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Journal Articles

Fabrication of slanted gratings by using glancing angle deposition

Hongwen Wu, Aixi Pan, Chenxu Zhu, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 023002 (2024)
https://doi.org/10.1116/6.0003479
Published: March 2024
View articletitled, Fabrication of slanted gratings by using glancing angle deposition
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Journal Articles

Analytic solutions for calculating the surface inclination of isotropic media and bare substrates by using reflection-based generalized ellipsometry

Christian Negara, Thomas Längle, Jürgen Beyerer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 034012 (2020)
https://doi.org/10.1116/1.5144506
Published: April 2020
View articletitled, Analytic solutions for calculating the surface inclination of isotropic media and bare substrates by using reflection-based generalized ellipsometry
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Includes: Supplementary data
Journal Articles

Novel electron monochromator for high resolution imaging and spectroscopy

Marian Mankos, Khashayar Shadman, Vladimir Kolarik
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06KP01 (2016)
https://doi.org/10.1116/1.4962383
Published: September 2016
View articletitled, Novel electron monochromator for high resolution imaging and spectroscopy
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Journal Articles

Efficient and ultrafast optical modulation of on-chip thermionic emission using resonant cavity coupled electron emitters

Fatemeh Rezaeifar, Rehan Kapadia
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 041228 (2016)
https://doi.org/10.1116/1.4955190
Published: July 2016
View articletitled, Efficient and ultrafast optical modulation of on-chip thermionic emission using resonant cavity coupled electron emitters
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Includes: Supplementary data
Journal Articles

Resonant cavity germanium photodetector via stacked single-crystalline nanomembranes

Minkyu Cho, Jung-Hun Seo, Munho Kim, Jaeseong Lee, Dong Liu, Weidong Zhou, Zongfu Yu, Zhenqiang Ma
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 040604 (2016)
https://doi.org/10.1116/1.4948531
Published: May 2016
View articletitled, Resonant cavity germanium photodetector via stacked single-crystalline nanomembranes
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Journal Articles

Integrating focused ion beam–scanning electron microscope with confocal Raman microscope into a single instrument

Jaroslav Jiruše, Martin Haničinec, Miloslav Havelka, Olaf Hollricher, Wolfram Ibach, Peter Spizig
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 06FC03 (2014)
https://doi.org/10.1116/1.4897502
Published: October 2014
View articletitled, Integrating focused ion beam–scanning electron microscope with confocal Raman microscope into a single instrument
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Journal Articles

Study of thermal stability of distributed Bragg reflectors based on epitaxial rare-earth oxide and silicon heterostructures

Rytis Dargis, Jeffrey Leathersich, Andrew Clark, Erdem Arkun
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 02C103 (2014)
https://doi.org/10.1116/1.4862951
Published: January 2014
View articletitled, Study of thermal stability of distributed Bragg reflectors based on epitaxial rare-earth oxide and silicon heterostructures
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Journal Articles

Molecular beam epitaxial growth of high-reflectivity and broad-bandwidth ZnTe/GaSb distributed Bragg reflectors

Jin Fan, Xinyu Liu, Lu Ouyang, Richard E. Pimpinella, Margaret Dobrowolska, Jacek K. Furdyna, David J. Smith, Yong-Hang Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 03C109 (2013)
https://doi.org/10.1116/1.4793475
Published: February 2013
View articletitled, Molecular beam epitaxial growth of high-reflectivity and broad-bandwidth ZnTe/GaSb distributed Bragg reflectors
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Journal Articles

Gas assisted focused electron beam induced etching of alumina

T. Bret, B. Afra, R. Becker, Th. Hofmann, K. Edinger, T. Liang, P. Hoffmann
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 2727–2731 (2009)
https://doi.org/10.1116/1.3243208
Published: December 2009
View articletitled, Gas assisted focused electron beam induced etching of alumina
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Journal Articles

Extreme ultraviolet lithography: Status and prospects

Jos Benschop, Vadim Banine, Sjoerd Lok, Erik Loopstra
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 2204–2207 (2008)
https://doi.org/10.1116/1.3010737
Published: December 2008
View articletitled, Extreme ultraviolet lithography: Status and prospects
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Journal Articles

Fabrication of suspended dielectric mirror structures via xenon difluoride etching of an amorphous germanium sacrificial layer

Garrett D. Cole, Elaine Behymer, Lynford L. Goddard, Tiziana C. Bond
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 593–597 (2008)
https://doi.org/10.1116/1.2890673
Published: March 2008
View articletitled, Fabrication of suspended dielectric mirror structures via xenon difluoride etching of an amorphous germanium sacrificial layer
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Journal Articles

Prospects for nanowire sculptured-thin-film devices

Sean M. Pursel, Mark W. Horn
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 2611–2615 (2007)
https://doi.org/10.1116/1.2787749
Published: December 2007
View articletitled, Prospects for nanowire sculptured-thin-film devices
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Journal Articles

Cryogenic etch process development for profile control of high aspect-ratio submicron silicon trenches

Marcel W. Pruessner, William S. Rabinovich, Todd H. Stievater, Doewon Park, Jeffrey W. Baldwin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 21–28 (2007)
https://doi.org/10.1116/1.2402151
Published: December 2006
View articletitled, Cryogenic etch process development for profile control of high aspect-ratio submicron silicon trenches
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Journal Articles

1.32 μ m   InAs ∕ GaAs quantum-dot resonant-cavity light-emitting diodes grown by metalorganic chemical vapor deposition

Kun-Fu Huang, Feng-Ming Lee, Chih-Wei Hu, Te-Chin Peng, Meng-Chyi Wu, Chia-Chien Lin, Tung-Po Hsieh, Jen-Inn Chyi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 1922–1924 (2006)
https://doi.org/10.1116/1.2221316
Published: July 2006
View articletitled, 1.32 μ m   InAs ∕ GaAs quantum-dot resonant-cavity light-emitting diodes grown by metalorganic chemical vapor deposition
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Journal Articles

Molecular beam epitaxy of InP-based alloys for long-wavelength vertical cavity lasers

David A. Buell, Daniel Feezell, Bjørn-Ove Finland, Larry Coldren
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 1544–1547 (2006)
https://doi.org/10.1116/1.2200380
Published: May 2006
View articletitled, Molecular beam epitaxy of InP-based alloys for long-wavelength vertical cavity lasers
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Journal Articles

Long-wavelength semiconductor saturable absorber mirrors using metamorphic InP grown on GaAs by molecular beam epitaxy

S. Suomalainen, A. Vainionpää, O. Tengvall, T. Hakulinen, R. Herda, S. Karirinne, M. Guina, O. G. Okhotnikov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 1496–1499 (2006)
https://doi.org/10.1116/1.2197514
Published: May 2006
View articletitled, Long-wavelength semiconductor saturable absorber mirrors using metamorphic InP grown on GaAs by molecular beam epitaxy
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Journal Articles

Time dependence of wet oxidized Al Ga As ∕ Ga As distributed Bragg reflectors

R. Y. Li, Z. G. Wang, B. Xu, P. Jin, X. Guo, M. Chen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 2137–2140 (2005)
https://doi.org/10.1116/1.2050657
Published: September 2005
View articletitled, Time dependence of wet oxidized Al Ga As ∕ Ga As distributed Bragg reflectors
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Journal Articles

Monolithic organic-oxide microcavities fabricated by low-temperature electron-beam evaporation

Luana Persano, Roberto Cingolani, Dario Pisignano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 1654–1658 (2005)
https://doi.org/10.1116/1.1990164
Published: July 2005
View articletitled, Monolithic organic-oxide microcavities fabricated by low-temperature electron-beam evaporation
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Journal Articles

Ion beam sputter deposition of soft x-ray Mo ∕ Si multilayer mirrors

E. Schubert, F. Frost, B. Ziberi, G. Wagner, H. Neumann, B. Rauschenbach
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 959–965 (2005)
https://doi.org/10.1116/1.1924610
Published: May 2005
View articletitled, Ion beam sputter deposition of soft x-ray Mo ∕ Si multilayer mirrors
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Journal Articles

Molecular-beam-epitaxy growth of high-quality In Ga As N ∕ Ga As quantum well lasers emitting at 1.3 μ m

J. S. Wang, R. S. Hsiao, G. Lin, K. F. Lin, H. Y. Liu, C. M. Lai, L. Wei, C. Y. Liang, J. Y. Chi, A. R. Kovsh, N. A. Maleev, D. A. Livshits, J. F. Chen, H. C. Yu, V. M. Ustinov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 22, 2663–2667 (2004)
https://doi.org/10.1116/1.1807839
Published: November 2004
View articletitled, Molecular-beam-epitaxy growth of high-quality In Ga As N ∕ Ga As quantum well lasers emitting at 1.3 μ m
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