical waveguides
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Journal Articles

Deep traps and thermal measurements on AlGaN/GaN on Si transistors

C. F. Lo, Fan Ren, S. J. Pearton, A. Y. Polyakov, N. B. Smirnov, A. V. Govorkov, I. A. Belogorokhov, A. I. Belogorokhov, V. Y. Reznik, J. W. Johnson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 042201 (2011)
https://doi.org/10.1116/1.3605304
Published: June 2011
View article titled, Deep traps and thermal measurements on AlGaN/GaN on Si transistors
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Journal Articles

Colloidal optical waveguides with integrated local light sources built by capillary force assembly

O. Lecarme, T. Pinedo Rivera, L. Arbez, T. Honegger, K. Berton, D. Peyrade
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C6O11–C6O15 (2010)
https://doi.org/10.1116/1.3503897
Published: November 2010
View article titled, Colloidal optical waveguides with integrated local light sources built by capillary force assembly
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Journal Articles

a -plane GaN hydride vapor phase epitaxy on a -plane GaN templates with and without use of TiN intermediate layers

A. Y. Polyakov, A. V. Markov, M. V. Mezhennyi, A. A. Donskov, S. S. Malakhov, A. V. Govorkov, Yu. P. Kozlova, V. F. Pavlov, N. B. Smirnov, T. G. Yugova, I.-H. Lee, J. Han, Q. Sun, S. J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, 1039–1043 (2010)
https://doi.org/10.1116/1.3491187
Published: September 2010
View article titled, a -plane GaN hydride vapor phase epitaxy on a -plane GaN templates with and without use of TiN intermediate layers
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